{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,7,17]],"date-time":"2026-07-17T13:07:52Z","timestamp":1784293672836,"version":"3.55.0"},"reference-count":18,"publisher":"MDPI AG","issue":"6","license":[{"start":{"date-parts":[[2017,6,8]],"date-time":"2017-06-08T00:00:00Z","timestamp":1496880000000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>To solve the problem that MEMS vector hydrophones are greatly interfered with by the vibration of the platform and flow noise in applications, this paper describes a differential MEMS vector hydrophone that could simultaneously receive acoustic signals and reject acceleration signals. Theoretical and simulation analyses have been carried out. Lastly, a prototype of the differential MEMS vector hydrophone has been created and tested using a standing wave tube and a vibration platform. The results of the test show that this hydrophone has a high sensitivity, Mv = \u2212185 dB (@ 500 Hz, 0 dB reference 1 V\/\u03bcPa), which is almost the same as the previous MEMS vector hydrophones, and has a low acceleration sensitivity, Mv = \u221258 dB (0 dB reference 1 V\/g), which has decreased by 17 dB compared with the previous MEMS vector hydrophone. The differential MEMS vector hydrophone basically meets the requirements of acoustic vector detection when it is rigidly fixed to a working platform, which lays the foundation for engineering applications of MEMS vector hydrophones.<\/jats:p>","DOI":"10.3390\/s17061332","type":"journal-article","created":{"date-parts":[[2017,6,8]],"date-time":"2017-06-08T10:26:09Z","timestamp":1496917569000},"page":"1332","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":16,"title":["The Development of the Differential MEMS Vector Hydrophone"],"prefix":"10.3390","volume":"17","author":[{"given":"Guojun","family":"Zhang","sequence":"first","affiliation":[{"name":"Science and Technology on Electronic Test &amp; Measurement Laboratory, North University of China, Taiyuan 030051, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Mengran","family":"Liu","sequence":"additional","affiliation":[{"name":"Science and Technology on Electronic Test &amp; Measurement Laboratory, North University of China, Taiyuan 030051, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Nixin","family":"Shen","sequence":"additional","affiliation":[{"name":"Science and Technology on Electronic Test &amp; Measurement Laboratory, North University of China, Taiyuan 030051, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Xubo","family":"Wang","sequence":"additional","affiliation":[{"name":"Science and Technology on Electronic Test &amp; Measurement Laboratory, North University of China, Taiyuan 030051, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-1762-9246","authenticated-orcid":false,"given":"Wendong","family":"Zhang","sequence":"additional","affiliation":[{"name":"Science and Technology on Electronic Test &amp; Measurement Laboratory, North University of China, Taiyuan 030051, China"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"1968","published-online":{"date-parts":[[2017,6,8]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"1021","DOI":"10.1016\/j.mejo.2007.09.008","article-title":"Design, Fabrication, and Preliminary Characterization of a Novel MEMS Bionic Vector Hydrophone","volume":"38","author":"Xue","year":"2007","journal-title":"Microelectron. 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