{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,7,25]],"date-time":"2026-07-25T02:17:33Z","timestamp":1784945853436,"version":"3.55.0"},"reference-count":27,"publisher":"MDPI AG","issue":"6","license":[{"start":{"date-parts":[[2018,5,28]],"date-time":"2018-05-28T00:00:00Z","timestamp":1527465600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["51477089"],"award-info":[{"award-number":["51477089"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>Thus far, despite the development of electric field sensors (EFSs) such as field mills, optoelectronic EFSs and microelectromechanical system (MEMS)-based EFSs, no sensor can accurately measure an electric field in space due to the existence of space charge and the influence of charge attachment. To measure a spatial synthetic electric field in an ion flow field, a double potential independent differential EFS based on MEMS is proposed. Compared with other EFSs, this method has the advantages of independent potential (without grounding) and the ability to support the measurement of the synthetic ion flow electric field in space. First, to analyse the charge distribution after the sensor is involved exposed to an electric field, a simulation model was constructed. Then, given the redistribution of the spatial electric field in space and the influence of the surface charge on the sensor, the quantitative relationship between the electric field to be measured and that measured by the proposed sensor was obtained. To improve the performance of the EFS, a set of synthetic field strength sensor calibration systems that consider spatial ion flow injection was established. Furthermore, the parameter \u03bb, which is related to the relative position of the differential chips, was determined. Finally, a series of comparative experiments indicated that the differential EFS highlighted in the present study exhibits good linearity and accuracy.<\/jats:p>","DOI":"10.3390\/s18061740","type":"journal-article","created":{"date-parts":[[2018,5,29]],"date-time":"2018-05-29T02:58:18Z","timestamp":1527562698000},"page":"1740","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":28,"title":["Research on a Novel MEMS Sensor for Spatial DC Electric Field Measurements in an Ion Flows Field"],"prefix":"10.3390","volume":"18","author":[{"given":"Ya","family":"Mou","sequence":"first","affiliation":[{"name":"State Key Lab of Power Systems, Department of Electrical Engineering, Tsinghua University, Beijing 100084, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Zhanqing","family":"Yu","sequence":"additional","affiliation":[{"name":"State Key Lab of Power Systems, Department of Electrical Engineering, Tsinghua University, Beijing 100084, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Kaitian","family":"Huang","sequence":"additional","affiliation":[{"name":"Electric Power Research Institute, China Southern Power Grid, Guangzhou 510000, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Qing","family":"Ma","sequence":"additional","affiliation":[{"name":"Department of Microelectronics and Nanoelectronics, Tsinghua University, Beijing 100084, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Rong","family":"Zeng","sequence":"additional","affiliation":[{"name":"State Key Lab of Power Systems, Department of Electrical Engineering, Tsinghua University, Beijing 100084, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Zheyao","family":"Wang","sequence":"additional","affiliation":[{"name":"Department of Microelectronics and Nanoelectronics, Tsinghua University, Beijing 100084, China"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"1968","published-online":{"date-parts":[[2018,5,28]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","unstructured":"Zhang, D., Zhang, Z., Jiang, X., Shu, L., and Wu, B. (2018). Simulation Study on the Effects of DC Electric Field on Insulator Surface Pollution Deposit. Energies, 11.","DOI":"10.3390\/en11030626"},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"17","DOI":"10.1109\/57.484105","article-title":"Progress in Japan of space charge field measurement in gaseous dielectrics using a pockels sensor","volume":"12","author":"Hidaka","year":"1996","journal-title":"IEEE Electr. Insul. Mag."},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"282","DOI":"10.1109\/19.997825","article-title":"Electro-optic sensor for measurement of DC fields in the presence of space charge","volume":"51","author":"Cecelja","year":"2002","journal-title":"IEEE Trans. Instrum. Meas."},{"key":"ref_4","first-page":"1611","article-title":"Calculation of 3-D Ion Flow Field at the Crossing of HVDC Transmission Lines by Method of Characteristics","volume":"99","author":"Xiao","year":"2017","journal-title":"IEEE Trans. Power Deliv."},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"785","DOI":"10.1049\/iet-gtd.2011.0814","article-title":"Time-domain finite volume method for ion-flow field analysis of bipolar high-voltage direct current transmission lines","volume":"6","author":"Yin","year":"2012","journal-title":"IET Gener. Transm. Distrib."},{"key":"ref_6","first-page":"130","article-title":"Recent Progress in the Calculation Methods of Ion Flow Field of HVDC Transmission Lines","volume":"32","author":"Xiang","year":"2012","journal-title":"Proc. Chin. Soc. Electr. Eng."},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"1459","DOI":"10.1109\/TIM.2007.900157","article-title":"Design and application of a field mill as a high-voltage DC meter","volume":"56","author":"Tant","year":"2007","journal-title":"IEEE Trans. Instrum. Meas."