{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,12]],"date-time":"2025-10-12T04:01:06Z","timestamp":1760241666919,"version":"build-2065373602"},"reference-count":20,"publisher":"MDPI AG","issue":"7","license":[{"start":{"date-parts":[[2018,6,27]],"date-time":"2018-06-27T00:00:00Z","timestamp":1530057600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>The scale factor drifts and other long-term instability drifts of Micro-Electro-Mechanical System (MEMS) inertial sensors are the main contributors of the position and orientation errors in high dynamic environments. In this paper, a novel high dynamic micro vibrator, which could provide high acceleration and high angular rate rotation with integrated optical displacement detector, is proposed. Commercial MEMS inertial sensors, including 3-axis accelerometer and 6-axis inertial measurement unit which is about 3 mm * 3 mm * 1 mm with 19 mg, could be bonded on the vibration platform of the micro vibrator to perform in-situ during the self-calibration procedure. The high dynamic micro vibrator is fabricated by a fully-integrated MEMS process, including lead zirconate titanate (PZT) film deposition, PZT and electrodes patterning, and structural ion etching. The optical displacement detector, using vertical-cavity surface-emitting laser (VCSEL) and photoelectric diodes (PD), is integrated on the top of the package to measure the 6-DOF vibrating displacement with the detecting resolution of 150 nm in the range of 500 \u03bcm. The maximum out-of-plane acceleration of the z-axis vibrating platform loaded with commercial 3-axis accelerometer (H3LIS331DL) achieves above 16 g and the maximum angular velocity achieves above 720\u00b0\/s when the driving voltage is \u00b16 V.<\/jats:p>","DOI":"10.3390\/s18072055","type":"journal-article","created":{"date-parts":[[2018,6,27]],"date-time":"2018-06-27T11:02:05Z","timestamp":1530097325000},"page":"2055","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":3,"title":["High Dynamic Micro Vibrator with Integrated Optical Displacement Detector for In-Situ Self-Calibration of MEMS Inertial Sensors"],"prefix":"10.3390","volume":"18","author":[{"given":"Yi-Jia","family":"Du","sequence":"first","affiliation":[{"name":"Microsystem and Terahertz Research Center, Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang 621999, China"}]},{"given":"Ting-Ting","family":"Yang","sequence":"additional","affiliation":[{"name":"Microsystem and Terahertz Research Center, Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang 621999, China"}]},{"given":"Dong-Dong","family":"Gong","sequence":"additional","affiliation":[{"name":"Microsystem and Terahertz Research Center, Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang 621999, China"}]},{"given":"Yi-Cheng","family":"Wang","sequence":"additional","affiliation":[{"name":"Microsystem and Terahertz Research Center, Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang 621999, China"}]},{"given":"Xiang-Yu","family":"Sun","sequence":"additional","affiliation":[{"name":"Microsystem and Terahertz Research Center, Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang 621999, China"}]},{"given":"Feng","family":"Qin","sequence":"additional","affiliation":[{"name":"Microsystem and Terahertz Research Center, Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang 621999, China"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-7675-5395","authenticated-orcid":false,"given":"Gang","family":"Dai","sequence":"additional","affiliation":[{"name":"Microsystem and Terahertz Research Center, Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang 621999, China"}]}],"member":"1968","published-online":{"date-parts":[[2018,6,27]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"527","DOI":"10.1016\/j.ast.2006.04.002","article-title":"An integrated GPS\/MEMS-IMU navigation system for an autonomous helicopter","volume":"10","author":"Wendel","year":"2006","journal-title":"Aerosp. Sci. Technol."},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"135","DOI":"10.1007\/s10291-007-0073-9","article-title":"An intelligent and autonomous MEMS IMU\/GPS integration scheme for low cost land navigation applications","volume":"12","author":"Huang","year":"2008","journal-title":"GPS Solut."},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"323","DOI":"10.1017\/S0373463307004560","article-title":"A standard testing and calibration procedure for low cost MEMS inertial sensors and units","volume":"61","author":"Aggarwal","year":"2008","journal-title":"J. Navig."},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"811","DOI":"10.1109\/JMEMS.2013.2294562","article-title":"No physical stimulus testing and calibration for MEMS accelerometer","volume":"23","author":"Dar","year":"2014","journal-title":"J. Microelectromech. Syst."},{"key":"ref_5","unstructured":"Casinovi, G., Sung, W., Dalal, M., Shirazi, A., and Ayazi, F. (February, January 29). Electrostatic self-calibration of vibratory gyroscopes. Proceedings of the IEEE MEMS, Paris, France."},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"730","DOI":"10.1109\/JMEMS.2013.2242253","article-title":"Miniature wireless magnetoelastic resonant motor with frequency selectable bidirectional rotation","volume":"22","author":"Tang","year":"2013","journal-title":"J. Microelectromech. Syst."