{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,3,17]],"date-time":"2026-03-17T20:25:24Z","timestamp":1773779124064,"version":"3.50.1"},"reference-count":18,"publisher":"MDPI AG","issue":"9","license":[{"start":{"date-parts":[[2017,8,25]],"date-time":"2017-08-25T00:00:00Z","timestamp":1503619200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["61471324"],"award-info":[{"award-number":["61471324"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["51425505"],"award-info":[{"award-number":["51425505"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>The highly sensitive pressure sensor presented in this paper aims at wireless passive sensing in a high temperature environment by using microwave backscattering technology. The structure of the re-entrant resonator was analyzed and optimized using theoretical calculation, software simulation, and its equivalent lump circuit model was first modified by us. Micro-machining and high-temperature co-fired ceramic (HTCC) process technologies were applied to fabricate the sensor, solving the common problem of cavity sealing during the air pressure loading test. In addition, to prevent the response signal from being immersed in the strong background clutter of the hermetic metal chamber, which makes its detection difficult, we proposed two key techniques to improve the signal to noise ratio: the suppression of strong background clutter and the detection of the weak backscattered signal of the sensor. The pressure sensor demonstrated in this paper works well for gas pressure loading between 40 and 120 kPa in a temperature range of 24 \u00b0C to 800 \u00b0C. The experimental results show that the sensor resonant frequency lies at 2.1065 GHz, with a maximum pressure sensitivity of 73.125 kHz\/kPa.<\/jats:p>","DOI":"10.3390\/s17091963","type":"journal-article","created":{"date-parts":[[2017,8,25]],"date-time":"2017-08-25T11:03:17Z","timestamp":1503658997000},"page":"1963","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":23,"title":["Slot Antenna Integrated Re-Entrant Resonator Based Wireless Pressure Sensor for High-Temperature Applications"],"prefix":"10.3390","volume":"17","author":[{"given":"Shujing","family":"Su","sequence":"first","affiliation":[{"name":"Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China"},{"name":"Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-0521-4457","authenticated-orcid":false,"given":"Fei","family":"Lu","sequence":"additional","affiliation":[{"name":"Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China"},{"name":"Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-0723-6908","authenticated-orcid":false,"given":"Guozhu","family":"Wu","sequence":"additional","affiliation":[{"name":"Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China"},{"name":"Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Dezhi","family":"Wu","sequence":"additional","affiliation":[{"name":"Department of Mechanical & Electrical Engineering, Xiamen University, Xiamen 361005, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Qiulin","family":"Tan","sequence":"additional","affiliation":[{"name":"Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China"},{"name":"Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Helei","family":"Dong","sequence":"additional","affiliation":[{"name":"Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China"},{"name":"Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jijun","family":"Xiong","sequence":"additional","affiliation":[{"name":"Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China"},{"name":"Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2017,8,25]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"108","DOI":"10.1016\/j.sna.2003.07.011","article-title":"A novel high temperature pressure sensor on the basis of SOI layers","volume":"108","author":"Zhao","year":"2003","journal-title":"Sens. Actuators A Phys."},{"key":"ref_2","unstructured":"Toygur, L., Yu, X., and Garverick, S. (2004, January 4\u20137). High-temperature, low-power 8-Meg\u03a9 by 1.2-MegHz SOI-CMOS transimpedance amplifier for MEMS-based wireless sensors. Proceedings of the 2004 IEEE International Soi Conference, Charleston, SC, USA."},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"4609","DOI":"10.1364\/OL.38.004609","article-title":"High-temperature fiber-optic fabry\u2013perot interferometric pressure sensor fabricated by femtosecond laser: Erratum","volume":"38","author":"Kaur","year":"2013","journal-title":"Opt. Lett."