{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,6,24]],"date-time":"2026-06-24T15:08:04Z","timestamp":1782313684848,"version":"3.54.5"},"reference-count":20,"publisher":"MDPI AG","issue":"3","license":[{"start":{"date-parts":[[2018,3,1]],"date-time":"2018-03-01T00:00:00Z","timestamp":1519862400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>A miniaturized Co-based amorphous wire GMI (Giant magneto-impedance) magnetic sensor was designed and fabricated in this paper. The Co-based amorphous wire was used as the sense element due to its high sensitivity to the magnetic field. A three-dimensional micro coil surrounding the Co-based amorphous wire was fabricated by MEMS (Micro-Electro-Mechanical System) technology, which was used to extract the electrical signal. The three-dimensional micro pick-up coil was designed and simulated with HFSS (High Frequency Structure Simulator) software to determine the key parameters. Surface micro machining MEMS (Micro-Electro-Mechanical System) technology was employed to fabricate the three-dimensional coil. The size of the developed amorphous wire magnetic sensor is 5.6 \u00d7 1.5 \u00d7 1.1 mm3. Helmholtz coil was used to characterize the performance of the device. The test results of the sensor sample show that the voltage change is 130 mV\/Oe and the linearity error is 4.83% in the range of 0~45,000 nT. The results indicate that the developed miniaturized magnetic sensor has high sensitivity. By testing the electrical resistance of the samples, the results also showed high uniformity of each device.<\/jats:p>","DOI":"10.3390\/s18030732","type":"journal-article","created":{"date-parts":[[2018,3,1]],"date-time":"2018-03-01T12:15:44Z","timestamp":1519906544000},"page":"732","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":42,"title":["Design and Fabrication of a Miniaturized GMI Magnetic Sensor Based on Amorphous Wire by MEMS Technology"],"prefix":"10.3390","volume":"18","author":[{"given":"Jiawen","family":"Chen","sequence":"first","affiliation":[{"name":"School of Mechatronical Engineering, Beijing Institute of Technology, Beijing 100081, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Jianhua","family":"Li","sequence":"additional","affiliation":[{"name":"School of Mechatronical Engineering, Beijing Institute of Technology, Beijing 100081, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Yiyuan","family":"Li","sequence":"additional","affiliation":[{"name":"School of Mechatronical Engineering, Beijing Institute of Technology, Beijing 100081, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Yulong","family":"Chen","sequence":"additional","affiliation":[{"name":"School of Mechatronical Engineering, Beijing Institute of Technology, Beijing 100081, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-8215-6663","authenticated-orcid":false,"given":"Lixin","family":"Xu","sequence":"additional","affiliation":[{"name":"School of Mechatronical Engineering, Beijing Institute of Technology, Beijing 100081, China"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"1968","published-online":{"date-parts":[[2018,3,1]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"33","DOI":"10.1016\/S0304-8853(01)01180-5","article-title":"Giant magento impedance: Concepts and recent progress","volume":"242","author":"Knobel","year":"2002","journal-title":"J. Magn. Magn. Mater."},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"3150","DOI":"10.1109\/20.179741","article-title":"Magneto-inductive effect (MI effect) in amorphous wires","volume":"28","author":"Mohri","year":"1992","journal-title":"J. IEEE Trans. Magn."},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"125","DOI":"10.1023\/B:JMSE.0000011350.93694.91","article-title":"Giant magneto-impedance and its applications","volume":"15","author":"Tannous","year":"2004","journal-title":"J. Mater. Sci. Mater. Electron."},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"3833","DOI":"10.1109\/TMAG.2012.2198627","article-title":"Recent advances of pico-Tesla resolution magneto-impedance sensor based on amorphous wire CMOS IC MI sensor","volume":"48","author":"Uchiyama","year":"2012","journal-title":"J. IEEE Trans. Magn."