{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,12]],"date-time":"2025-10-12T04:14:29Z","timestamp":1760242469001,"version":"build-2065373602"},"reference-count":35,"publisher":"MDPI AG","issue":"9","license":[{"start":{"date-parts":[[2017,9,6]],"date-time":"2017-09-06T00:00:00Z","timestamp":1504656000000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100003958","name":"Stichting voor de Technische Wetenschappen","doi-asserted-by":"publisher","award":["DEL.11476"],"award-info":[{"award-number":["DEL.11476"]}],"id":[{"id":"10.13039\/501100003958","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>Increasing demand for field instruments designed to measure gas composition has strongly promoted the development of robust, miniaturized and low-cost handheld absorption spectrometers in the mid-infrared. Efforts thus far have focused on miniaturizing individual components. However, the optical absorption path that the light beam travels through the sample defines the length of the gas cell and has so far limited miniaturization. Here, we present a functionally integrated linear variable optical filter and gas cell, where the sample to be measured is fed through the resonator cavity of the filter. By using multiple reflections from the mirrors on each side of the cavity, the optical absorption path is elongated from the physical     m m    -level to the effective     m m    -level. The device is batch-fabricated at the wafer level in a CMOS-compatible approach. The optical performance is analyzed using the Fizeau interferometer model and demonstrated with actual gas measurements.<\/jats:p>","DOI":"10.3390\/s17092041","type":"journal-article","created":{"date-parts":[[2017,9,6]],"date-time":"2017-09-06T11:23:34Z","timestamp":1504697014000},"page":"2041","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":3,"title":["Functionalizing a Tapered Microcavity as a Gas Cell for On-Chip Mid-Infrared Absorption Spectroscopy"],"prefix":"10.3390","volume":"17","author":[{"ORCID":"https:\/\/orcid.org\/0000-0001-7266-2124","authenticated-orcid":false,"given":"N.","family":"Ayerden","sequence":"first","affiliation":[{"name":"Electronic Instrumentation Laboratory, Microelectronics Department, Faculty of EEMCS, Delft University of Technology, Mekelweg 4, 2628 CD Delft, The Netherlands"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Julien","family":"Mandon","sequence":"additional","affiliation":[{"name":"Life Science Trace Gas Research Group, Department of Molecular and Laser Physics, Institute for Molecules and Materials, Radboud University Nijmegen, Heijendaalseweg 135, 6525 AJ Nijmegen, The Netherlands"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Frans","family":"Harren","sequence":"additional","affiliation":[{"name":"Life Science Trace Gas Research Group, Department of Molecular and Laser Physics, Institute for Molecules and Materials, Radboud University Nijmegen, Heijendaalseweg 135, 6525 AJ Nijmegen, The Netherlands"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Reinoud","family":"Wolffenbuttel","sequence":"additional","affiliation":[{"name":"Electronic Instrumentation Laboratory, Microelectronics Department, Faculty of EEMCS, Delft University of Technology, Mekelweg 4, 2628 CD Delft, The Netherlands"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2017,9,6]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"012004","DOI":"10.1088\/0957-0233\/24\/1\/012004","article-title":"Optical gas sensing: A review","volume":"24","author":"Hodgkinson","year":"2013","journal-title":"Meas. Sci. Technol."},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"257","DOI":"10.1364\/OL.38.000257","article-title":"Compact multipass optical cell for laser spectroscopy","volume":"38","author":"Tuzson","year":"2013","journal-title":"Opt. Lett."},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"913","DOI":"10.1364\/JOSAA.33.000913","article-title":"Circular paraboloid reflection cell for laser spectroscopic trace gas analysis","volume":"33","author":"Mangold","year":"2016","journal-title":"J. Opt. Soc. Am. A"},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"659","DOI":"10.1007\/s00340-006-2177-2","article-title":"Optical\u2013feedback cavity\u2013enhanced absorption: A compact spectrometer for real\u2013time measurement of atmospheric methane","volume":"83","author":"Romanini","year":"2006","journal-title":"Appl. Phys. B Lasers Opt."