},{"key":"ref_7","doi-asserted-by":"crossref","unstructured":"Piratla, S., and Lal, A. (2014, January 3\u20136). Ultrasonic micromotor control using selfactuated micro-structures. Proceedings of the 2014 IEEE International Ultrasonics Symposium, Chicago, IL, USA.","DOI":"10.1109\/ULTSYM.2014.0383"},{"key":"ref_8","doi-asserted-by":"crossref","unstructured":"Aktakka, E.E., Peterson, R.L., and Najafi, K. (2013, January 20\u201324). A 3-DOF piezoelectric micro vibratory stage based on bulk-PZT\/silicon crab-leg suspensions. Proceedings of the 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS), Taipei, Taiwan.","DOI":"10.1109\/MEMSYS.2013.6474307"},{"key":"ref_9","doi-asserted-by":"crossref","unstructured":"Aktakka, E., Peterson, R., and Najafi, K. (2013, January 16\u201320). A 6-DOF piezoelectric micro vibratory stage based on multi-axis distributed-electrode excitation of PZT\/Si unimorph T-beams. Proceedings of the 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), Barcelona, Spain.","DOI":"10.1109\/Transducers.2013.6627085"},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"934","DOI":"10.1109\/TMECH.2014.2326865","article-title":"A microactuation and sensing platform with active lockdown for in situ calibration of scale factor drifts in dual-axis gyroscopes","volume":"20","author":"Aktakka","year":"2015","journal-title":"IEEE-ASME Trans. Mech."},{"key":"ref_11","doi-asserted-by":"crossref","unstructured":"Edamana, B., Slavin, D., Aktakka, E.E., and Oldham, K.R. (2014, January 4\u20136). Control and estimation with threshold sensing for inertial measurement unit calibration using a piezoelectric microstage. Proceedings of the 2014 American Control Conference, Portland, OR, USA.","DOI":"10.1109\/ACC.2014.6859359"},{"key":"ref_12","doi-asserted-by":"crossref","unstructured":"Aktakka, E.E., Woo, J.K., Egert, D., Gordenker, R., and Najafi, K. (2014, January 25\u201326). A micro vibratory stage for on chip physical stimulation and calibration of MEMS gyroscopes. Proceedings of the 2014 International Symposium on Inertial Sensors and Systems (ISISS), Laguna Beach, CA, USA.","DOI":"10.1109\/ISISS.2014.6782538"},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"1943","DOI":"10.1109\/TCST.2014.2386776","article-title":"Estimation with threshold sensing for gyroscope calibration using a piezoelectric microstage","volume":"23","author":"Edamana","year":"2015","journal-title":"IEEE Trans. Control Syst. Technol."},{"key":"ref_14","doi-asserted-by":"crossref","unstructured":"Edamana, B., and Oldham, K. (2013, January 21\u201323). An iterative learning controller for high precision calibration of an inertial measurement unit using a piezoelectric platform. Proceedings of the ASME 2013 Dynamic Systems and Control Conference, Palo Alto, CA, USA.","DOI":"10.1115\/DSCC2013-3974"},{"key":"ref_15","doi-asserted-by":"crossref","unstructured":"Aktakka, E.E., and Najafi, K. (2016, January 24\u201328). A six-axis micro platform for in situ calibration of MEMS inertial sensors.. Proceedings of the 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), Shanghai, China.","DOI":"10.1109\/MEMSYS.2016.7421605"},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"286","DOI":"10.1088\/0960-1317\/12\/3\/314","article-title":"Integrated microlaser displacement sensor","volume":"12","author":"Sawada","year":"2002","journal-title":"J. Micromech. Microeng."},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"1933","DOI":"10.1109\/JSEN.2009.2031810","article-title":"Integrated optical displacement detection and electrostatic actuation for directional optical microphones with micromachined biomimetic diaphragms","volume":"9","author":"Bicen","year":"2009","journal-title":"IEEE Sens. J."},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"269","DOI":"10.1016\/j.sna.2007.03.027","article-title":"Integrated micro-displacement sensor that measures tilting angle and linear movement of an external mirror","volume":"138","author":"Ishikawa","year":"2007","journal-title":"Sens. Actuators A Phys."},{"key":"ref_19","doi-asserted-by":"crossref","unstructured":"Qin, F., Zhang, X., Du, Y., Dai, G., Bao, L., and Bao, J. (2017, January 9\u201312). High g-factor MEMS vibration platform for in-situ self-calibration of accelerometer. Proceedings of the 2017 IEEE 12th International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS), Los Angeles, CA, USA.","DOI":"10.1109\/NEMS.2017.8017076"},{"key":"ref_20","unstructured":"Dai, G., Li, X., Wang, Y., Du, Y., and Gong, D. (2018). High resolution optical beam deflection method for micro vibrator\u2019s displacement detection. submitted."}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/18\/7\/2055\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T15:10:25Z","timestamp":1760195425000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/18\/7\/2055"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2018,6,27]]},"references-count":20,"journal-issue":{"issue":"7","published-online":{"date-parts":[[2018,7]]}},"alternative-id":["s18072055"],"URL":"https:\/\/doi.org\/10.3390\/s18072055","relation":{},"ISSN":["1424-8220"],"issn-type":[{"type":"electronic","value":"1424-8220"}],"subject":[],"published":{"date-parts":[[2018,6,27]]}}}