{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,12]],"date-time":"2025-10-12T03:57:39Z","timestamp":1760241459963,"version":"build-2065373602"},"reference-count":21,"publisher":"MDPI AG","issue":"3","license":[{"start":{"date-parts":[[2018,3,1]],"date-time":"2018-03-01T00:00:00Z","timestamp":1519862400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"name":"the National Science Fund for Distinguished Young Scholars","award":["51325503"],"award-info":[{"award-number":["51325503"]}]},{"DOI":"10.13039\/501100001809","name":"the National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["51705408"],"award-info":[{"award-number":["51705408"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"name":"the Fundamental Research Funds for the Central Universities","award":["xjj2017017"],"award-info":[{"award-number":["xjj2017017"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>With the development of energetic materials (EMs) and microelectromechanical systems (MEMS) initiating explosive devices, the measurement of detonation pressure generated by EMs in the microscale has become a pressing need. This paper develops a manganin thin film ultra-high pressure sensor based on MEMS technology for measuring the output pressure from micro-detonator. A reliable coefficient is proposed for designing the sensor\u2019s sensitive element better. The sensor employs sandwich structure: the substrate uses a 0.5 mm thick alumina ceramic, the manganin sensitive element with a size of 0.2 mm \u00d7 0.1 mm \u00d7 2 \u03bcm and copper electrodes of 2 \u03bcm thick are sputtered sequentially on the substrate, and a 25 \u03bcm thick insulating layer of polyimide is wrapped on the sensitive element. The static test shows that the piezoresistive coefficient of manganin thin film is 0.0125 GPa\u22121. The dynamic experiment indicates that the detonation pressure of micro-detonator is 12.66 GPa, and the response time of the sensor is 37 ns. In a word, the sensor developed in this study is suitable for measuring ultra-high pressure in microscale and has a shorter response time than that of foil-like manganin gauges. Simultaneously, this study could be beneficial to research on ultra-high-pressure sensors with smaller size.<\/jats:p>","DOI":"10.3390\/s18030736","type":"journal-article","created":{"date-parts":[[2018,3,1]],"date-time":"2018-03-01T12:15:44Z","timestamp":1519906544000},"page":"736","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":11,"title":["A Manganin Thin Film Ultra-High Pressure Sensor for Microscale Detonation Pressure Measurement"],"prefix":"10.3390","volume":"18","author":[{"given":"Guodong","family":"Zhang","sequence":"first","affiliation":[{"name":"State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an 710049, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yulong","family":"Zhao","sequence":"additional","affiliation":[{"name":"State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an 710049, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yun","family":"Zhao","sequence":"additional","affiliation":[{"name":"State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an 710049, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Xinchen","family":"Wang","sequence":"additional","affiliation":[{"name":"State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an 710049, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-6443-4727","authenticated-orcid":false,"given":"Xueyong","family":"Wei","sequence":"additional","affiliation":[{"name":"State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an 710049, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Wei","family":"Ren","sequence":"additional","affiliation":[{"name":"National Defense Key Laboratory of Pyrotechnical S&amp;R Technology, The 213rd Research Institute of China Ordnance Industry, Xi\u2019an 710061, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Hui","family":"Li","sequence":"additional","affiliation":[{"name":"National Defense Key Laboratory of Pyrotechnical S&amp;R Technology, The 213rd Research Institute of China Ordnance Industry, Xi\u2019an 710061, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"You","family":"Zhao","sequence":"additional","affiliation":[{"name":"State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an 710049, China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2018,3,1]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"2383","DOI":"10.1007\/s12206-013-0623-8","article-title":"An ultra-high pressure sensor with cylinder structure","volume":"27","author":"Zhao","year":"2013","journal-title":"J. Mech. Sci. Technol."},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"1655","DOI":"10.1007\/s12206-010-0515-0","article-title":"An ultra-high pressure sensor based on SOI piezoresistive material","volume":"24","author":"Zhao","year":"2010","journal-title":"J. Mech. Sci. Technol."