{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,13]],"date-time":"2025-10-13T15:30:19Z","timestamp":1760369419908,"version":"build-2065373602"},"reference-count":50,"publisher":"MDPI AG","issue":"3","license":[{"start":{"date-parts":[[2018,3,13]],"date-time":"2018-03-13T00:00:00Z","timestamp":1520899200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>In this paper, we report on the design, simulation, and experimental analysis of a miniaturized device that can generate multiple circulated jet flows. The device is actuated by a lead zirconate titanate (PZT) diaphragm. The flows in the device were studied using three-dimensional transient numerical simulation with the programmable open source OpenFOAM and was comparable to the experimental result. Each flow is verified by two hotwires mounted at two positions inside each consisting chamber. The experiment confirmed that the flow was successfully created, and it demonstrated good agreement with the simulation. In addition, a prospective application of the device as an angular rate sensor is also demonstrated. The device is robust, is minimal in size, and can contribute to the development of multi-axis fluidic inertial sensors, fluidic amplifiers, gas mixing, coupling, and analysis.<\/jats:p>","DOI":"10.3390\/s18030849","type":"journal-article","created":{"date-parts":[[2018,3,13]],"date-time":"2018-03-13T13:37:21Z","timestamp":1520948241000},"page":"849","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":5,"title":["Transient Characteristics of a Fluidic Device for Circulatory Jet Flow"],"prefix":"10.3390","volume":"18","author":[{"given":"Hoa","family":"Phan","sequence":"first","affiliation":[{"name":"HaUI Institute of Technology, Hanoi University of Industry (HaUI), Hanoi 100000, Vietnam"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Thien","family":"Dinh","sequence":"additional","affiliation":[{"name":"Graduate School of Science and Engineering, Ritsumeikan University, Kyoto 525-8577, Japan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Phong","family":"Bui","sequence":"additional","affiliation":[{"name":"Faculty of Electronic Engineering, Hanoi University of Industry (HaUI), Hanoi 100000, Vietnam"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-8242-9884","authenticated-orcid":false,"given":"Van","family":"Dau","sequence":"additional","affiliation":[{"name":"Research Group (Environmental Health), Sumitomo Chemical. Ltd., Hyogo 665-8555, Japan"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2018,3,13]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"61","DOI":"10.2116\/analsci.22.61","article-title":"Miniature liquid flow sensor and feedback control of electroosmotic and pneumatic flows for a micro gas analysis system","volume":"22","author":"Ohira","year":"2006","journal-title":"Anal. Sci."},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"3036","DOI":"10.1016\/j.ces.2008.02.036","article-title":"Improving mixing in microbioreactors","volume":"63","author":"Li","year":"2008","journal-title":"Chem. Eng. Sci."},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"74","DOI":"10.1039\/B511524H","article-title":"Fluid mixing in planar spiral microchannels","volume":"6","author":"Sudarsan","year":"2006","journal-title":"Lab Chip"},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"3700","DOI":"10.1021\/ac050031i","article-title":"Contamination-free continuous flow microfluidic polymerase chain reaction for quantitative and clinical applications","volume":"77","author":"Dorfman","year":"2005","journal-title":"Anal. Chem."},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"944","DOI":"10.1039\/B408382M","article-title":"An integrated AC electrokinetic pump in a microfluidic loop for fast and tunable flow control","volume":"129","author":"Studer","year":"2004","journal-title":"Analyst"},{"key":"ref_6","unstructured":"Meyer, L., Dasgupta, S., Shaddock, D., Tucker, J., Fillion, R., Bronecke, P., Yorinks, L., and Kraft, P. (2003, January 11\u201313). A silicon-carbide micro-capillary pumped loop for cooling high power devices. Proceedings of the 19th Annual IEEE Semiconductor Thermal Measurement and Management Symposium, San Jose, CA, USA."