},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"201","DOI":"10.1016\/j.optcom.2016.03.026","article-title":"Diaphragm-free fiber-optic fabry\u2013perot interferometer based on tapered hollow silica tube","volume":"371","author":"Fang","year":"2016","journal-title":"Opt. Commun."},{"key":"ref_5","doi-asserted-by":"crossref","unstructured":"Canabal, A., Davulis, P.M., Pollard, T., and Cunha, M.P.D. (2010, January 11\u201314). Multi-sensor wireless interrogation of SAW resonators at high temperatures. Proceedings of the 2010 IEEE International Ultrasonics Symposium, San Diego, CA, USA.","DOI":"10.1109\/ULTSYM.2010.5935789"},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"364","DOI":"10.1016\/j.sna.2012.09.012","article-title":"High precision pressure sensors based on saw devices in the GHz range","volume":"189","author":"Iriarte","year":"2013","journal-title":"Sens. Actuators A Phys."},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"2417","DOI":"10.3390\/s140202417","article-title":"A high temperature capacitive pressure sensor based on alumina ceramic for in situ measurement at 600 \u00b0C","volume":"14","author":"Tan","year":"2014","journal-title":"Sensors"},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"814","DOI":"10.3390\/mi5040814","article-title":"A passive pressure sensor fabricated by post-fire metallization on zirconia ceramic for high-temperature applications","volume":"5","author":"Luo","year":"2014","journal-title":"Micromachines"},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"299","DOI":"10.1016\/j.sna.2015.10.052","article-title":"Antenna-resonator integrated wireless passive temperature sensor based on low-temperature co-fired ceramic for harsh environment","volume":"236","author":"Tan","year":"2015","journal-title":"Sens. Actuators A Phys."},{"key":"ref_10","doi-asserted-by":"crossref","unstructured":"Kubina, B., Schusler, M., Mandel, C., Mehmood, A., and Jakoby, R. (2013, January 3\u20136). Wireless high-temperature sensing with a chipless tag based on a dielectric resonator antenna. Proceedings of the 2013 IEEE Sensors, Baltimore, MD, USA.","DOI":"10.1109\/ICSENS.2013.6688181"},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"22","DOI":"10.1016\/j.sna.2014.09.010","article-title":"Evanescent-mode-resonator-based and antenna-integrated wireless passive pressure sensors for harsh-environment applications","volume":"220","author":"Cheng","year":"2014","journal-title":"Sens. Actuators A Phys."},{"key":"ref_12","unstructured":"Peroulis, D., Anand, A., Small, J.A., Liu, X., Arif, M.S., and Sinani, M. (2013). Tunable Cavity Resonator Having a Post and Variable Capacitive Coupling. (9,325,052), U.S. Patent."},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"727","DOI":"10.1109\/JMEMS.2013.2281119","article-title":"All-silicon technology for high-Q evanescent mode cavity tunable resonators and filters","volume":"23","author":"Arif","year":"2014","journal-title":"J. Microelectromech. Syst."},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"125114","DOI":"10.1063\/1.4848935","article-title":"Rigorous analysis of highly tunable cylindrical transverse magnetic mode re-entrant cavities","volume":"84","author":"Fan","year":"2013","journal-title":"Rev. Sci. Instrum."},{"key":"ref_15","unstructured":"Gong, X., Margomenos, A., Liu, B., and Chappell, W.J. (2004, January 6\u201311). High-Q evanescent-mode filters using silicon micromachining and polymer stereo lithography (SL) processing. Proceedings of the 2004 IEEE MTT-S International Conference, Fort Worth, TX, USA."},{"key":"ref_16","unstructured":"Timoshenko, S., and Woinowsky-krieger, S. (1959). Theory of Plates and Shells. Studies in Mathematics & Its Applications, Elsevier."},{"key":"ref_17","unstructured":"Fonseca, M.A. (2007). Polymer\/Ceramic Wireless MEMS Pressure Sensors for Harsh Environments: High Temperature and Biomedical Applications. [Ph.D. Thesis, Georgia Institute of Technology]."},{"key":"ref_18","first-page":"337","article-title":"Wireless passive polymer-derived SiCN ceramic sensor with integrated resonator\/antenna","volume":"103","author":"Li","year":"2013","journal-title":"Appl. Phys. Lett."}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/17\/9\/1963\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T18:43:18Z","timestamp":1760208198000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/17\/9\/1963"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2017,8,25]]},"references-count":18,"journal-issue":{"issue":"9","published-online":{"date-parts":[[2017,9]]}},"alternative-id":["s17091963"],"URL":"https:\/\/doi.org\/10.3390\/s17091963","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2017,8,25]]}}}