{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,6,3]],"date-time":"2026-06-03T04:41:31Z","timestamp":1780461691709,"version":"3.54.1"},"reference-count":23,"publisher":"MDPI AG","issue":"5","license":[{"start":{"date-parts":[[2017,5,16]],"date-time":"2017-05-16T00:00:00Z","timestamp":1494892800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>When the quartz crystal microbalance (QCM) is used in liquid for adsorption or desorption monitoring based bio- or chemical sensing applications, the frequency shift is not only determined by the surface mass change, but also by the change of liquid characteristics, such as density and viscosity, which are greatly affected by the liquid environmental temperature. A monolithic dual-channel QCM is designed and fabricated by arranging two QCM resonators on one single chip for cancelling the fluctuation induced by environmental factors. In actual applications, one QCM works as a specific sensor by modifying with functional membranes and the other acts as a reference, only measuring the liquid property. The dual-channel QCM is designed with an inverted-mesa structure, aiming to realize a high frequency miniaturized chip and suppress the frequency interference between the neighbored QCM resonators. The key problem of dual-channel QCMs is the interference between two channels, which is influenced by the distance of adjacent resonators. The diameter of the reference electrode has been designed into several values in order to find the optimal parameter. Experimental results demonstrated that the two QCMs could vibrate individually and the output frequency stability and drift can be greatly improved with the aid of the reference QCM.<\/jats:p>","DOI":"10.3390\/s17051136","type":"journal-article","created":{"date-parts":[[2017,5,16]],"date-time":"2017-05-16T11:42:11Z","timestamp":1494934931000},"page":"1136","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":7,"title":["Development of a Flow Injection Based High Frequency Dual Channel Quartz Crystal Microbalance"],"prefix":"10.3390","volume":"17","author":[{"given":"Jinxing","family":"Liang","sequence":"first","affiliation":[{"name":"Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Jing","family":"Zhang","sequence":"additional","affiliation":[{"name":"Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Wenxiang","family":"Zhou","sequence":"additional","affiliation":[{"name":"Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Toshitsugu","family":"Ueda","sequence":"additional","affiliation":[{"name":"Research Center of the Graduate school of IPS, Waseda University, Kitakyushu 808-0135, Japan"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"1968","published-online":{"date-parts":[[2017,5,16]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"224501","DOI":"10.1063\/1.4880316","article-title":"An ultrasensitive quartz crystal microbalance-micropillars based sensor for humidity detection","volume":"115","author":"Wang","year":"2014","journal-title":"J. Appl. Phys."},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"1320","DOI":"10.1016\/j.snb.2015.07.024","article-title":"Numerical simulation and experimental study of resonance characteristics of QCM-P devices operating in liquid and their application in biological detection","volume":"220","author":"Wang","year":"2015","journal-title":"Sens. Actuators B Chem."},{"key":"ref_3","doi-asserted-by":"crossref","unstructured":"Esmaeilzadeh, H., Cernigliaro, G., Su, J., Gong, L., Mirzaee, I., Charmchi, M., and Sun, H. (2015, January 13\u201319). The effects of material properties on pillar-based QCM sensors. Proceedings of the ASME 2015 International Mechanical Engineering Congress and Exposition, Houston, TX, USA.","DOI":"10.1115\/IMECE2015-52533"},{"key":"ref_4","doi-asserted-by":"crossref","unstructured":"Su, J., Inalpolat, M., Ge, T., Esmaeilzadeh, H., and Sun, H. (2016, January 10\u201314). Experimental study and analysis of dropwise condensation using Quartz Crystal Microbalance. Proceedings of the ASME 2016, Washington, DC, USA.","DOI":"10.1115\/HT2016-1033"},{"key":"ref_5","first-page":"206","article-title":"Verwendung von Schwingquarzen zur W\u00e4gung d\u00fcnner Schichten und zur Mikrow\u00e4gung","volume":"155","author":"Sauerbrey","year":"1959","journal-title":"Z. Phys. A Hadron. Nucl."},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"1770","DOI":"10.1021\/ac00285a062","article-title":"Frequency of a quartz microbalance in contact with liquid","volume":"57","author":"Kanazawa","year":"1985","journal-title":"Anal. Chem."},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"4975","DOI":"10.1021\/ac030141u","article-title":"Temperature-Induced Apparent Mass Changes Observed during Quartz Crystal Microbalance Measurements of Atomic Layer Deposition","volume":"75","author":"Rocklein","year":"2003","journal-title":"Anal. Chem."