},{"key":"ref_7","first-page":"453","article-title":"A Single-Axis Thermal Convective Gas Gyroscope","volume":"17","author":"Dau","year":"2005","journal-title":"Sens. Mater."},{"key":"ref_8","doi-asserted-by":"crossref","unstructured":"Dau, V.T., Otake, T., Dinh, T.X., Dao, D.V., and Sugiyama, S. (2008, January 26\u201329). A multi axis fluidic inertial sensor. Proceedings of the IEEE Sensors, Lecce, Italy.","DOI":"10.1109\/ICSENS.2008.4716529"},{"key":"ref_9","unstructured":"Dao, D.V., Okada, S., Dau, V., Toriyama, T., and Sugiyama, S. (November, January 31). Development of a 3-DOF silicon piezoresistive micro accelerometer. Proceedings of the Micro-Nanomechatronics and Human Science, 2004 and The Fourth Symposium Micro-Nanomechatronics for Information-Based Society, Nagoya, Japan."},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"125016","DOI":"10.1088\/0960-1317\/19\/12\/125016","article-title":"A MEMS-based silicon micropump with intersecting channels and integrated hotwires","volume":"19","author":"Dau","year":"2009","journal-title":"J. Micromech. Microeng."},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"347","DOI":"10.1541\/ieejsmas.127.347","article-title":"Optimization of PZT Diaphragm Pump for the Convective Gyroscope","volume":"127","author":"Dau","year":"2007","journal-title":"IEEJ Trans. Sens. Micromach."},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"84","DOI":"10.1016\/j.sna.2011.01.009","article-title":"Dominant factors inducing electro-conjugate fluid flow","volume":"167","author":"Mori","year":"2011","journal-title":"Sens. Actuators A Phys."},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"173","DOI":"10.1016\/j.sna.2008.12.004","article-title":"A liquid rate gyroscope using electro-conjugate fluid","volume":"149","author":"Takemura","year":"2009","journal-title":"Sens. Actuators A Phys."},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"204","DOI":"10.1299\/kikaic.77.204","article-title":"A Dual-Axis Liquid Micro Rate Gyroscope Using an Electro-Conjugate Fluid","volume":"77","author":"Ogawa","year":"2011","journal-title":"Trans. Jpn. Soc. Mech. Eng. Part C"},{"key":"ref_15","unstructured":"Mikheyev, M. (1968). Fundamentals of Heat Transfer, Peace Publisher."},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"2308","DOI":"10.1088\/0964-1726\/16\/6\/034","article-title":"A 2-DOF convective micro accelerometer with a low thermal stress sensing element","volume":"16","author":"Dau","year":"2007","journal-title":"Smart Mater. Struct."},{"key":"ref_17","unstructured":"Dao, R., Morgan, D.E., Kries, H.H., and Bachelder, D.M. (1996). Convective Accelerometer and Inclinometer. (5581034A), U.S. Patent."},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"8304","DOI":"10.3390\/s100908304","article-title":"Modeling and experimental study on characterization of micromachined thermal gas inertial sensors","volume":"10","author":"Zhu","year":"2010","journal-title":"Sensors"},{"key":"ref_19","doi-asserted-by":"crossref","first-page":"190","DOI":"10.1541\/ieejsmas.126.190","article-title":"A Dual Axis Accelerometer Utilizing Low Doped Silicon Thermistor","volume":"126","author":"Dau","year":"2006","journal-title":"IEEJ Trans. Sens. Micromach."},{"key":"ref_20","doi-asserted-by":"crossref","unstructured":"Dau, V.T., Otake, T., Dinh, T.X., and Sugiyama, S. (2009, January 21\u201325). Design and fabrication of convective inertial sensor consisting of 3DOF gyroscope and 2DOF accelerometer. Proceedings of the TRANSDUCERS-2009 International Solid-State Sensors, Actuators and Microsystems Conference, Denver, CO, USA.","DOI":"10.1109\/SENSOR.2009.5285911"},{"key":"ref_21","doi-asserted-by":"crossref","first-page":"100","DOI":"10.1109\/JMEMS.2013.2262584","article-title":"Robust MEMS Gyroscope Based on Thermal Principles","volume":"23","author":"Bahari","year":"2014","journal-title":"J. Microelectromech. Syst."},{"key":"ref_22","doi-asserted-by":"crossref","first-page":"413","DOI":"10.1016\/j.sna.2013.09.017","article-title":"MEMS thermal gyroscope with self-compensation of the linear acceleration effect","volume":"203","author":"Feng","year":"2013","journal-title":"Sens. Actuators A Phys."