{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,1,14]],"date-time":"2026-01-14T18:57:07Z","timestamp":1768417027730,"version":"3.49.0"},"reference-count":32,"publisher":"MDPI AG","issue":"6","license":[{"start":{"date-parts":[[2018,5,24]],"date-time":"2018-05-24T00:00:00Z","timestamp":1527120000000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>A Finite Element Method (FEM) simulation study is conducted, aiming to scrutinize the sensitivity of Sezawa wave mode in a multilayer AlN\/SiO2\/Si Surface Acoustic Wave (SAW) sensor to low concentrations of Volatile Organic Compounds (VOCs), that is, trichloromethane, trichloroethylene, carbon tetrachloride and tetrachloroethene. A Complimentary Metal-Oxide Semiconductor (CMOS) compatible AlN\/SiO2\/Si based multilayer SAW resonator structure is taken into account for this purpose. In this study, first, the influence of AlN and SiO2 layers\u2019 thicknesses over phase velocities and electromechanical coupling coefficients (k2) of two SAW modes (i.e., Rayleigh and Sezawa) is analyzed and the optimal thicknesses of AlN and SiO2 layers are opted for best propagation characteristics. Next, the study is further extended to analyze the mass loading effect on resonance frequencies of SAW modes by coating a thin Polyisobutylene (PIB) polymer film over the AlN surface. Finally, the sensitivity of the two SAW modes is examined for VOCs. This study concluded that the sensitivity of Sezawa wave mode for 1 ppm of selected volatile organic gases is twice that of the Rayleigh wave mode.<\/jats:p>","DOI":"10.3390\/s18061687","type":"journal-article","created":{"date-parts":[[2018,5,24]],"date-time":"2018-05-24T02:55:43Z","timestamp":1527130543000},"page":"1687","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":36,"title":["FEM Analysis of Sezawa Mode SAW Sensor for VOC Based on CMOS Compatible AlN\/SiO2\/Si Multilayer Structure"],"prefix":"10.3390","volume":"18","author":[{"given":"Muhammad Zubair","family":"Aslam","sequence":"first","affiliation":[{"name":"Department of Electrical and Electronics Engineering, Universiti Teknologi PETRONAS, 32610 Seri Iskandar, Perak, Malaysia"}]},{"given":"Varun","family":"Jeoti","sequence":"additional","affiliation":[{"name":"Department of Electrical and Electronics Engineering, Universiti Teknologi PETRONAS, 32610 Seri Iskandar, Perak, Malaysia"}]},{"given":"Saravanan","family":"Karuppanan","sequence":"additional","affiliation":[{"name":"Department of Mechanical Engineering, Universiti Teknologi PETRONAS, 32610 Seri Iskandar, Perak, Malaysia"}]},{"given":"Aamir Farooq","family":"Malik","sequence":"additional","affiliation":[{"name":"Department of Electrical and Electronics Engineering, Universiti Teknologi PETRONAS, 32610 Seri Iskandar, Perak, Malaysia"}]},{"given":"Asif","family":"Iqbal","sequence":"additional","affiliation":[{"name":"Department of Electrical and Electronics Engineering, Universiti Teknologi PETRONAS, 32610 Seri Iskandar, Perak, Malaysia"}]}],"member":"1968","published-online":{"date-parts":[[2018,5,24]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","unstructured":"Sch\u00fctze, A., Baur, T., Leidinger, M., Reimringer, W., Jung, R., Conrad, T., and Sauerwald, T. (2017). Highly Sensitive and Selective VOC Sensor Systems Based on Semiconductor Gas Sensors: How to?. Environments, 4.","DOI":"10.3390\/environments4010020"},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"1535","DOI":"10.1088\/0957-0233\/16\/8\/001","article-title":"A study of an electronic nose for detection of lung cancer based on a virtual SAW gas sensors array and imaging recognition method","volume":"16","author":"Chen","year":"2005","journal-title":"Meas. Sci. Technol."},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"118","DOI":"10.1016\/j.cattod.2007.03.030","article-title":"Catalytic oxidation of volatile organic compounds (VOCs) mixture (isopropanol\/O-xylene) on zeolite catalysts","volume":"124","author":"Beauchet","year":"2007","journal-title":"Catal. Today"},{"key":"ref_4","unstructured":"Joo, B.-S., Lee, J.-H., Lee, E.-W., Song, K.