{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,12,20]],"date-time":"2025-12-20T22:09:27Z","timestamp":1766268567849,"version":"build-2065373602"},"reference-count":27,"publisher":"MDPI AG","issue":"2","license":[{"start":{"date-parts":[[2018,1,25]],"date-time":"2018-01-25T00:00:00Z","timestamp":1516838400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>In this paper, a novel single-axis MEMS tilt sensor is presented. It contains a hexagonal proof mass, six micro-lever force amplifiers and three double-ended-tuning fork (DETF) resonant strain gauges. The proof mass is placed in the center with the micro-levers and the DETFs radially arrayed around. The variation of gravity acceleration applied on the proof mass will result in frequency shifts of the DETFs. Angular tilt can be got by analyzing the frequency outputs. The structural design of the tilt sensor is optimized by finite element simulation and the device is microfabricated using a silicon-on-insulator process, followed by open-loop and closed-loop characterizations. Results show that the scale factor of such sensor is at least 11.53 Hz\/degree. Minimum Allan deviation of the DETF oscillator is 220 ppb (parts per billion) of the resonant frequency for an 5 s integration time. Resolution of the tilt sensor is 0.002 \u2218 in the whole measurement range from 0 \u2218 to 360 \u2218 .<\/jats:p>","DOI":"10.3390\/s18020346","type":"journal-article","created":{"date-parts":[[2018,1,25]],"date-time":"2018-01-25T12:25:49Z","timestamp":1516883149000},"page":"346","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":14,"title":["A Novel Single-Axis MEMS Tilt Sensor with a High Sensitivity in the Measurement Range from 0\u2218 to 360\u2218"],"prefix":"10.3390","volume":"18","author":[{"given":"Shudong","family":"Wang","sequence":"first","affiliation":[{"name":"State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an 710054, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-6443-4727","authenticated-orcid":false,"given":"Xueyong","family":"Wei","sequence":"additional","affiliation":[{"name":"State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an 710054, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yinsheng","family":"Weng","sequence":"additional","affiliation":[{"name":"State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an 710054, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yulong","family":"Zhao","sequence":"additional","affiliation":[{"name":"State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an 710054, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Zhuangde","family":"Jiang","sequence":"additional","affiliation":[{"name":"State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an 710054, China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2018,1,25]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"33","DOI":"10.1016\/j.sna.2012.07.027","article-title":"A simple, low-cost, high-sensitivity fiber-optic tilt sensor","volume":"185","author":"Bajic","year":"2012","journal-title":"Sens. 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