},{"key":"ref_23","doi-asserted-by":"crossref","unstructured":"Cai, S.L., Zhu, R., Ding, H.G., Yang, Y.J., and Su, Y. (2013, January 16\u201320). A micromachined integrated gyroscope and accelerometer based on gas thermal expansion. Proceedings of the 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, Barcelona, Spain.","DOI":"10.1109\/Transducers.2013.6626698"},{"key":"ref_24","doi-asserted-by":"crossref","first-page":"173","DOI":"10.1016\/j.sna.2014.01.041","article-title":"A micromachined gas inertial sensor based on thermal expansion","volume":"212","author":"Zhu","year":"2014","journal-title":"Sens. Actuators A Phys."},{"key":"ref_25","doi-asserted-by":"crossref","first-page":"452","DOI":"10.1063\/1.1715904","article-title":"Acoustic Air Pump","volume":"28","author":"Dauphinee","year":"1957","journal-title":"Rev. Sci. Instrum."},{"key":"ref_26","first-page":"245","article-title":"Experimental study of intense acoustic streaming","volume":"21","author":"Mednikov","year":"1975","journal-title":"Akust. Zhurnal"},{"key":"ref_27","doi-asserted-by":"crossref","first-page":"50","DOI":"10.1016\/j.sna.2005.03.071","article-title":"Enhancement of synthetic jets by means of an integrated valve-less pump: Part II. Numerical and experimental studies","volume":"125","author":"Wang","year":"2005","journal-title":"Sens. Actuators A Phys."},{"key":"ref_28","doi-asserted-by":"crossref","first-page":"232","DOI":"10.1016\/j.sna.2004.11.017","article-title":"Enhancement of synthetic jets by means of an integrated valve-less pump","volume":"120","author":"Fedorchenko","year":"2005","journal-title":"Sens. Actuators A Phys."},{"key":"ref_29","doi-asserted-by":"crossref","first-page":"2056","DOI":"10.1016\/j.ijheatmasstransfer.2010.12.023","article-title":"Multiple orifice synthetic jet for improvement in impingement heat transfer","volume":"54","author":"Chaudhari","year":"2011","journal-title":"Int. J. Heat Mass Transf."},{"key":"ref_30","doi-asserted-by":"crossref","first-page":"575","DOI":"10.1039\/b514068d","article-title":"Capillary inserts in microcirculatory systems","volume":"6","author":"Atencia","year":"2006","journal-title":"Lab Chip"},{"key":"ref_31","doi-asserted-by":"crossref","unstructured":"Chang, H., Zhou, P., Gong, X., Xie, J., and Yuan, W. (2013, January 3\u20136). Development of a tri-axis vortex convective gyroscope with suspended silicon thermistors. Proceedings of the 2013 IEEE SENSORS, Baltimore, MD, USA.","DOI":"10.1109\/ICSENS.2013.6688239"},{"key":"ref_32","doi-asserted-by":"crossref","first-page":"1100","DOI":"10.1109\/JMEMS.2013.2271862","article-title":"Theoretical modeling for a six-DOF vortex inertial sensor and experimental verification","volume":"22","author":"Chang","year":"2013","journal-title":"J. Microelectromech. Syst."},{"key":"ref_33","doi-asserted-by":"crossref","first-page":"1301","DOI":"10.1088\/0960-1317\/16\/7\/026","article-title":"Development of a dual-axis thermal convective gas gyroscope","volume":"16","author":"Dau","year":"2006","journal-title":"J. Micromech. Microeng."},{"key":"ref_34","doi-asserted-by":"crossref","first-page":"219","DOI":"10.1541\/ieejsmas.128.219","article-title":"Design and Simulation of a Novel 3-DOF MEMS Convective Gyroscope","volume":"128","author":"Dau","year":"2008","journal-title":"IEEJ Trans. Sens. Micromach."},{"key":"ref_35","doi-asserted-by":"crossref","first-page":"41401","DOI":"10.1115\/1.3089538","article-title":"A Principle to Generate Flow for Thermal Convective Base Sensors","volume":"131","author":"Dinh","year":"2009","journal-title":"J. Fluids Eng."},{"key":"ref_36","doi-asserted-by":"crossref","first-page":"4103","DOI":"10.1109\/JSEN.2015.2411631","article-title":"Design Study of Multidirectional Jet Flow for a Triple-Axis Fluidic Gyroscope","volume":"15","author":"Hoa","year":"2015","journal-title":"IEEE Sens. J."},{"key":"ref_37","doi-asserted-by":"crossref","first-page":"820","DOI":"10.1016\/j.snb.2015.09.151","article-title":"Jet flow generation in a circulatory miniaturized system","volume":"223","author":"Dau","year":"2015","journal-title":"Sens. Actuators B Chem."