-D., and Lee, D.-S. (2005, January 21\u201323). Polymer Film SAW Sensors for Chemical Agent Detection. Proceedings of the Conference on Sensing Technology, Palmerston North, New Zealand."},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"6910","DOI":"10.3390\/s130606910","article-title":"Surface Acoustic Wave Devices for Harsh Environment Wireless Sensing","volume":"13","author":"Greve","year":"2013","journal-title":"Sensors"},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"3065","DOI":"10.3390\/s140203065","article-title":"A Wireless and Passive Low-Pressure Sensor","volume":"14","author":"Nicolay","year":"2014","journal-title":"Sensors"},{"key":"ref_7","doi-asserted-by":"crossref","unstructured":"Mohanan, A., Islam, M., Ali, S., Parthiban, R., and Ramakrishnan, N. (2013). Investigation into Mass Loading Sensitivity of Sezawa Wave Mode-Based Surface Acoustic Wave Sensors. Sensors, 13.","DOI":"10.3390\/s130202164"},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"094105","DOI":"10.1063\/1.2970960","article-title":"ZnO film thickness effect on surface acoustic wave modes and acoustic streaming","volume":"93","author":"Du","year":"2008","journal-title":"Appl. Phys. Lett."},{"key":"ref_9","unstructured":"Dissanayake, D.W. (2010). Aluminium Nitride Thin Film Acoustic Wave Device for Microfluidic and Biosensing Applications, Sciyo."},{"key":"ref_10","first-page":"502","article-title":"Design and Analysis of a Rayleigh SAW Resonator for Gas Detecting Applications","volume":"60","author":"Ionescu","year":"2014","journal-title":"Rom. J. Phys."},{"key":"ref_11","doi-asserted-by":"crossref","unstructured":"Wang, W., Hu, H., Liu, X., He, S., Pan, Y., Zhang, C., and Dong, C. (2016). Development of a Room Temperature SAW Methane Gas Sensor Incorporating a Supramolecular Cryptophane A Coating. Sensors, 16.","DOI":"10.3390\/s16010073"},{"key":"ref_12","first-page":"254","article-title":"Design and Analysis of SAW Based MEMS Gas Sensor for the Detection of Volatile Organic Gases","volume":"4","author":"Johnson","year":"2014","journal-title":"Int. J. Eng. Res. Appl."},{"key":"ref_13","first-page":"133","article-title":"Surface acoustic wave hydrogen gas sensor based on layered structure of palladium\/metal-free phthalocyanine","volume":"56","author":"Jakubik","year":"2008","journal-title":"Bull. Pol. Acad. Sci. Tech. Sci."},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"021001","DOI":"10.1088\/1674-4926\/37\/2\/021001","article-title":"Surface acoustic wave devices for sensor applications","volume":"37","author":"Liu","year":"2016","journal-title":"J. Semicond."},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"2538","DOI":"10.1063\/1.1509471","article-title":"Superhigh-frequency surface-acoustic-wave transducers using AlN layers grown on SiC substrates","volume":"81","author":"Takagaki","year":"2002","journal-title":"Appl. Phys. Lett."},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"251","DOI":"10.1109\/TUFFC.2006.1588412","article-title":"Surface acoustic wave velocity in single-crystal AlN substrates","volume":"53","author":"Bu","year":"2006","journal-title":"IEEE Trans. Ultrason. Ferroelectr. Freq. Control"},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"291","DOI":"10.1016\/j.ultras.2013.04.009","article-title":"FEM simulation of Rayleigh waves for CMOS compatible SAW devices based on AlN\/SiO2\/Si(100)","volume":"54","author":"Kaletta","year":"2014","journal-title":"Ultrasonics"},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1088\/0268-1242\/28\/6\/065013","article-title":"Monolithic integrated SAW filter based on AlN for high-frequency applications","volume":"28","author":"Kaletta","year":"2013","journal-title":"Semiconduct. Sci. Technol."},{"key":"ref_19","doi-asserted-by":"crossref","first-page":"1806","DOI":"10.1109\/TUFFC.2005.1561635","article-title":"Growth of AlN Piezoelectric Film on Diamond for High-Frequency Surface Acoustic Wave Devices","volume":"52","author":"Benetti","year":"2005","journal-title":"IEEE Trans. Ultrason. Ferroelectr. Freq. Control"},{"key":"ref_20","doi-asserted-by":"crossref","first-page":"446","DOI":"10.3938\/jkps.57.446","article-title":"Finite element modeling of surface acoustic waves in piezoelectric thin films","volume":"57","author":"Chung","year":"2010","journal-title":"J. Korean Phys. Soc."