{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,5,21]],"date-time":"2026-05-21T02:55:49Z","timestamp":1779332149019,"version":"3.51.4"},"reference-count":23,"publisher":"MDPI AG","issue":"1","license":[{"start":{"date-parts":[[2018,1,19]],"date-time":"2018-01-19T00:00:00Z","timestamp":1516320000000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>This paper proposes a high sensitivity electric field microsensor (EFM) based on torsional resonance. The proposed microsensor adopts torsional shutter, which is composed of shielding electrodes and torsional beams. The movable shielding electrodes and the fixed sensing electrodes are fabricated on the same plane and interdigitally arranged. Push\u2013pull electrostatic actuation method is employed to excite the torsional shutter. Simulation results proved that the torsional shutter has higher efficiency of charge induction. The optimization of structure parameters was conducted to improve its efficiency of charge induction further. A micromachining fabrication process was developed to fabricate the EFM. Experiments were conducted to characterize the EFM. A good linearity of 0.15% was achieved within an electrostatic field range of 0\u201350 kV\/m, and the uncertainty was below 0.38% in the three roundtrip measurements. A high sensitivity of 4.82 mV\/(kV\/m) was achieved with the trans-resistance of 100 M\u03a9, which is improved by at least one order of magnitude compared with previously reported EFMs. The efficiency of charge induction for this microsensor reached 48.19 pA\/(kV\/m).<\/jats:p>","DOI":"10.3390\/s18010286","type":"journal-article","created":{"date-parts":[[2018,1,22]],"date-time":"2018-01-22T04:51:13Z","timestamp":1516596673000},"page":"286","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":44,"title":["A High Sensitivity Electric Field Microsensor Based on Torsional Resonance"],"prefix":"10.3390","volume":"18","author":[{"ORCID":"https:\/\/orcid.org\/0000-0003-3250-8928","authenticated-orcid":false,"given":"Zhaozhi","family":"Chu","sequence":"first","affiliation":[{"name":"State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China"},{"name":"University of Chinese Academy of Sciences, Beijing 100039, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Chunrong","family":"Peng","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Ren","family":"Ren","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Biyun","family":"Ling","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China"},{"name":"University of Chinese Academy of Sciences, Beijing 100039, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Zhouwei","family":"Zhang","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China"},{"name":"University of Chinese Academy of Sciences, Beijing 100039, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Hucheng","family":"Lei","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China"},{"name":"University of Chinese Academy of Sciences, Beijing 100039, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Shanhong","family":"Xia","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2018,1,19]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"661","DOI":"10.1109\/61.660958","article-title":"Experience with the detection of faulty composite insulators on high-voltage power lines by the electric field measurement method","volume":"13","author":"Vaillancourt","year":"1998","journal-title":"IEEE Trans. Power Deliv."},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"217","DOI":"10.1049\/ip-gtd:19981930","article-title":"Measurements of power system voltages using remote electric field monitoring","volume":"145","author":"Gerrard","year":"1998","journal-title":"IEE Proc. Gen. Trans. Distrib."},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"524","DOI":"10.1109\/61.131106","article-title":"DC-probes for electric field distribution measurements","volume":"11","author":"Hornfeldt","year":"1991","journal-title":"IEEE Trans. Power Deliv."},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"6","DOI":"10.1016\/j.elstat.2012.10.007","article-title":"The application of lightning forecasting based on surface electrostatic field observations and radar data","volume":"71","author":"Zeng","year":"2013","journal-title":"J. Electrost."},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"37","DOI":"10.1016\/j.jastp.2012.09.008","article-title":"Electric fields changes produced by positives cloud-to-ground lightning flashes","volume":"92","author":"Schumann","year":"2013","journal-title":"J. Atmos. Sol.-Terr. Phys."},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"301","DOI":"10.5028\/jatm.2011.03032511","article-title":"Lightning risk warnings based on atmospheric electric field measurements in Brazil","volume":"3","author":"Ferro","year":"2011","journal-title":"J. Aerosp. Technol. Manag."},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"191","DOI":"10.1007\/BF00875300","article-title":"The measurement of electric fields in clouds","volume":"62","author":"Evans","year":"1965","journal-title":"Pure Appl. Geophys."