{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,12]],"date-time":"2025-10-12T04:13:13Z","timestamp":1760242393975,"version":"build-2065373602"},"reference-count":17,"publisher":"MDPI AG","issue":"6","license":[{"start":{"date-parts":[[2017,6,11]],"date-time":"2017-06-11T00:00:00Z","timestamp":1497139200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>This paper proposes a new method for the measurement of spherical coordinates by using capacitive sensors as a non-contact probe solution of measurement of aspheric surfaces. The measurement of the average effect of the capacitive probe and the influence of capacitive probe tilting were studied with respect to an eccentric spherical surface. Based on the tested characteristic curve of the average effect of the sphere and probe, it was found that nonlinear and linear compensation resulted in high measurement accuracy. The capacitance probe was found to be trying to fulfill a need for performing nm-level precision measurement of aspheric electromagnetic surfaces.<\/jats:p>","DOI":"10.3390\/s17061355","type":"journal-article","created":{"date-parts":[[2017,6,12]],"date-time":"2017-06-12T10:27:59Z","timestamp":1497263279000},"page":"1355","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":6,"title":["Aspheric Surface Measurement Using Capacitive Sensors"],"prefix":"10.3390","volume":"17","author":[{"given":"Daocheng","family":"Yuan","sequence":"first","affiliation":[{"name":"State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an 710049, China"},{"name":"Institute of Machinery Manufacturing Technology, China Academy of Engineering Physics, Mianyang 621000, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Huiying","family":"Zhao","sequence":"additional","affiliation":[{"name":"State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an 710049, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Xin","family":"Tao","sequence":"additional","affiliation":[{"name":"Institute of Machinery Manufacturing Technology, China Academy of Engineering Physics, Mianyang 621000, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Shaobo","family":"Li","sequence":"additional","affiliation":[{"name":"Institute of Machinery Manufacturing Technology, China Academy of Engineering Physics, Mianyang 621000, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Xueliang","family":"Zhu","sequence":"additional","affiliation":[{"name":"State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an 710049, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Chupeng","family":"Zhang","sequence":"additional","affiliation":[{"name":"State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an 710049, China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2017,6,11]]},"reference":[{"key":"ref_1","unstructured":"Pan, J. (2004). The Design Manufacture and Test of the Aspherical Optical Surfaces, Suzhou University Press."},{"key":"ref_2","first-page":"26","article-title":"Surface testing methods of aspheric optical elements","volume":"7","author":"Shi","year":"2014","journal-title":"Chin. Opt."},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"11202","DOI":"10.3788\/LOP47.011202","article-title":"Measurement of Aspheric Surface","volume":"47","author":"Zhu","year":"2010","journal-title":"Laser Optoelectron. Prog."},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"24","DOI":"10.1364\/OPN.19.4.000024","article-title":"Testing Aspheres","volume":"19","author":"Pruss","year":"2008","journal-title":"Opt. Photonics News"},{"key":"ref_5","doi-asserted-by":"crossref","unstructured":"Henselmans, R., Rosielle, N., Steinbuch, M., Saunders, I., and Bergmans, R. (2005). Design of a machine for the universal non-contact measurement of large free-form optics with 30 nm uncertainty. Proc. SPIE, 5869.","DOI":"10.1117\/12.613919"},{"key":"ref_6","doi-asserted-by":"crossref","unstructured":"Ellison, J.F., and VanKerkhove, S. (2004). Characterization of symmetric aberrations in aspheric surfaces using non-contact profilometry. Proc. SPIE, 5180.","DOI":"10.1117\/12.508042"},{"key":"ref_7","first-page":"184","article-title":"Testing of weak aspheric surface by real-time interferometry","volume":"16","author":"Wang","year":"2008","journal-title":"Opt. Precis. Eng."},{"key":"ref_8","doi-asserted-by":"crossref","unstructured":"Lee, C.O., Park, K., Park, B.C., and Lee, Y.W. (2005). An algorithm for stylus instruments to measure aspheric surfaces. Meas. Sci. Technol., 16.","DOI":"10.1088\/0957-0233\/16\/5\/023"},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"249","DOI":"10.1016\/j.measurement.2016.02.021","article-title":"Scanning measurement of aspheres","volume":"85","author":"Riedel","year":"2016","journal-title":"Measurement"},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"607","DOI":"10.1016\/j.precisioneng.2011.04.004","article-title":"The NANOMEFOS non-contact measurement machine for freeform optics","volume":"35","author":"Henselmans","year":"2011","journal-title":"Precis. Eng."},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"494","DOI":"10.1016\/j.wear.2010.06.001","article-title":"Recent trends in surface metrology","volume":"271","author":"Mathia","year":"2011","journal-title":"Wear"},{"key":"ref_12","doi-asserted-by":"crossref","unstructured":"Pint\u00f3, A., Laguarta, F., Artigas, R., and Cadevall, C. (2011). Non-contact measurement of aspherical and freeform optics with a new confocal tracking profiler. Proc. SPIE, 8169.","DOI":"10.1117\/12.896724"},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"135","DOI":"10.1016\/j.sna.2005.12.012","article-title":"A new capacitive displacement sensor with high accuracy and long-range","volume":"130","author":"Kim","year":"2006","journal-title":"Sens. Actuators A Phys."},{"key":"ref_14","unstructured":"(2017, April 06). Micro-Epsilon Cat--capaNCDT--En. Available online: http:\/\/www.micro-epsilon.com\/download\/products\/cat--capaNCDT\u2014en.pdf."},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"15","DOI":"10.1016\/S0263-2241(98)00006-2","article-title":"A review on methods for probe performance verification","volume":"23","author":"Miguel","year":"1998","journal-title":"Measurement"},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1016\/j.sna.2010.01.033","article-title":"Ultraprecision 3D probing system based on spherical capacitive plate","volume":"159","author":"Tan","year":"2010","journal-title":"Sens. Actuators A Phys."},{"key":"ref_17","unstructured":"Koh, S.-P. (1989). Surface Profile Measurement during the Turning Process Using Fringe-Field Capacitive Sensing. [Ph.D. Thesis, University of Washington]."}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/17\/6\/1355\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T18:38:43Z","timestamp":1760207923000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/17\/6\/1355"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2017,6,11]]},"references-count":17,"journal-issue":{"issue":"6","published-online":{"date-parts":[[2017,6]]}},"alternative-id":["s17061355"],"URL":"https:\/\/doi.org\/10.3390\/s17061355","relation":{},"ISSN":["1424-8220"],"issn-type":[{"type":"electronic","value":"1424-8220"}],"subject":[],"published":{"date-parts":[[2017,6,11]]}}}