{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,3,17]],"date-time":"2026-03-17T20:21:34Z","timestamp":1773778894342,"version":"3.50.1"},"reference-count":24,"publisher":"MDPI AG","issue":"4","license":[{"start":{"date-parts":[[2018,3,26]],"date-time":"2018-03-26T00:00:00Z","timestamp":1522022400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>Scanning micromirrors have been used in a wide range of areas, but many of them do not have position sensing built in, which significantly limits their application space. This paper reports an integrated optoelectronic position sensor (iOE-PS) that can measure the linear displacement and tilting angle of electrothermal MEMS (Micro-electromechanical Systems) scanning mirrors. The iOE-PS integrates a laser diode and its driving circuits, a quadrant photo-detector (QPD) and its readout circuits, and a band-gap reference all on a single chip, and it has been fabricated in a standard 0.5 \u03bcm CMOS (Complementary Metal Oxide Semiconductor) process. The footprint of the iOE-PS chip is 5 mm \u00d7 5 mm. Each quadrant of the QPD has a photosensitive area of 500 \u00b5m \u00d7 500 \u00b5m and the spacing between adjacent quadrants is 500 \u03bcm. The iOE-PS chip is simply packaged underneath of an electrothermally-actuated MEMS mirror. Experimental results show that the iOE-PS has a linear response when the MEMS mirror plate moves vertically between 2.0 mm and 3.0 mm over the iOE-PS chip or scans from \u22125 to +5\u00b0. Such MEMS scanning mirrors integrated with the iOE-PS can greatly reduce the complexity and cost of the MEMS mirrors-enabled modules and systems.<\/jats:p>","DOI":"10.3390\/s18040982","type":"journal-article","created":{"date-parts":[[2018,3,26]],"date-time":"2018-03-26T12:08:25Z","timestamp":1522066105000},"page":"982","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":17,"title":["Integrated Optoelectronic Position Sensor for Scanning Micromirrors"],"prefix":"10.3390","volume":"18","author":[{"given":"Xiang","family":"Cheng","sequence":"first","affiliation":[{"name":"School of Aerospace Engineering, Xiamen University, Xiamen 361005, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Xinglin","family":"Sun","sequence":"additional","affiliation":[{"name":"School of Aerospace Engineering, Xiamen University, Xiamen 361005, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yan","family":"Liu","sequence":"additional","affiliation":[{"name":"School of Aerospace Engineering, Xiamen University, Xiamen 361005, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Lijun","family":"Zhu","sequence":"additional","affiliation":[{"name":"School of Aerospace Engineering, Xiamen University, Xiamen 361005, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Xiaoyang","family":"Zhang","sequence":"additional","affiliation":[{"name":"Department of Electrical and Computer Engineering, University of Florida, Gainesville, FL 32611, USA"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Liang","family":"Zhou","sequence":"additional","affiliation":[{"name":"Department of Electrical and Computer Engineering, University of Florida, Gainesville, FL 32611, USA"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-8393-0021","authenticated-orcid":false,"given":"Huikai","family":"Xie","sequence":"additional","affiliation":[{"name":"Department of Electrical and Computer Engineering, University of Florida, Gainesville, FL 32611, USA"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2018,3,26]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","unstructured":"Ullal, K.V., and Sharan, P. (2015, January 12\u201313). Micro displacement sensor design based on photonic crystal emulating MOEMS for detection of acoustic signals. Proceedings of the 2015 IEEE International Conference on Advance Computing Conference (IACC), Banglore, India.","DOI":"10.1109\/IADCC.2015.7154899"},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"465","DOI":"10.1007\/s00542-017-3370-4","article-title":"Design optimization for an SOI MOEMS accelerometer","volume":"24","author":"Teo","year":"2018","journal-title":"Microsyst. Technol."},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"3479","DOI":"10.1364\/OE.24.003479","article-title":"Wide-angle structured light with a scanning micro mirror in liquid","volume":"24","author":"Zhang","year":"2016","journal-title":"Opt. Express"},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"1781","DOI":"10.1080\/09500340.2014.983569","article-title":"Three-beam Doppler optical coherence tomography using a facet prism telescope and micro mirror for improved transversal resolution","volume":"62","author":"Haindl","year":"2015","journal-title":"J. Mod. Opt."},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"1418","DOI":"10.1109\/LPT.2015.2423637","article-title":"Miniaturizing Fourier Transform Spectrometer with an Electrothermal micro mirror","volume":"27","author":"Wang","year":"2015","journal-title":"IEEE Photonics Technol. Lett."},{"key":"ref_6","first-page":"29","article-title":"A large-scanning-angle electrothermal SCS micromirror for biomedical imaging","volume":"16","author":"Jain","year":"2003","journal-title":"Indiana Mag. Hist."