{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,6,6]],"date-time":"2026-06-06T02:24:08Z","timestamp":1780712648435,"version":"3.54.1"},"reference-count":29,"publisher":"MDPI AG","issue":"8","license":[{"start":{"date-parts":[[2018,8,2]],"date-time":"2018-08-02T00:00:00Z","timestamp":1533168000000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>In this paper we present the numerical and experimental results of a design optimization of electromagnetic cantilevers. In particular, a cost-effective technique of evolutionary computing enabling the simultaneous minimization of multiple criteria is applied. A set of optimal solutions are subsequently fabricated and measured. The designed cantilevers are fabricated in arrays, which makes the comparison and measurements of the sensor properties reliable. The microfabrication process, based on the silicon on insulator (SOI) technology, is proposed in order to minimize parasitic phenomena and enable efficient electromagnetic actuation. Measurements on the fabricated prototypes assessed the proposed methodological approach.<\/jats:p>","DOI":"10.3390\/s18082533","type":"journal-article","created":{"date-parts":[[2018,8,3]],"date-time":"2018-08-03T03:03:15Z","timestamp":1533265395000},"page":"2533","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":16,"title":["Optimal Design of Electromagnetically Actuated MEMS Cantilevers"],"prefix":"10.3390","volume":"18","author":[{"given":"Paolo","family":"Di Barba","sequence":"first","affiliation":[{"name":"Department of Electrical, Computer and Biomedical Engineering, University of Pavia, I-27100 Pavia, Italy"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Teodor","family":"Gotszalk","sequence":"additional","affiliation":[{"name":"Faculty of Microsystem, Electronics and Photonics, Wroc\u0142aw University of Science and Technology, PL-50372 Wroc\u0142aw, Poland"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-8553-8341","authenticated-orcid":false,"given":"Wojciech","family":"Majstrzyk","sequence":"additional","affiliation":[{"name":"Faculty of Microsystem, Electronics and Photonics, Wroc\u0142aw University of Science and Technology, PL-50372 Wroc\u0142aw, Poland"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-3300-0296","authenticated-orcid":false,"given":"Maria Evelina","family":"Mognaschi","sequence":"additional","affiliation":[{"name":"Department of Electrical, Computer and Biomedical Engineering, University of Pavia, I-27100 Pavia, Italy"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Karolina","family":"Or\u0142owska","sequence":"additional","affiliation":[{"name":"Faculty of Microsystem, Electronics and Photonics, Wroc\u0142aw University of Science and Technology, PL-50372 Wroc\u0142aw, Poland"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-9622-9341","authenticated-orcid":false,"given":"S\u0142awomir","family":"Wiak","sequence":"additional","affiliation":[{"name":"Institute of Mechatronics and Information Systems, \u0141\u00f3d\u017a University of Technology, PL-90924 \u0141\u00f3d\u017a, Poland"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Andrzej","family":"Sierakowski","sequence":"additional","affiliation":[{"name":"Institute of Electron Technology, PL-02668 Warsaw, Poland"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"1968","published-online":{"date-parts":[[2018,8,2]]},"reference":[{"key":"ref_1","unstructured":"Lang, H.P., Hegner, M., and Gerber, C. 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