{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,15]],"date-time":"2025-10-15T10:19:19Z","timestamp":1760523559808,"version":"build-2065373602"},"reference-count":22,"publisher":"MDPI AG","issue":"10","license":[{"start":{"date-parts":[[2017,10,22]],"date-time":"2017-10-22T00:00:00Z","timestamp":1508630400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"name":"National key basic research program of China","award":["2015CB057400"],"award-info":[{"award-number":["2015CB057400"]}]},{"name":"National instrumentation program of China","award":["2013YQ040911"],"award-info":[{"award-number":["2013YQ040911"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>A new variant of MEMS surface fence is proposed for shear-stress estimation under high-speed, high-temperature flow conditions. Investigation of high-temperature resistance including heat-resistant mechanism and process, in conjunction with high-temperature packaging design, enable the sensor to be used in environment up to 400 \u00b0C. The packaged sensor is calibrated over a range of ~65 Pa and then used to examine the development of the transient flow of the scramjet ignition process (Mach 2 airflow, stagnation pressure, and a temperature of 0.8 MPa and 950 K, respectively). The results show that the sensor is able to detect the transient flow conditions of the scramjet ignition process including shock impact, flow correction, steady state, and hydrogen off.<\/jats:p>","DOI":"10.3390\/s17102412","type":"journal-article","created":{"date-parts":[[2017,10,23]],"date-time":"2017-10-23T04:32:19Z","timestamp":1508733139000},"page":"2412","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":4,"title":["A High-Temperature MEMS Surface Fence for Wall-Shear-Stress Measurement in Scramjet Flow"],"prefix":"10.3390","volume":"17","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-5802-6831","authenticated-orcid":false,"given":"Chengyu","family":"Ma","sequence":"first","affiliation":[{"name":"Key Laboratory of Micro\/Nano Systems for Aerospace, Ministry of Education, Northwestern Polytechnical University, Xi\u2019an 710072, China"}]},{"given":"Binghe","family":"Ma","sequence":"additional","affiliation":[{"name":"Key Laboratory of Micro\/Nano Systems for Aerospace, Ministry of Education, Northwestern Polytechnical University, Xi\u2019an 710072, China"}]},{"given":"Jinjun","family":"Deng","sequence":"additional","affiliation":[{"name":"Key Laboratory of Micro\/Nano Systems for Aerospace, Ministry of Education, Northwestern Polytechnical University, Xi\u2019an 710072, China"}]},{"given":"Weizheng","family":"Yuan","sequence":"additional","affiliation":[{"name":"Key Laboratory of Micro\/Nano Systems for Aerospace, Ministry of Education, Northwestern Polytechnical University, Xi\u2019an 710072, China"}]},{"given":"Zitong","family":"Zhou","sequence":"additional","affiliation":[{"name":"Key Laboratory of Micro\/Nano Systems for Aerospace, Ministry of Education, Northwestern Polytechnical University, Xi\u2019an 710072, China"}]},{"given":"Han","family":"Zhang","sequence":"additional","affiliation":[{"name":"Key Laboratory of Micro\/Nano Systems for Aerospace, Ministry of Education, Northwestern Polytechnical University, Xi\u2019an 710072, China"}]}],"member":"1968","published-online":{"date-parts":[[2017,10,22]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"66","DOI":"10.1016\/j.flowmeasinst.2012.11.004","article-title":"Design of a micro floating element shear stress sensor","volume":"30","author":"Lv","year":"2013","journal-title":"Flow Meas. 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Flexible thermal sensor array on PI film substrate for underwater applications. Proceedings of the 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS), Hong Kong, China.","DOI":"10.1109\/MEMSYS.2010.5442315"},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"210","DOI":"10.1007\/s003480050346","article-title":"Pulsed hot-wire measurements in two- and three-dimensional wall jets","volume":"27","author":"Abrahamsson","year":"1999","journal-title":"Exp. Fluids"},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"239","DOI":"10.1007\/s00542-015-2450-6","article-title":"A MEMS surface fence for wall shear stress measurement with high sensitivity","volume":"22","author":"Ma","year":"2016","journal-title":"Microsyst. Technol."},{"key":"ref_8","unstructured":"Ma, C., Ma, B., Deng, J., and Jin, X. (2015, January 13\u201316). A study of directional MEMS dual-fences gauge. Proceedings of the 2015 IEEE 10th International Conference on Global Software Engineering (ICGSE), Ciudad Real, Spain."},{"key":"ref_9","first-page":"264","article-title":"A micro surface fence probe for the application in flow reversal areas","volume":"97\u201398","author":"Steffes","year":"2002","journal-title":"Sens. Actuators A Phys."},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"593","DOI":"10.1007\/s00348-003-0728-4","article-title":"A MEMS skin-friction sensor for time resolved measurements in separated flows","volume":"36","author":"Schober","year":"2004","journal-title":"Exp. Fluids"},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"151","DOI":"10.1016\/j.sna.2004.01.058","article-title":"A second generation MEMS surface fence sensor for high resolution wall shear stress measurement","volume":"113","author":"Buder","year":"2004","journal-title":"Sens. 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Proceedings of the 44th AIAA\/ASME\/SAE\/ASEE Joint Propulsion Conference & Exhibit, Hartford, CT, USA.","DOI":"10.2514\/6.2008-4578"},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"1267","DOI":"10.2514\/1.J050691","article-title":"Accuracy of Direct Skin-Friction Measurements in High-Enthalpy Supersonic Flows","volume":"49","author":"Tsuru","year":"2011","journal-title":"AIAA J."},{"key":"ref_16","doi-asserted-by":"crossref","unstructured":"Meritt, R.J., and Schetz, J.A. (2014, January 16\u201320). Skin Friction Sensor Validation for High-Speed, High-Enthalpy Flow Applications. Proceedings of the 30th AIAA Aerodynamic Measurement Technology and Ground Testing Conference, Atlanta, GA, USA.","DOI":"10.2514\/6.2014-2800"},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"1","DOI":"10.2514\/1.B35917","article-title":"Skin Friction Sensor Development, Validation, and Application for High-Speed, High-Enthalpy Flow Conditions","volume":"32","author":"Meritt","year":"2016","journal-title":"J. Propuls. Power"},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"1738","DOI":"10.1109\/T-ED.1979.19679","article-title":"Electrical trimming of heavily doped polycrystalline silicon resistors","volume":"26","author":"Amemiya","year":"1979","journal-title":"IEEE Trans. Electron. Devices"},{"key":"ref_19","doi-asserted-by":"crossref","first-page":"015017","DOI":"10.1088\/0960-1317\/24\/1\/015017","article-title":"High temperature characterization of PZT(0.52\/0.48) thin-film pressure sensors","volume":"24","author":"Asadnia","year":"2014","journal-title":"J. Micromech. Microeng."},{"key":"ref_20","doi-asserted-by":"crossref","first-page":"185","DOI":"10.1017\/S0022112065001301","article-title":"Calibration of the Preston tube and limitations on its use in pressure gradients","volume":"23","author":"Patel","year":"1965","journal-title":"J. Fluid Mech."},{"key":"ref_21","doi-asserted-by":"crossref","first-page":"1396","DOI":"10.1088\/0957-0233\/7\/10\/010","article-title":"New developments and applications of skin-friction measuring techniques","volume":"7","author":"Fernholz","year":"1996","journal-title":"Meas. Sci. Technol."},{"key":"ref_22","doi-asserted-by":"crossref","first-page":"145","DOI":"10.2514\/8.1895","article-title":"Turbulent Boundary Layer in Compressible Fluids","volume":"18","year":"1951","journal-title":"J. Aeronaut. 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