},{"key":"ref_7","doi-asserted-by":"crossref","unstructured":"Sampaioa, P.S., Soaresa, A., Castanhoa, A., Almeidaa, A.S., Oliveirac, J., and Brites, C. (2018). Optimization of rice amylose determination by NIR-spectroscopy using PLS chemometrics algorithms. Food Chem., 196\u2013204.","DOI":"10.1016\/j.foodchem.2017.09.058"},{"key":"ref_8","first-page":"1023","article-title":"Laser imaging based on digital micromirror device and its performance analysis","volume":"45","author":"Deng","year":"2015","journal-title":"Laser Infrared"},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"400","DOI":"10.3788\/OPE.20132102.0400","article-title":"Large-scale MOEMS scanning mirror actuated by vertical comb","volume":"21","author":"Liu","year":"2013","journal-title":"Opt. Precis. Eng."},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"88","DOI":"10.1016\/j.cja.2016.07.002","article-title":"Hysteresis and the nonlinear Equivalent piezoelectric coefficient of MFCs for actuation","volume":"30","author":"Zheng","year":"2017","journal-title":"Chin. J. Aeronaut."},{"key":"ref_11","first-page":"1","article-title":"Fourier transform infrared spectrometer based on electro-thermal MEMS micro-mirror","volume":"45","author":"Lu","year":"2016","journal-title":"Infrared Laser Eng."},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"4735","DOI":"10.1109\/JSEN.2017.2718045","article-title":"Hybrid Foam Pressure Sensor Utilizing Piezoresistive and Capacitive Sensing Mechanisms","volume":"17","author":"Tolvanen","year":"2017","journal-title":"IEEE Sens. J."},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"214102","DOI":"10.1063\/1.4936375","article-title":"Simultaneous piston position and tilt angle sensing for large vertical displacement micromirrors by frequency detection inductive sensing","volume":"107","author":"Tseng","year":"2015","journal-title":"Appl. Phys. Lett."},{"key":"ref_14","doi-asserted-by":"crossref","unstructured":"Davis, J.W.O., Sprague, R., and Miller, J. (2008, January 11\u201314). MEMS based pico projector display. Proceedings of the IEEE\/LEOS International Conference on Optical MEMS and Nanophotonics, Freiburg, Germany.","DOI":"10.1109\/OMEMS.2008.4607813"},{"key":"ref_15","doi-asserted-by":"crossref","unstructured":"Schenk, H., Durr, P., Kunze, D., Lakner, H., and Kuck, H. (2000, January 27). An electrostatically excited 2D-micro-scanningmirror with an in-plane configuration of the driving electrodes. Proceedings of the IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems, Miyazaki, Japan.","DOI":"10.1109\/MEMSYS.2000.838563"},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"269","DOI":"10.1016\/j.sna.2007.03.027","article-title":"Integrated micro-displacement sensor that measures tilting angle and linear movement of an external mirror","volume":"138","author":"Ishikawa","year":"2007","journal-title":"Sens. Actuators"},{"key":"ref_17","doi-asserted-by":"crossref","unstructured":"Wu, L., and Xie, H. (2009, January 17\u201320). A tunable microlens with 0.9 mm scan range and small lateral shift. Proceedings of the IEEE\/LEOS International Conference on Optical MEMS and Nanophotonics, Clearwater, FL, USA.","DOI":"10.1109\/OMEMS.2009.5338591"},{"key":"ref_18","first-page":"985","article-title":"Laser spot center location algorithm based on Gaussian fitting","volume":"33","author":"Wang","year":"2012","journal-title":"J. Appl. Opt."},{"key":"ref_19","doi-asserted-by":"crossref","first-page":"206003","DOI":"10.3788\/IRLA20174602.206003","article-title":"Laser spot center location algorithm of four-quadrant detector based on Gaussian distribution","volume":"46","author":"Tang","year":"2017","journal-title":"Infrared Laser Eng."},{"key":"ref_20","first-page":"76","article-title":"Realization of a High Sensitivity Fully Integrated Receiver with Optimized Large-area Photodetector","volume":"44","author":"Fan","year":"2015","journal-title":"Acta Photonics Sin."},{"key":"ref_21","first-page":"1460","article-title":"Research on high-speed optical receiver with integrated large photosensitive surface photodetector based on standard CMOS process","volume":"26","author":"Shi","year":"2015","journal-title":"J. Optoelectron. Laser"},{"key":"ref_22","unstructured":"(2017, December 14). CSMC. Available online: http:\/\/www.csmc.com.cn\/ch\/csmc-38.aspx."},{"key":"ref_23","unstructured":"(2017, September 03). Cadence. Available online: https:\/\/www.cadence.com\/content\/cadence-www\/global\/en_US\/home\/tools.html."},{"key":"ref_24","unstructured":"(2017, October 15). TracePro. Available online: https:\/\/www.lambdares.com\/tracepro\/."}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/18\/4\/982\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T14:58:33Z","timestamp":1760194713000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/18\/4\/982"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2018,3,26]]},"references-count":24,"journal-issue":{"issue":"4","published-online":{"date-parts":[[2018,4]]}},"alternative-id":["s18040982"],"URL":"https:\/\/doi.org\/10.3390\/s18040982","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2018,3,26]]}}}