{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,12]],"date-time":"2025-10-12T04:01:28Z","timestamp":1760241688359,"version":"build-2065373602"},"reference-count":24,"publisher":"MDPI AG","issue":"8","license":[{"start":{"date-parts":[[2018,7,27]],"date-time":"2018-07-27T00:00:00Z","timestamp":1532649600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>The oscillation of the sense mode of the micro-machined Coriolis vibratory gyroscope (MCVG) with high quality factor (Q) is analyzed in this study and the corresponding force feedback control scheme is presented to suppress this oscillation. The controller consists of integrator and some filters, instead of the common but complicated demodulation and remodulation modules. Compared with using no oscillation suppression scheme, the proposed simplified oscillation suppression control scheme can achieve an improvement of the sense mode of the MCVG. The inband spectrum ripple of the angular rate output are improved from 51.4 dB to 4.23 \u00d7 10\u22124 dB. Correspondingly, these two performance parameters are improved by 370.4 and 186.2 times, which are higher than two orders of magnitude, respectively. Bias stability is improved from 9.72 deg\/h to 2.5 deg\/h. Test results prove that the proposed control scheme is effective in suppressing the oscillation.<\/jats:p>","DOI":"10.3390\/s18082443","type":"journal-article","created":{"date-parts":[[2018,7,27]],"date-time":"2018-07-27T12:20:03Z","timestamp":1532694003000},"page":"2443","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":6,"title":["Oscillation Suppression in the Sense Mode of a High-Q MEMS Gyroscope Using a Simplified Closed-Loop Control Method"],"prefix":"10.3390","volume":"18","author":[{"given":"Qiang","family":"Shen","sequence":"first","affiliation":[{"name":"Research &amp; Development Institute, Northwestern Polytechnical University, Shenzhen 518057, China"},{"name":"MOE Key Laboratory of Micro and Nano Systems for Aerospace, Northwestern Polytechnical University, Xi\u2019an 710072, China"}]},{"given":"Xinpeng","family":"Wang","sequence":"additional","affiliation":[{"name":"Research &amp; Development Institute, Northwestern Polytechnical University, Shenzhen 518057, China"},{"name":"MOE Key Laboratory of Micro and Nano Systems for Aerospace, Northwestern Polytechnical University, Xi\u2019an 710072, China"}]},{"given":"Yixuan","family":"Wu","sequence":"additional","affiliation":[{"name":"Research &amp; Development Institute, Northwestern Polytechnical University, Shenzhen 518057, China"},{"name":"MOE Key Laboratory of Micro and Nano Systems for Aerospace, Northwestern Polytechnical University, Xi\u2019an 710072, China"}]},{"given":"Jianbing","family":"Xie","sequence":"additional","affiliation":[{"name":"Research &amp; Development Institute, Northwestern Polytechnical University, Shenzhen 518057, China"},{"name":"MOE Key Laboratory of Micro and Nano Systems for Aerospace, Northwestern Polytechnical University, Xi\u2019an 710072, China"}]}],"member":"1968","published-online":{"date-parts":[[2018,7,27]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"1640","DOI":"10.1109\/5.704269","article-title":"Micromachined inertial sensors","volume":"86","author":"Yazdi","year":"1998","journal-title":"Proc. IEEE"},{"key":"ref_2","unstructured":"Iyer, S.V. (2003). Modelling and Simulation of Non-Idealities in a Z-axis CMOS-MEMS Gyroscope. [Ph.D. Thesis, Department of Electrical & Computer Engineering, Carnegie Mellon University]."},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"479","DOI":"10.1109\/JMEMS.2006.876779","article-title":"Error sources in in-plane silicon tuning-fork MEMS gyroscope","volume":"15","author":"Weinberg","year":"2006","journal-title":"J. Mciroelectromech. Syst."},{"key":"ref_4","unstructured":"Iyer, S.V., and Mukherjee, T. (2002, January 22\u201325). Simulation of manufacturing variations in a Z-axis CMOS-MEMS gyroscope. Proceedings of the Fifth International Conference on Modeling and Simulation of Microsystems, San Juan, Puerto Rico."},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"025013","DOI":"10.1088\/0960-1317\/23\/2\/025013","article-title":"Development of a 3D capacitive gyroscope with reduced parasitic capacitance","volume":"23","author":"Walther","year":"2013","journal-title":"J. Micromech. Microeng."},{"key":"ref_6","doi-asserted-by":"crossref","unstructured":"Sharma, A., Zaman, M.F., Zucher, M., and Ayazi, F. (2008, January 13\u201317). A 0.1\u00b0\/hr bias drift electronically matched tuning fork microgyroscope. Proceedings of the IEEE MEMS 2008, Tucson, AZ, USA.","DOI":"10.1109\/MEMSYS.2008.4443579"},{"key":"ref_7","doi-asserted-by":"crossref","unstructured":"Trusov, A.A., Schofield, A.R., and Shkel, A.M. (2010, January 8\u201311). Vacuum packaged silicon MEMS gyroscope with Q-factor above 0.5 million. Proceedings of the 6th International Conference and Exhibition on Device Packaging, Scottsdale, AZ, USA.","DOI":"10.4071\/2010DPC-wa22"},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"1639","DOI":"10.1109\/JSEN.2007.908921","article-title":"Zero-rate output and quadrature compensation in vibratory MEMS gyroscopes","volume":"7","author":"Saukoski","year":"2007","journal-title":"IEEE Sens. J."