{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,4,15]],"date-time":"2026-04-15T02:01:28Z","timestamp":1776218488446,"version":"3.50.1"},"reference-count":27,"publisher":"MDPI AG","issue":"6","license":[{"start":{"date-parts":[[2018,6,20]],"date-time":"2018-06-20T00:00:00Z","timestamp":1529452800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>Extrinsic Fabry\u2013Perot (FP) interferometric sensors are being intensively applied for partial discharge (PD) detection and localization. Previous research work has mainly focused on novel structures and materials to improve the sensitivity and linear response of these sensors. However, the directional response behavior of an FP ultrasonic sensor is also of particular importance in localizing the PD source, which is rarely considered. Here, the directional sensitivity of a microelectromechanical system (MEMS)-based FP ultrasonic sensor with a 5-\u03bcm-thick micromechanical vibrating diaphragm is experimentally investigated. Ultrasonic signals from a discharge source with varying incident angles and linear distances are measured and analyzed. The results show that the sensor has a 5.90 dB amplitude fluctuation over a \u00b160\u00b0 incident range and an exciting capability to detect weak PD signals from 3 m away due to its high signal\u2013noise ratio. The findings are expected to optimize the configuration of a sensor array and accurately localize the PD source.<\/jats:p>","DOI":"10.3390\/s18061975","type":"journal-article","created":{"date-parts":[[2018,6,20]],"date-time":"2018-06-20T10:41:24Z","timestamp":1529491284000},"page":"1975","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":30,"title":["Directional Sensitivity of a MEMS-Based Fiber-Optic Extrinsic Fabry\u2013Perot Ultrasonic Sensor for Partial Discharge Detection"],"prefix":"10.3390","volume":"18","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-8473-1462","authenticated-orcid":false,"given":"Wenrong","family":"Si","sequence":"first","affiliation":[{"name":"State Grid Shanghai Electric Power Research Institute, Shanghai 200437, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Chenzhao","family":"Fu","sequence":"additional","affiliation":[{"name":"State Grid Shanghai Electric Power Research Institute, Shanghai 200437, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Delin","family":"Li","sequence":"additional","affiliation":[{"name":"Key Laboratory of Micro\/Nano Systems for Aerospace (Ministry of Education), Northwestern Polytechnical University, Xi\u2019an 710072, China"},{"name":"Shaanxi Province Key Laboratory of Micro and Nano Electro-Mechanical Systems, Northwestern Polytechnical University, Xi\u2019an 701172, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Haoyong","family":"Li","sequence":"additional","affiliation":[{"name":"Key Laboratory of Micro\/Nano Systems for Aerospace (Ministry of Education), Northwestern Polytechnical University, Xi\u2019an 710072, China"},{"name":"Shaanxi Province Key Laboratory of Micro and Nano Electro-Mechanical Systems, Northwestern Polytechnical University, Xi\u2019an 701172, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Peng","family":"Yuan","sequence":"additional","affiliation":[{"name":"Xi\u2019an Maorong Power Equipment Co., Ltd., Xi\u2019an 710048, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yiting","family":"Yu","sequence":"additional","affiliation":[{"name":"Key Laboratory of Micro\/Nano Systems for Aerospace (Ministry of Education), Northwestern Polytechnical University, Xi\u2019an 710072, China"},{"name":"Shaanxi Province Key Laboratory of Micro and Nano Electro-Mechanical Systems, Northwestern Polytechnical University, Xi\u2019an 701172, China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2018,6,20]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","unstructured":"Huang, Y.W., Tao, J., and Huang, X.G. (2016). Research Progress on F-P Interference\u2014Based