},{"key":"ref_8","doi-asserted-by":"crossref","unstructured":"Liu, Z., He, W., Zhang, H., Xia, S., Xiao, B., and Xu, Y. (2010, January 28\u201331). Notice of Retraction Study on the Parameters of UHV DC Electric Field Meter. Proceedings of the IEEE 2010 Asia-Pacific Power and Energy Engineering Conference (APPEEC), Chengdu, China.","DOI":"10.1109\/APPEEC.2010.5449449"},{"key":"ref_9","doi-asserted-by":"crossref","unstructured":"Hidaka, K. (1999, January 23\u201327). Electric field and voltage measurement by using electro-optic sensor. Proceedings of the 11th International Symposium on High-Voltage Engineering (ISH 99), London, UK.","DOI":"10.1049\/cp:19990583"},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"577","DOI":"10.1109\/JMEMS.2003.818066","article-title":"Electrostatic charge and field sensors based on micromechanical resonators","volume":"12","author":"Riehl","year":"2003","journal-title":"J. Microelectromech. Syst."},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"5730","DOI":"10.1109\/TIE.2015.2414397","article-title":"Electric Field Sensor Based on Piezoelectric Bending Effect for Wide Range Measurement","volume":"62","author":"Xue","year":"2015","journal-title":"IEEE Trans. Ind. Electron."},{"key":"ref_12","unstructured":"Gong, C., Tao, H., Peng, C., Bai, Q., Chen, S., and Xia, S. (November, January 30). A novel miniature interlacing vibrating electric field sensor. Proceedings of the 2005 IEEE Sensors, Irvine, CA, USA."},{"key":"ref_13","unstructured":"Tang, W. (1990). Electrostatic Comb Drive for Resonant Sensor and Actuator Applications. [D.S. Thesis, University of California Berkeley]."},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"988","DOI":"10.1109\/TPWRD.2008.2008427","article-title":"Micromachined Electric-Field Sensor to Measure AC and DC Fields in Power Systems","volume":"24","author":"Wijeweera","year":"2009","journal-title":"IEEE Trans. Power Deliv."},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"870","DOI":"10.3390\/s18030870","article-title":"Design, Fabrication and Characterization of a MEMS-Based Three-Dimensional Electric Field Sensor with Low Cross-Axis Coupling Interference","volume":"18","author":"Ling","year":"2018","journal-title":"Sensors"},{"key":"ref_16","doi-asserted-by":"crossref","unstructured":"Chu, Z., Peng, C., Ren, R., Ling, B., Zhang, Z., Lei, H., and Xia, S. (2018). A High Sensitivity Electric Field Microsensor Based on Torsional Resonance. Sensors, 18.","DOI":"10.3390\/s18010286"},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"641","DOI":"10.1109\/TIM.2009.2025081","article-title":"A Ferroelectric-Capacitor-Based Approach to Quasistatic Electric Field Sensing","volume":"59","author":"Baglio","year":"2010","journal-title":"IEEE Trans. Instrum. Meas."},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"68","DOI":"10.1038\/s41928-017-0009-5","article-title":"Distortion-free measurement of electric field strength with a MEMS sensor","volume":"1","author":"Kainz","year":"2018","journal-title":"Nat. Electron."},{"key":"ref_19","doi-asserted-by":"crossref","first-page":"2737","DOI":"10.1016\/S0142-9612(02)00007-8","article-title":"Evaluation of MEMS materials of construction for implantable medical devices","volume":"23","author":"Kotzar","year":"2002","journal-title":"Biomaterials"},{"key":"ref_20","doi-asserted-by":"crossref","first-page":"4","DOI":"10.1109\/TAP.2009.2036197","article-title":"A Dual-Linearly-Polarized MEMS-Reconfigurable Antenna for Narrowband MIMO Communication Systems","volume":"58","author":"Grau","year":"2009","journal-title":"IEEE Trans. Antennas Propag."},{"key":"ref_21","doi-asserted-by":"crossref","first-page":"1336","DOI":"10.1109\/LED.2016.2604426","article-title":"RF-MEMS Technology for 5G: Series and Shunt Attenuator Modules Demonstrated up to 110 GHz","volume":"37","author":"Iannacci","year":"2016","journal-title":"IEEE Electron Device Lett."},{"key":"ref_22","unstructured":"Loconto, D.P. (1992). High-Sensitivity Micromechanical Electrostatic Voltmeter. [Master\u2019s Thesis, University of California]."},{"key":"ref_23","unstructured":"Peng, C., Yang, P., Zhang, H., Guo, X., and Xia, S. (2010, January 1\u20134). Design of a SOI MEMS Resonant Electric Field Sensor for Power Engineering Applications. Proceedings of the 2010 IEEE Sensors, Kona, HI, USA."},{"key":"ref_24","unstructured":"Ji, Y. (2013). Measurement of Air Ion Mobility and Analysis of Its Impact Factors. [Master\u2019s Thesis, Tsinghua University]."},{"key":"ref_25","doi-asserted-by":"crossref","first-page":"7866","DOI":"10.1109\/JSEN.2017.2762327","article-title":"A MEMS-Based Electric Field Sensor for Measurement of High-Voltage DC Synthetic Fields in Air","volume":"17","author":"Ma","year":"2017","journal-title":"IEEE Sens. J."},{"key":"ref_26","doi-asserted-by":"crossref","first-page":"3135","DOI":"10.1063\/1.329178","article-title":"Generation and measurement of dc electric fields with space charge","volume":"52","author":"Misakian","year":"1998","journal-title":"J. Appl. Phys."},{"key":"ref_27","doi-asserted-by":"crossref","first-page":"923","DOI":"10.1109\/TDEI.2017.006542","article-title":"Dependence of the average mobility of ions in air with pressure and humidity","volume":"24","author":"Zhang","year":"2017","journal-title":"IEEE Trans. Dielectr. Electr. Insul."}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/18\/6\/1740\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T15:06:16Z","timestamp":1760195176000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/18\/6\/1740"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2018,5,28]]},"references-count":27,"journal-issue":{"issue":"6","published-online":{"date-parts":[[2018,6]]}},"alternative-id":["s18061740"],"URL":"https:\/\/doi.org\/10.3390\/s18061740","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2018,5,28]]}}}