},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"093115","DOI":"10.1063\/1.3008014","article-title":"Trace gas measurements using optically resonant cavities and quantum cascade lasers operating at room temperature","volume":"104","author":"Welzel","year":"2008","journal-title":"J. Appl. Phys."},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"B47","DOI":"10.1364\/PRJ.3.000B47","article-title":"Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip [Invited]","volume":"3","author":"Subramanian","year":"2015","journal-title":"Photonics Res."},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"7267","DOI":"10.1364\/AO.53.007267","article-title":"High-speed broadband FTIR system using MEMS","volume":"53","author":"Ayerden","year":"2014","journal-title":"Appl. Opt."},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"897","DOI":"10.1177\/0003702816638295","article-title":"On-Chip Micro\u2013Electro\u2013Mechanical System Fourier Transform Infrared (MEMS FT-IR) Spectrometer-Based Gas Sensing","volume":"70","author":"Erfan","year":"2016","journal-title":"Appl. Spectrosc."},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"11930","DOI":"10.1364\/OE.16.011930","article-title":"Cavity-enhanced on-chip absorption spectroscopy using microring resonators","volume":"16","author":"Nitkowski","year":"2008","journal-title":"Opt. Express"},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"12356","DOI":"10.1364\/OE.19.012356","article-title":"High resolution on-chip spectroscopy based on miniaturized microdonut resonators","volume":"19","author":"Xia","year":"2011","journal-title":"Opt. Express"},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"746","DOI":"10.1038\/nphoton.2013.190","article-title":"Compact spectrometer based on a disordered photonic chip","volume":"7","author":"Redding","year":"2013","journal-title":"Nat. Photonics"},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"695","DOI":"10.1364\/OL.37.000695","article-title":"Multiband wavelength demultiplexer based on digital planar holography for on-chip spectroscopy applications","volume":"37","author":"Peroz","year":"2012","journal-title":"Opt. Lett."},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"e203","DOI":"10.1038\/lsa.2014.84","article-title":"Holographic planar lightwave circuit for on-chip spectroscopy","volume":"3","author":"Calafiore","year":"2014","journal-title":"Light Sci. Appl."},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"984","DOI":"10.1364\/OL.36.000984","article-title":"On-chip methane sensing by near-IR absorption signatures in a photonic crystal slot waveguide","volume":"36","author":"Lai","year":"2011","journal-title":"Opt. Lett."},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"102","DOI":"10.1364\/OE.18.000102","article-title":"Sub-nm resolution cavity enhanced micro-spectrometer","volume":"18","author":"Kyotoku","year":"2010","journal-title":"Opt. Express"},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"2299","DOI":"10.1364\/OE.15.002299","article-title":"A high-resolution silicon-on-insulator arrayed waveguide grating microspectrometer with sub-micrometer aperture waveguides","volume":"15","author":"Cheben","year":"2007","journal-title":"Opt. Express"},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"956","DOI":"10.1364\/OPTICA.3.000956","article-title":"Evanescently coupled multimode spiral spectrometer","volume":"3","author":"Redding","year":"2016","journal-title":"Optica"},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"171","DOI":"10.1109\/JMEMS.2011.2174427","article-title":"Cylindrical Surfaces Enable Wavelength-Selective Extinction and Sub-0.2 nm Linewidth in 250 \u03bcm-Gap Silicon Fabry-Perot Cavities","volume":"21","author":"Malak","year":"2012","journal-title":"J. Microelectromech. Syst."