Fiber-Optic Sensors. Sensors, 16.","DOI":"10.3390\/s16091424"},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"7451","DOI":"10.3390\/s140407451","article-title":"Chronology of Fabry-P\u00e9rot Interferometer Fiber-Optic Sensors and Their Applications: A Review","volume":"14","author":"Islam","year":"2014","journal-title":"Sensors"},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"21829","DOI":"10.1364\/OE.21.021829","article-title":"MEMS Fabry-P\u00e9rot Sensor Interrogated by Optical System-on-a-Chip for Simultaneous Pressure and Temperature Sensing","volume":"21","author":"Pang","year":"2013","journal-title":"Opt. Express"},{"key":"ref_4","first-page":"4026","article-title":"Extrinsic Fabry-P\u00e9rot Underwater Acoustic Sensor Based on Micromachined Center-Embossed Diaphragm","volume":"32","author":"Wang","year":"2014","journal-title":"J. Lightwave Technol."},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"581","DOI":"10.1109\/LPT.2015.2506480","article-title":"MEMS-Based High-Sensitivity Fabry-P\u00e9rot Acoustic Sensor with a 45\u00b0 Angled Fiber","volume":"28","author":"Liu","year":"2016","journal-title":"IEEE Photonics Technol. Lett."},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"2838","DOI":"10.1364\/OL.39.002838","article-title":"Fiber-Optic Acoustic Pressure Sensor Based on Large-Area Nanolayer Silver Diaphragm","volume":"39","author":"Xu","year":"2014","journal-title":"Opt. Lett."},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"162","DOI":"10.1016\/j.sna.2017.12.057","article-title":"Small in-Fiber Fabry-P\u00e9rot Low-Frequency Acoustic Pressure Sensor with PDMS Diaphragm Embedded in Hollow-Core Fiber","volume":"270","author":"Zhao","year":"2017","journal-title":"Sens. Actuator A Phys."},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"1906","DOI":"10.1364\/OE.23.001906","article-title":"Simultaneous Measurement of Pressure and Temperature by Employing Fabry-P\u00e9rot Interferometer Based on Pendant Polymer Droplet","volume":"23","author":"Sun","year":"2015","journal-title":"Opt. Express"},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"11025","DOI":"10.1364\/OE.26.011025","article-title":"Ultrasonic Imaging of Seismic Physical Models Using a Fringe Visibility Enhanced Fiber-Optic Fabry-P\u00e9rot Interferometric Sensor","volume":"26","author":"Zhang","year":"2018","journal-title":"Opt. Express"},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"5079","DOI":"10.1109\/JLT.2017.2765693","article-title":"Noncontact Ultrasonic Detection in Low-Pressure Carbon Dioxide Medium Using High Sensitivity Fiber-Optic Fabry\u2013Perot Sensor System","volume":"35","author":"Jiang","year":"2017","journal-title":"J. Lightwave Technol."},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"4344","DOI":"10.1109\/JLT.2017.2737639","article-title":"A Highly Sensitive Fiber-Optic Microphone Based on Graphene Oxide Membrane","volume":"35","author":"Wu","year":"2017","journal-title":"J. Lightwave Technol."},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"932","DOI":"10.1109\/LPT.2013.2256343","article-title":"Fiber-Optic Fabry-P\u00e9rot Acoustic Sensor with Multilayer Graphene Diaphragm","volume":"25","author":"Ma","year":"2013","journal-title":"IEEE Photonics Technol. Lett."},{"key":"ref_13","doi-asserted-by":"crossref","unstructured":"Fu, C., Si, W., Li, H., Li, D., Yuan, P., and Yu, Y. (2017). A Novel High-Performance Beam-Supported Membrane Structure with Enhanced Design Flexibility for Partial Discharge Detection. Sensors, 17.","DOI":"10.3390\/s17030593"},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"1497","DOI":"10.1364\/OE.14.001497","article-title":"Optical MEMS Pressure Sensor Based on Fabry-P\u00e9rot Interferometry","volume":"14","author":"Li","year":"2006","journal-title":"Opt. Express"},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"644","DOI":"10.1364\/OE.25.000644","article-title":"Demodulation of an Optical Fiber MEMS Pressure Sensor Based on Single Bandpass Microwave Photonic Filter","volume":"25","author":"Wang","year":"2017","journal-title":"Opt. Express"},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"214","DOI":"10.1109\/TDEI.2009.4784570","article-title":"Application Possibilities of Artificial Neural Networks for Recognizing Partial Discharges Measured by the Acoustic Emission Method","volume":"16","author":"Boczar","year":"2009","journal-title":"IEEE Trans. Dielectr. Electr. Insul."