},{"key":"ref_21","unstructured":"Weber, A.H., Weiss, G., and Hunklinger, S. (1991, January 8\u201311). Comparison of Rayleigh and Sezawa Wave Modes in ZnO-SiO2-Si Structures. Proceedings of the Ultrasonics Symposium, Orlando, FL, USA."},{"key":"ref_22","doi-asserted-by":"crossref","first-page":"1421","DOI":"10.1109\/TUFFC.2004.1367481","article-title":"Sezawa mode SAW pressure sensors based on ZnO\/Si structure","volume":"51","author":"Talbi","year":"2004","journal-title":"IEEE Trans. Ultrason. Ferroelectr. Freq. Control"},{"key":"ref_23","doi-asserted-by":"crossref","first-page":"1299","DOI":"10.1109\/LED.2015.2494363","article-title":"Sezawa Propagation Mode in GaN on Si Surface Acoustic Wave Type Temperature Sensor Structures Operating at GHz Frequencies","volume":"36","author":"Giangu","year":"2015","journal-title":"IEEE Electron Device Lett."},{"key":"ref_24","doi-asserted-by":"crossref","unstructured":"Shu, L., Peng, B., Li, C., Gong, D., Yang, Z., Liu, X., and Zhang, W. (2016). The Characterization of Surface Acoustic Wave Devices Based on AlN-Metal Structures. Sensors, 16.","DOI":"10.3390\/s16040526"},{"key":"ref_25","doi-asserted-by":"crossref","first-page":"363","DOI":"10.1016\/j.ultras.2012.07.002","article-title":"Investigation of surface acoustic waves propagating in ZnO-SiO2-Si multilayer structure","volume":"53","author":"Zhang","year":"2013","journal-title":"Ultrasonics"},{"key":"ref_26","doi-asserted-by":"crossref","first-page":"6844","DOI":"10.3390\/s140406844","article-title":"Response Mechanism for Surface Acoustic Wave Gas Sensors Based on Surface-Adsorption","volume":"14","author":"Liu","year":"2014","journal-title":"Sensors"},{"key":"ref_27","doi-asserted-by":"crossref","unstructured":"Devkota, J., Ohodnicki, P., and Greve, D. (2017). SAW Sensors for Chemical Vapors and Gases. Sensors, 17.","DOI":"10.3390\/s17040801"},{"key":"ref_28","doi-asserted-by":"crossref","unstructured":"Malik, A.F., Jeoti, V., Fawzy, M., Iqbal, A., Aslam, Z., Pandian, M.S., and Marigo, E. (2016, January 15\u201317). Estimation of SAW velocity and coupling coefficient in multilayered piezo-substrates AlN\/SiO2\/Si. Proceedings of the 2016 6th International Conference on Intelligent and Advanced Systems (ICIAS), Kuala Lumpur, Malaysia.","DOI":"10.1109\/ICIAS.2016.7824112"},{"key":"ref_29","doi-asserted-by":"crossref","unstructured":"Benedek, I. (2008). Manufacture of Pressure-Sensitive Products. Technology of Pressure-Sensitive Adhesives and Products, CRC Press.","DOI":"10.1201\/9781420059410"},{"key":"ref_30","unstructured":"(2017, September 18). Toxic Gas Exposure Standards. Available online: http:\/\/inspectapedia.com\/sickhouse\/Gas_Exposure_Limits.php."},{"key":"ref_31","doi-asserted-by":"crossref","first-page":"74","DOI":"10.1016\/j.sna.2007.02.003","article-title":"Oscillator and frequency-shift measurement circuit topologies for micromachined resonant devices","volume":"137","author":"Bahreyni","year":"2007","journal-title":"Sens. Actuators A"},{"key":"ref_32","doi-asserted-by":"crossref","first-page":"356","DOI":"10.1016\/j.snb.2006.04.050","article-title":"Optimization of SAW sensors with a structure ZnO-SiO2-Si to detect volatile organic compounds","volume":"118","author":"Horrillo","year":"2006","journal-title":"Sens. Actuators B"}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/18\/6\/1687\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T15:05:42Z","timestamp":1760195142000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/18\/6\/1687"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2018,5,24]]},"references-count":32,"journal-issue":{"issue":"6","published-online":{"date-parts":[[2018,6]]}},"alternative-id":["s18061687"],"URL":"https:\/\/doi.org\/10.3390\/s18061687","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2018,5,24]]}}}