},{"key":"ref_19","doi-asserted-by":"crossref","unstructured":"Bitarafan, H.M., and DeCorby, G.R. (2017). On-Chip High-Finesse Fabry\u2013Perot Microcavities for Optical Sensing and Quantum Information. Sensors, 17.","DOI":"10.20944\/preprints201706.0078.v1"},{"key":"ref_20","doi-asserted-by":"crossref","first-page":"1128","DOI":"10.1364\/OL.36.001128","article-title":"Optical waveguide double-ring sensor using intensity interrogation with a low-cost broadband source","volume":"36","author":"Jin","year":"2011","journal-title":"Opt. Lett."},{"key":"ref_21","doi-asserted-by":"crossref","first-page":"191","DOI":"10.1016\/S0924-4247(99)00369-6","article-title":"Single-chip CMOS optical microspectrometer","volume":"82","author":"Correia","year":"2000","journal-title":"Sens. Actuators A Phys."},{"key":"ref_22","doi-asserted-by":"crossref","first-page":"67","DOI":"10.1038\/nature14576","article-title":"A colloidal quantum dot spectrometer","volume":"523","author":"Bao","year":"2015","journal-title":"Nature"},{"key":"ref_23","doi-asserted-by":"crossref","unstructured":"Gagliardi, G., and Loock, H.P. (2014). Cavity-Enhanced Spectroscopy and Sensing, Springer.","DOI":"10.1007\/978-3-642-40003-2"},{"key":"ref_24","doi-asserted-by":"crossref","first-page":"604","DOI":"10.1364\/OL.15.000604","article-title":"Limitation of a wedged \u00e9talon for high-resolution linewidth measurements","volume":"15","author":"Rob","year":"1990","journal-title":"Opt. Lett."},{"key":"ref_25","doi-asserted-by":"crossref","first-page":"1452","DOI":"10.1366\/0003702042641281","article-title":"Gas-Phase Databases for Quantitative Infrared Spectroscopy","volume":"58","author":"Sharpe","year":"2004","journal-title":"Appl. Spectrosc."},{"key":"ref_26","doi-asserted-by":"crossref","first-page":"2647","DOI":"10.1364\/OL.30.002647","article-title":"Improving the spectral resolution of wedged etalons and linear variable filters with incidence angle","volume":"30","author":"McLeod","year":"2005","journal-title":"Opt. Lett."},{"key":"ref_27","doi-asserted-by":"crossref","first-page":"2981","DOI":"10.1364\/OE.24.002981","article-title":"Compact gas cell integrated with a linear variable optical filter","volume":"24","author":"Ayerden","year":"2016","journal-title":"Opt. Express"},{"key":"ref_28","doi-asserted-by":"crossref","first-page":"917","DOI":"10.1016\/j.snb.2016.03.081","article-title":"A miniaturized optical gas-composition sensor with integrated sample chamber","volume":"236","author":"Ayerden","year":"2016","journal-title":"Sens. Actuators B Chem."},{"key":"ref_29","doi-asserted-by":"crossref","first-page":"2591","DOI":"10.1063\/1.115141","article-title":"3.2 \u03bcm infrared resonant cavity light emitting diode","volume":"67","author":"Hadji","year":"1995","journal-title":"Appl. Phys. Lett."},{"key":"ref_30","doi-asserted-by":"crossref","first-page":"1381","DOI":"10.1016\/j.sse.2010.06.007","article-title":"Infrared light emitting device with two color emission","volume":"54","author":"Das","year":"2010","journal-title":"Solid\u00b7State Electron."},{"key":"ref_31","doi-asserted-by":"crossref","first-page":"185701","DOI":"10.1063\/1.4983023","article-title":"Broadband mid-infrared superlattice light-emitting diodes","volume":"121","author":"Ricker","year":"2017","journal-title":"J. Appl. Phys."},{"key":"ref_32","doi-asserted-by":"crossref","first-page":"62","DOI":"10.1007\/s10043-016-0296-5","article-title":"Aspheric surface lens for LED collimating illumination with low Fresnel loss","volume":"24","author":"Chen","year":"2017","journal-title":"Opt. Rev."},{"key":"ref_33","doi-asserted-by":"crossref","first-page":"123001","DOI":"10.1117\/1.3522644","article-title":"High-efficiency light-emitting diode collimator","volume":"49","author":"Montes","year":"2010","journal-title":"Opt. Eng."},{"key":"ref_34","doi-asserted-by":"crossref","first-page":"107002","DOI":"10.1117\/1.JBO.18.10.107002","article-title":"Optical parametric oscillator-based photoacoustic detection of hydrogen cyanide for biomedical applications","volume":"18","author":"Arslanov","year":"2013","journal-title":"J. Biomed. Opt."},{"key":"ref_35","doi-asserted-by":"crossref","first-page":"4981","DOI":"10.1364\/AO.40.004981","article-title":"Far-infrared Fizeau interferometry","volume":"40","author":"Verma","year":"2001","journal-title":"Appl. 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