},{"key":"ref_3","doi-asserted-by":"crossref","unstructured":"Zhang, G.D., Zhao, Y.L., Zhao, Y., Wang, X.C., and Wei, X.Y. (2018). Research of a Novel Ultra-High Pressure Sensor with High-Temperature Resistance. Micromachines, 9.","DOI":"10.3390\/mi9010005"},{"key":"ref_4","unstructured":"Vandersall, K.S., Niles, A.M., Greenwood, D.W., Cunningham, B., Garcia, F., and Forbes, J.W. (2002, January 8\u201312). Carbon Resistor Pressure Gauge Calibration at Stresses Up to 1 GPa. Proceedings of the 20th Propulsion Systems Hazards Subcommittee Meeting, Destin, FL, USA."},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"2179","DOI":"10.1063\/1.324018","article-title":"Piezoresistive effects in ytterbium stress transducers","volume":"48","author":"Grady","year":"1977","journal-title":"J. Appl. Phys."},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"13","DOI":"10.1002\/(SICI)1521-4087(200001)25:1<13::AID-PREP13>3.0.CO;2-R","article-title":"Polyvinylidene Fluoride (PVDF) Gauges for Measurement of Output Pressure of Small Ordnance Devices","volume":"25","author":"Hodges","year":"2000","journal-title":"Propellants Explos. Pyrotech."},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"751","DOI":"10.1088\/0508-3443\/15\/6\/320","article-title":"Dynamic pressure measurements to 300 kilobars with a resistance transducer","volume":"15","author":"Fuller","year":"1964","journal-title":"Br. J. Appl. Phys."},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"89","DOI":"10.1016\/S0924-4247(98)00159-9","article-title":"Piezoelectric and pyroelectric transient signal analysis for detection of the temperature of a contact object for robotic tactile sensing","volume":"71","author":"Dargahi","year":"1998","journal-title":"Sens. Actuators A Phys."},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"5155","DOI":"10.1063\/1.1658638","article-title":"Piezoresistivity coefficients in manganin","volume":"41","author":"Barsis","year":"1970","journal-title":"J. Appl. Phys."},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"6256","DOI":"10.1063\/1.331951","article-title":"Stress measurements using piezoresistance gauges: Modeling the gauge as an elastic-plastic inclusion","volume":"54","author":"Gupta","year":"1983","journal-title":"J. Appl. Phys."},{"key":"ref_11","first-page":"4","article-title":"Thin film manganin gauges-a new type of very high pressure sensors","volume":"1","author":"Du","year":"2000","journal-title":"Instrum. Tech. Sens."},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"1471","DOI":"10.1063\/1.1713651","article-title":"Piezoresistivity of Manganin","volume":"35","author":"Bernstein","year":"1964","journal-title":"J. Appl. Phys."},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"4663","DOI":"10.1063\/1.1657251","article-title":"Dynamic Piezoresistive Coefficient of Manganin to 392 kbar","volume":"40","author":"Lyle","year":"1969","journal-title":"J. Appl. Phys."},{"key":"ref_14","unstructured":"Huang, Z.P. (2006, January 11). Miniaturization of the sensitive element of manganin piezoresistive sensor. Proceedings of the 7th National Symposium on Detonation, Guiyang, Guizhou, China."},{"key":"ref_15","first-page":"98","article-title":"High pressure thin-film manganin gauges of fast response","volume":"22","author":"Du","year":"2001","journal-title":"Chin. J. Sci. Instrum."},{"key":"ref_16","unstructured":"Huang, Z.P. (2006). Explosion and Shock Measuring Technique, National Defense Industry Press. [1st ed.]."},{"key":"ref_17","unstructured":"Zhang, B.P. (2001). Detonation Physics, Weapon Industry Press. [1st ed.]."},{"key":"ref_18","first-page":"68","article-title":"A plating manganin piezoresistance gauge","volume":"6","author":"Shi","year":"1992","journal-title":"Chin. J. High Press. Phys."},{"key":"ref_19","unstructured":"Wang, Y.F. (2016). Research of Equation of State of Unreacted JOB-9003 Explosive. [Master\u2019s Thesis, China Academy of Engineering Physics]."},{"key":"ref_20","doi-asserted-by":"crossref","first-page":"6094","DOI":"10.1063\/1.331945","article-title":"Analysis of manganin and ytterbium gauge data under shock loading","volume":"54","author":"Gupta","year":"1983","journal-title":"J. Appl. Phys."},{"key":"ref_21","doi-asserted-by":"crossref","first-page":"2824","DOI":"10.1063\/1.332315","article-title":"Calibration of commercial manganin stress gauges under static uniaxial strain conditions","volume":"54","author":"Rosenberg","year":"1983","journal-title":"J. Appl. Phys."}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/18\/3\/736\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T14:57:07Z","timestamp":1760194627000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/18\/3\/736"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2018,3,1]]},"references-count":21,"journal-issue":{"issue":"3","published-online":{"date-parts":[[2018,3]]}},"alternative-id":["s18030736"],"URL":"https:\/\/doi.org\/10.3390\/s18030736","relation":{},"ISSN":["1424-8220"],"issn-type":[{"type":"electronic","value":"1424-8220"}],"subject":[],"published":{"date-parts":[[2018,3,1]]}}}