},{"key":"ref_8","doi-asserted-by":"crossref","unstructured":"Liao, J.T., Peng, Z.R., Zhang, L.X., Zhang, S., Li, N., and Li, J. (2012, January 1\u20134). Electric field distribution on four-bundle conductors in 750 kV AC substation. Proceedings of the IEEE 10th International Conference on Properties and Applications of Dielectric Materials (ICPADM2012), Bangalore, India.","DOI":"10.1109\/ICPADM.2012.6318942"},{"key":"ref_9","unstructured":"Hsu, C.H., and Muller, R.S. (1991, January 24\u201327). Micromechanical electrostatic voltmeter. Proceedings of the International Conference on Solid-State Sensors and Actuators, San Francisco, CA, USA."},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"1499","DOI":"10.1109\/JSEN.2008.923597","article-title":"A resonant micromachined electrostatic charge sensor","volume":"8","author":"Zhu","year":"2008","journal-title":"IEEE Sens. J."},{"key":"ref_11","unstructured":"Peng, C., Chen, X., Bai, Q., Luo, L., and Xia, S. (2006, January 22\u201326). A novel high performance micromechanical resonant electrostatic field sensor used in atmospheric electric field detection. Proceedings of the IEEE International Conference on MICRO Electro Mechanical Systems, Las Vegas, NV, USA."},{"key":"ref_12","unstructured":"Chen, X., Peng, C., and Xia, S. (2008, January 6\u20139). Design of a thermally driven resonant miniature electric field sensor with feedback control. Proceedings of the IEEE International Conference on Nano\/micro Engineered and Molecular Systems, Sanya, China."},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"577","DOI":"10.1109\/JMEMS.2003.818066","article-title":"Electrostatic charge and field sensors based on micromechanical resonators","volume":"12","author":"Riehl","year":"2003","journal-title":"J. Microelectromechanical Syst."},{"key":"ref_14","unstructured":"Gong, C., Tao, H., Peng, C., Bai, Q., Chen, S., and Xia, S. (November, January 30). A novel miniature interlacing vibrating electric field sensor. Proceedings of the IEEE Sensors, Irvine, CA, USA."},{"key":"ref_15","doi-asserted-by":"crossref","unstructured":"Yang, P., Peng, C., Zhang, H., Liu, S., Fang, D., and Xia, S. (2011, January 5\u20139). A high sensitivity SOI electric-field sensor with novel comb-shaped microelectrodes. Proceedings of the 16th International Solid-State Sensors, Actuators and Microsystems Conference, Beijing, China.","DOI":"10.1109\/TRANSDUCERS.2011.5969165"},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"515","DOI":"10.1016\/S0304-3886(01)00048-1","article-title":"A micro-aperture electrostatic field mill based on MEMS technology","volume":"51","author":"Horenstein","year":"2001","journal-title":"J. Electrost."},{"key":"ref_17","doi-asserted-by":"crossref","unstructured":"Bahreyni, B., Wijeweera, G., Shafai, C., and Rajapakse, A. (2007, January 10\u201314). Design and testing of a field-chopping electric field sensor using thermal actuators with mechanically amplified response. Proceedings of the Solid-State Sensors, Actuators and Microsystems Conference, Lyon, France.","DOI":"10.1109\/SENSOR.2007.4300404"},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"31","DOI":"10.1109\/JMEMS.2007.911870","article-title":"Analysis and design of a micromachined electric-field sensor","volume":"17","author":"Bahreyni","year":"2008","journal-title":"J. Microelectromechanical Syst."},{"key":"ref_19","doi-asserted-by":"crossref","unstructured":"Wu, X., Wang, X., Yan, X., and Lin, L. (2015). A novel high-sensitivity electrostatic biased electric field sensor. J. Micromechanics Microengineering, 25.","DOI":"10.1088\/0960-1317\/25\/9\/095008"},{"key":"ref_20","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1016\/j.sna.2015.03.013","article-title":"A novel micro electric field sensor with X\u2013Y, dual axis sensitive differential structure","volume":"229","author":"Wang","year":"2015","journal-title":"Sens. Actuators A"},{"key":"ref_21","doi-asserted-by":"crossref","unstructured":"Ma, Q., Huang, K., Yu, Z., and Wang, Z. (2017, January 18\u201322). An electric field sensor with double-layer floating structure for measurement of dc synthetic field coupled with ion flow. Proceedings of the International Conference on Solid-State Sensors, Actuators and Microsystems, Kaohsiung, Taiwan.","DOI":"10.1109\/TRANSDUCERS.2017.7994192"},{"key":"ref_22","doi-asserted-by":"crossref","first-page":"3","DOI":"10.1016\/j.sna.2007.01.008","article-title":"Squeeze film air damping in MEMS","volume":"136","author":"Bao","year":"2007","journal-title":"Sens. Actuators A"},{"key":"ref_23","doi-asserted-by":"crossref","first-page":"474","DOI":"10.1088\/0960-1317\/8\/3\/005","article-title":"Squeeze film damping effect on the dynamic response of a MEMS torsion mirror","volume":"8","author":"Pan","year":"1998","journal-title":"J. Micromechanics Microengineering"}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/18\/1\/286\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T14:51:51Z","timestamp":1760194311000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/18\/1\/286"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2018,1,19]]},"references-count":23,"journal-issue":{"issue":"1","published-online":{"date-parts":[[2018,1]]}},"alternative-id":["s18010286"],"URL":"https:\/\/doi.org\/10.3390\/s18010286","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2018,1,19]]}}}