},{"key":"ref_17","doi-asserted-by":"crossref","unstructured":"Gao, S., Zhang, Y., Xie, Q., Kan, Y., Li, S., Liu, D., and L\u00fc, F. (2017). Research on Partial Discharge Source Localization Based on an Ultrasonic Array and a Step-by-Step Over-Complete Dictionary. Energies, 10.","DOI":"10.3390\/en10050593"},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"1833","DOI":"10.1364\/OL.36.001833","article-title":"High-Sensitivity Compact Ultrasonic Detector Based on a Pi-Phase-Shifted Fiber Bragg Grating","volume":"36","author":"Rosenthal","year":"2011","journal-title":"Opt. Lett."},{"key":"ref_19","doi-asserted-by":"crossref","first-page":"3433","DOI":"10.1109\/JLT.2006.878513","article-title":"Angular Dependence of the Frequency Response of an Extrinsic Fabry-P\u00e9rot Interferometric (EFPI) Fiber Acoustic Sensor for Partial Discharge Detection","volume":"24","author":"Song","year":"2006","journal-title":"J. Lightwave Technol."},{"key":"ref_20","unstructured":"IEEE (2007). IEEE Guide for the Detection and Location of Acoustic Emissions from Partial Discharges in Oil-Immersed Power Transformers and Reactors, IEEE. IEEE Standard C57.127-2007."},{"key":"ref_21","doi-asserted-by":"crossref","first-page":"83700K","DOI":"10.1117\/12.920816","article-title":"Two-Wavelength Quadrature Multipoint Detection of Partial Discharge in Power Transformers Using Fiber Fabry-P\u00e9rot Acoustic Sensors","volume":"8370","author":"Dong","year":"2012","journal-title":"Proc. SPIE"},{"key":"ref_22","doi-asserted-by":"crossref","unstructured":"Banishev, A. (2017). Applications of fiber-optic interferometry technology in sensor fields. Optical Interferometry, IntechOpen. Chapter 7.","DOI":"10.5772\/63683"},{"key":"ref_23","unstructured":"Udd, E. (1995). Sensors for smart structure based upon the Fabry-P\u00e9rot interferometer. Fiber Optics Smart Structures, Wiley."},{"key":"ref_24","doi-asserted-by":"crossref","unstructured":"Zhang, C., Dong, M., Ren, M., Huang, W., Zhou, J., Gao, X., and Albarrac\u00edn, R. (2018). Partial Discharge Monitoring on Metal-Enclosed Switchgear with Distributed Non-Contact Sensors. Sensors, 18.","DOI":"10.3390\/s18020551"},{"key":"ref_25","doi-asserted-by":"crossref","unstructured":"Ren, M., Zhou, J., Song, B., Zhang, C., Dong, M., and Albarrac\u00edn, R. (2017). Towards Optical Partial Discharge Detection with Micro Silicon Photomultipliers. Sensors, 17.","DOI":"10.3390\/s17112595"},{"key":"ref_26","unstructured":"(2018, January 26). Table of Physical and Chemical Constants. Available online: http:\/\/www.kayelaby.npl.co.uk\/general_physics\/2_4\/2_4_1.html."},{"key":"ref_27","first-page":"1","article-title":"An Optical Fiber Fabry-P\u00e9rot Interferometric Sensor Based on Functionalized Diaphragm for Ultrasound Detection and Imaging","volume":"9","author":"Zhang","year":"2017","journal-title":"IEEE Photonics J."}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/18\/6\/1975\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T15:09:25Z","timestamp":1760195365000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/18\/6\/1975"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2018,6,20]]},"references-count":27,"journal-issue":{"issue":"6","published-online":{"date-parts":[[2018,6]]}},"alternative-id":["s18061975"],"URL":"https:\/\/doi.org\/10.3390\/s18061975","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2018,6,20]]}}}