},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"303","DOI":"10.1109\/JMEMS.2012.2221158","article-title":"Bias contributions in a MEMS tuning fork gyroscope","volume":"22","author":"Walther","year":"2013","journal-title":"J. Microelectromech. Syst."},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"2157","DOI":"10.1109\/JSEN.2012.2185692","article-title":"Bias prediction for MEMS gyroscopes","volume":"12","author":"Collin","year":"2012","journal-title":"IEEE Sens. J."},{"key":"ref_11","unstructured":"Iyer, S.V., Zhou, Y., and Mukherjee, T. (1999, January 19\u201321). Analytical modeling of cross-axis coupling in micromechanical springs. Proceedings of the International Conference on Modeling and Simulation of Microsystems, San Juan, Puerto Rico, USA."},{"key":"ref_12","unstructured":"Geen, J.A. (1998, January 8\u201311). A path to low cost gyroscope. Proceedings of the Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, USA."},{"key":"ref_13","unstructured":"Seeger, J., Rastegar, A., and Tormey, T. (2007). Method and Apparatus for Electronic Cancellation of Quadrature Error. (7290435 B2), U.S. Patent."},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"1790","DOI":"10.1109\/JSSC.2007.900282","article-title":"A 104-dB dynamic range transimpedance-based CMOS ASIC for tuning fork microgyroscopes","volume":"42","author":"Sharma","year":"2007","journal-title":"IEEE J. Solid-State Circuits"},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"1526","DOI":"10.1109\/JMEMS.2008.2004794","article-title":"A mode-matched silicon-yaw tuning-fork gyroscope with subdegree-per-hour Allan deviation bias instability","volume":"17","author":"Zaman","year":"2008","journal-title":"J. Mciroelectromech. Syst."},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"1593","DOI":"10.1109\/JSSC.2009.2016996","article-title":"A sub-0.2\u00b0\/hr bias drift micromechanical silicon gyroscope with automatic CMOS mode-matching","volume":"44","author":"Sharma","year":"2009","journal-title":"IEEE J. Solid-State Circuits"},{"key":"ref_17","doi-asserted-by":"crossref","unstructured":"Sonmezoglu, S., Alper, S.E., and Akin, T. (February, January 29). An automatically mode-matched mems gyroscope with 50 Hz bandwidth. Proceedings of the IEEE MEMS 2012, Paris, France.","DOI":"10.1109\/MEMSYS.2012.6170231"},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"656","DOI":"10.1109\/JMEMS.2012.2189356","article-title":"Error compensation and corresponding effects on the performance of fully decoupled MEMS gyroscopes","volume":"21","author":"Tatar","year":"2012","journal-title":"J. Mciroelectromech. Syst."},{"key":"ref_19","doi-asserted-by":"crossref","unstructured":"Sonmezoglu, S., Alper, S.E., and Akin, T. (2013, January 16\u201320). A high performance automatic mode-matched MEMS gyroscope with an improved thermal stability of the scale factor. Proceedings of the Transducers 2013, Barcelona, Spain.","DOI":"10.1109\/Transducers.2013.6627318"},{"key":"ref_20","doi-asserted-by":"crossref","first-page":"284","DOI":"10.1109\/JMEMS.2014.2299234","article-title":"An automatically mode-matched MEMS gyroscope with wide and tunable bandwidth","volume":"23","author":"Sonmezoglu","year":"2014","journal-title":"J. Mciroelectromech. Syst."},{"key":"ref_21","doi-asserted-by":"crossref","first-page":"517","DOI":"10.1016\/j.sna.2012.12.024","article-title":"Compensation of drifts in high-Q MEMS gyroscope using temperature self-sensing","volume":"201","author":"Prikhodko","year":"2013","journal-title":"Sens. Actuators A Phys."},{"key":"ref_22","doi-asserted-by":"crossref","first-page":"26","DOI":"10.1016\/j.sna.2010.01.007","article-title":"Micromachined rate gyroscope architecture with ultra-high quality factor and improved mode ordering","volume":"165","author":"Trusov","year":"2011","journal-title":"Sens. Actuators A Phys."},{"key":"ref_23","doi-asserted-by":"crossref","first-page":"32","DOI":"10.1016\/j.sna.2012.04.022","article-title":"Vibration-induced errors in MEMS tuning fork gyroscopes","volume":"180","author":"Yoon","year":"2012","journal-title":"Sens. Actuators A Phys."},{"key":"ref_24","first-page":"10","article-title":"Energy dissipation contribution modeling of vibratory behavior for silicon micromachined gyroscope","volume":"2018","author":"Zhou","year":"2018","journal-title":"Shock Vib."}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/18\/8\/2443\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T15:14:46Z","timestamp":1760195686000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/18\/8\/2443"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2018,7,27]]},"references-count":24,"journal-issue":{"issue":"8","published-online":{"date-parts":[[2018,8]]}},"alternative-id":["s18082443"],"URL":"https:\/\/doi.org\/10.3390\/s18082443","relation":{},"ISSN":["1424-8220"],"issn-type":[{"type":"electronic","value":"1424-8220"}],"subject":[],"published":{"date-parts":[[2018,7,27]]}}}