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The movable film of the sensor was a 350-nm-thick polychloro-para-xylylene membrane with a diameter of 100 \u00b5m and an air gap of 300 nm. The linearity of the integrated source follower circuit was obtained. We demonstrated a gas response using 80-ppm ethanol detected by small membrane deformation of 50 nm, which resulted in an output-voltage change with the proposed high-efficiency transduction.<\/jats:p>","DOI":"10.3390\/s18010138","type":"journal-article","created":{"date-parts":[[2018,1,8]],"date-time":"2018-01-08T04:21:21Z","timestamp":1515385281000},"page":"138","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":14,"title":["Optical-Interferometry-Based CMOS-MEMS Sensor Transduced by Stress-Induced Nanomechanical Deflection"],"prefix":"10.3390","volume":"18","author":[{"given":"Satoshi","family":"Maruyama","sequence":"first","affiliation":[{"name":"AIST-TUT Advanced Sensor Collaborative Research Laboratory, Toyohashi University of Technology, Toyohashi, Aichi 441-8580, Japan"},{"name":"Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology, Toyohashi, Aichi 441-8580, Japan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Takeshi","family":"Hizawa","sequence":"additional","affiliation":[{"name":"Electronics Inspired-Interdisciplinary Research Institute (EIIRIS), Toyohashi University of Technology, Toyohashi, Aichi 441-8580, Japan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Kazuhiro","family":"Takahashi","sequence":"additional","affiliation":[{"name":"Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology, Toyohashi, Aichi 441-8580, Japan"},{"name":"JST Precursory Research for Embryonic Science and Technology (PRESTO), Tokyo 102-0076, Japan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Kazuaki","family":"Sawada","sequence":"additional","affiliation":[{"name":"Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology, Toyohashi, Aichi 441-8580, Japan"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2018,1,5]]},"reference":[{"key":"ref_1","first-page":"6501","article-title":"Photothermal spectroscopy with femtojoule sensitivity using a micromechanical device","volume":"79","author":"Barnes","year":"1994","journal-title":"Nature"},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"9783","DOI":"10.1073\/pnas.152330199","article-title":"Multiple label-free biodetection and quantitative DNA-binding assays on a nanomechanical cantilever array","volume":"99","author":"McKendry","year":"2002","journal-title":"Proc. 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