},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"267","DOI":"10.1021\/ac00098a005","article-title":"Dual Quartz Crystal Microbalance","volume":"67","author":"Dunham","year":"1996","journal-title":"Anal. Chem."},{"key":"ref_9","doi-asserted-by":"crossref","unstructured":"Lin, N., Meng, X., and Nie, J. (2016). Dew Point Calibration System Using a Quartz Crystal Sensor with a Differential Frequency Method. Sensors, 16.","DOI":"10.3390\/s16111944"},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"86","DOI":"10.1109\/JSEN.2010.2051662","article-title":"A Monolithic QCM Array Designed for Mounting on a Flow Cell","volume":"11","author":"Abe","year":"2011","journal-title":"IEEE Sens. J."},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"2920","DOI":"10.3390\/S7112920","article-title":"Enhanced Sensory Properties of a Multichannel Quartz Crystal Microbalance Coated with Polymeric Nanobeads","volume":"7","author":"Pantalei","year":"2007","journal-title":"Sensors"},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"1676","DOI":"10.1109\/JSEN.2006.884169","article-title":"Four-Channel QCA Using Mesoporous Silica Films for Gas Sensing Applications","volume":"6","author":"Palaniappan","year":"2006","journal-title":"IEEE Sens. J."},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"139","DOI":"10.1016\/S0924-4247(99)00330-1","article-title":"One-chip multichannel quartz crystal microbalance (QCM) fabricated by Deep RIE","volume":"82","author":"Abe","year":"2000","journal-title":"Sens. Actuators A Phys."},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"6361","DOI":"10.3390\/s100706361","article-title":"QCM-Arrays for Sensing Terpenes in Fresh and Dried Herbs via Bio-Mimetic MIP Layers","volume":"10","author":"Iqbal","year":"2010","journal-title":"Sensors"},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"274","DOI":"10.1109\/JSEN.2003.814650","article-title":"Frequency Interference between Two Quartz Crystal Microbalances","volume":"3","author":"Shen","year":"2003","journal-title":"IEEE Sens. J."},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"576","DOI":"10.1016\/j.bios.2014.09.047","article-title":"Real-time multianalyte biosensors based on interference-free multichannel monolithic quartz crystal microbalance","volume":"67","author":"Jaruwongrungsee","year":"2015","journal-title":"Biosens. Bioelectron."},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"150","DOI":"10.1016\/j.ultras.2007.11.003","article-title":"Effects of electrodes with continuously varying thickness on energy trapping in thickness-shear mode quartz resonators","volume":"48","author":"Wang","year":"2008","journal-title":"Ultrasonics"},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"114","DOI":"10.1016\/j.aca.2010.12.022","article-title":"A review of monolithic multichannel quartz crystal microbalance: A review","volume":"687","author":"Tuantranont","year":"2011","journal-title":"Anal. Chim. Acta"},{"key":"ref_19","doi-asserted-by":"crossref","first-page":"668","DOI":"10.1109\/TUFFC.2003.1209554","article-title":"Frequency Interference between Two Mesa-Shaped Quartz Crystal Microbalances","volume":"50","author":"Shen","year":"2003","journal-title":"IEEE Trans. Ultrason. Ferroelectr. Freq. Control"},{"key":"ref_20","doi-asserted-by":"crossref","first-page":"12140","DOI":"10.3390\/s130912140","article-title":"An Experimental Study on Fabricating an Inverted Mesa-Type Quartz Crystal Resonator Using a Cheap Wet Etching Process","volume":"13","author":"Liang","year":"2013","journal-title":"Sensors"},{"key":"ref_21","first-page":"201","article-title":"Development of Portable Quartz Crystal Microbalance for Biosensor Applications","volume":"28","author":"Liang","year":"2016","journal-title":"Sens. Mater."},{"key":"ref_22","doi-asserted-by":"crossref","first-page":"361","DOI":"10.1109\/JSEN.2003.815783","article-title":"Monolithic Miniaturized Quartz Microbalance Array and Its Application to Chemical Sensor Systems for Liquids","volume":"3","author":"Rabe","year":"2003","journal-title":"IEEE Sens. J."},{"key":"ref_23","unstructured":"Lu, F., Lee, H.P., and Lim, S.P. (2003, January 22\u201324). Finite Element Modeling and Analysis of Multi-Channel Quartz Crystal Microbalance. Proceedings of the IEEE Sensors, Toronto, ON, Canada."}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/17\/5\/1136\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T18:35:57Z","timestamp":1760207757000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/17\/5\/1136"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2017,5,16]]},"references-count":23,"journal-issue":{"issue":"5","published-online":{"date-parts":[[2017,5]]}},"alternative-id":["s17051136"],"URL":"https:\/\/doi.org\/10.3390\/s17051136","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2017,5,16]]}}}