},{"key":"ref_38","doi-asserted-by":"crossref","first-page":"1530","DOI":"10.1109\/JSEN.2008.925457","article-title":"Simulation and Fabrication of a Convective Gyroscope","volume":"8","author":"Dau","year":"2008","journal-title":"IEEE Sens. J."},{"key":"ref_39","doi-asserted-by":"crossref","unstructured":"Ai, Y., Luo, X., and Liu, S. (2007, January 14\u201317). Design and modeling of micromachined thermal convective gyroscope with bidirectional jets. Proceedings of the Electronic Packaging Technology Conference (EPTC), Shanghai, China.","DOI":"10.1109\/ICEPT.2007.4441494"},{"key":"ref_40","doi-asserted-by":"crossref","unstructured":"Kock, G., Combette, P., Chariot, B., Giani, A., Schneider, M., and Gauthier-Blum, C. (June, January 29). Study and realization of a fluidic thermal gyrometer. Proceedings of the 2017 Symposium on Design, Test, Integration and Packaging of MEMS\/MOEMS (DTIP), Bordeaux, France.","DOI":"10.1109\/DTIP.2017.7984469"},{"key":"ref_41","doi-asserted-by":"crossref","first-page":"1077","DOI":"10.1016\/j.snb.2015.07.041","article-title":"Numerical study and experimental validation of a valveless piezoelectric air blower for fluidic applications","volume":"221","author":"Dau","year":"2015","journal-title":"Sens. Actuators B Chem."},{"key":"ref_42","doi-asserted-by":"crossref","unstructured":"Pope, S.B. (2000). Turbulent Flows, Cambridge University Press.","DOI":"10.1017\/CBO9780511840531"},{"key":"ref_43","unstructured":"Manufacturing, L.M. (2016). Piezoelectric Diaphragms, Murata Manufacturing Co., Ltd.. Available online: http:\/\/www.murata.com\/en-sg\/products\/sound\/diaphragm."},{"key":"ref_44","doi-asserted-by":"crossref","first-page":"808","DOI":"10.1299\/jsme1958.10.808","article-title":"Experimental Study on Effect of Vibration on Natural Convective Heat Transfer from a Horizontal Fine Wire","volume":"10","author":"Mabuchi","year":"1967","journal-title":"Bull. JSME"},{"key":"ref_45","doi-asserted-by":"crossref","first-page":"52","DOI":"10.1016\/j.expthermflusci.2016.06.023","article-title":"Corona based air-flow using parallel discharge electrodes","volume":"79","author":"Dau","year":"2016","journal-title":"Exp. Therm. Fluid Sci."},{"key":"ref_46","doi-asserted-by":"crossref","first-page":"106090","DOI":"10.1039\/C6RA22872K","article-title":"Piezo-resistive and thermo-resistance effects of highly-aligned CNT based macrostructures","volume":"6","author":"Dau","year":"2016","journal-title":"RSC Adv."},{"key":"ref_47","doi-asserted-by":"crossref","first-page":"126","DOI":"10.1016\/j.mechatronics.2017.09.007","article-title":"Jet flow in a circulatory miniaturized system using ion wind","volume":"47","author":"Dinh","year":"2017","journal-title":"Mechatronics"},{"key":"ref_48","doi-asserted-by":"crossref","first-page":"146","DOI":"10.1016\/j.sna.2016.03.028","article-title":"Bipolar corona discharge based air flow generation with low net charge","volume":"244","author":"Dau","year":"2016","journal-title":"Sens. Actuators A Phys."},{"key":"ref_49","unstructured":"Li, J. (2007, January 3\u20137). Hot-Wire Attenuation and Its Correction in Turbulence Measurements. Proceedings of the 16th Australasian Fluid Mechanics Conference, Gold Coast, Australia."},{"key":"ref_50","doi-asserted-by":"crossref","first-page":"1835","DOI":"10.1088\/0957-0233\/15\/9\/022","article-title":"Dynamic response of constant temperature hot-wire system in turbulence velocity measurements","volume":"15","author":"Li","year":"2004","journal-title":"Meas. Sci. Technol."}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/18\/3\/849\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T14:56:52Z","timestamp":1760194612000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/18\/3\/849"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2018,3,13]]},"references-count":50,"journal-issue":{"issue":"3","published-online":{"date-parts":[[2018,3]]}},"alternative-id":["s18030849"],"URL":"https:\/\/doi.org\/10.3390\/s18030849","relation":{},"ISSN":["1424-8220"],"issn-type":[{"type":"electronic","value":"1424-8220"}],"subject":[],"published":{"date-parts":[[2018,3,13]]}}}