},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"3134","DOI":"10.1109\/20.490305","article-title":"Sensitive and quick response micro magnetic sensor using amorphous wire MI element Colpitts oscillator","volume":"31","author":"Bushida","year":"1995","journal-title":"J. IEEE Trans. Magn."},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"20","DOI":"10.1016\/S0924-4247(97)80143-4","article-title":"Giant magneto-impedance effect in soft magnetic wires for sensor applications","volume":"59","author":"Knobel","year":"1997","journal-title":"J. Sens. Actuators A"},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"1249","DOI":"10.1109\/20.364815","article-title":"Giant magneto impedance in Co-rich amorphous wires and films","volume":"31","author":"Panina","year":"1995","journal-title":"J. IEEE Trans. Magn."},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"323","DOI":"10.1016\/j.pmatsci.2007.05.003","article-title":"Giant magento impedance materials: Fundamentals and applications","volume":"53","author":"Phan","year":"2008","journal-title":"J. Prog. Mater. Sci."},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"28","DOI":"10.1109\/5289.930983","article-title":"Giant magneto impedance sensors","volume":"4","author":"Hauser","year":"2001","journal-title":"J. IEEE Instrum. Meas. Mag."},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"1160","DOI":"10.4028\/www.scientific.net\/AMR.591-593.1160","article-title":"Magnetic detector based on GMI effect of amorphous wire","volume":"591","author":"Wei","year":"2012","journal-title":"J. Adv. Mater. Res."},{"key":"ref_11","doi-asserted-by":"crossref","unstructured":"Nie, X., and Pan, Z. (2014). Differential-type integrating GMI magnetic sensor based on orthogonal vector lock-in amplifier. J. Chin. Autom. Congr. IEEE, 344\u2013347.","DOI":"10.1109\/CAC.2013.6775756"},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"980","DOI":"10.1002\/pssa.201300717","article-title":"Highly sensitive magnetometer based on the off-diagonal GMI effect in Co-rich glass-coated microwire","volume":"211","author":"Gudoshnikov","year":"2014","journal-title":"J. Phys. Status Solidi"},{"key":"ref_13","unstructured":"Ye, J. (2011, January 6\u20137). Giant magnetoimpedance sensor with tortuous shape fabricated by MEMS technology. Proceedings of the Third International Conference on Measuring Technology & Mechatronics Automation, Shanghai, China."},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"1029","DOI":"10.1109\/JMEMS.2014.2375574","article-title":"Surface micromachined combined magnetometer\/accelerometer for above-IC integration","volume":"24","author":"Elsayed","year":"2015","journal-title":"J. Microelectromech. Syst."},{"key":"ref_15","doi-asserted-by":"crossref","unstructured":"Guo, L., Wang, C., Zhi, S., Feng, Z., Lei, C., and Zhou, Y. (2017). Wide linearity range and highly sensitive MEMS-based micro-fluxgate sensor with double-layer magnetic core made of FeCoB amorphous alloy. J. Micromach., 8.","DOI":"10.3390\/mi8120352"},{"key":"ref_16","first-page":"8426","article-title":"A torsion MEMS magnetic sensor with permanent magnet and fiber-optic detection","volume":"16","author":"Long","year":"2016","journal-title":"J. IEEE Sens. J."},{"key":"ref_17","first-page":"20","article-title":"Research and development of magnetic sensors based on GMI","volume":"30","author":"Hao","year":"2011","journal-title":"J. Theory Method"},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"6582","DOI":"10.1002\/adma.201503127","article-title":"Self-assembled on-chip-integrated giant magneto-impedance sensorics","volume":"27","author":"Karnaushenko","year":"2015","journal-title":"J. Adv. Mater."},{"key":"ref_19","first-page":"1124","article-title":"Applications and progress in the study of giant magneto impedance effect in soft magnetic amorphous wires & GMI sensors","volume":"31","author":"Jiang","year":"2008","journal-title":"J. Chin. J. Electron. Devices"},{"key":"ref_20","first-page":"93","article-title":"Novel micro-magnetism detection based on giant magneto-impedance effect of amorphous wire and resonant circuit","volume":"30","author":"Sun","year":"2009","journal-title":"J. Instrum. Tech. 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