{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,7,28]],"date-time":"2026-07-28T12:57:45Z","timestamp":1785243465583,"version":"3.55.0"},"reference-count":30,"publisher":"MDPI AG","issue":"8","license":[{"start":{"date-parts":[[2018,8,6]],"date-time":"2018-08-06T00:00:00Z","timestamp":1533513600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>A tunable Fabry-Perot interferometer (TFPI)-type wavelength filter designed for the long-wavelength infrared (LWIR) region is fabricated using micro electro mechanical systems (MEMS) technology and the novel polydimethylsiloxane (PDMS) micro patterning technique. The structure of the proposed infrared sensor consists of a Fabry-Perot interferometer (FPI)-based optical filter and infrared (IR) detector. An amorphous Si-based thermal IR detector is located under the FPI-based optical filter to detect the IR-rays filtered by the FPI. The filtered IR wavelength is selected according to the air etalon gap between reflectors, which is defined by the thickness of the patterned PDMS. The 8 \u03bcm-thick PDMS pattern is fabricated on a 3 nm-thick Al layer used as a reflector. The air etalon gap is changed using the electromagnetic force between the permanent magnet and solenoid. The measured PDMS gap height is about 2 \u03bcm, ranging from 8 \u03bcm to 6 \u03bcm, with driving current varying from 0 mA to 600 mA, resulting in a tunable wavelength range of 4 \u03bcm. The 3-dB bandwidth (full width at half maximum, FWHM) of the proposed filter is 1.5 nm, while the Free Spectral Range (FSR) is 8 \u03bcm. Experimental results show that the proposed TFPI can detect a specific wavelength at the long LWIR region.<\/jats:p>","DOI":"10.3390\/s18082572","type":"journal-article","created":{"date-parts":[[2018,8,7]],"date-time":"2018-08-07T03:44:18Z","timestamp":1533613458000},"page":"2572","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":7,"title":["Tunable Fabry-Perot Interferometer Designed for Far-Infrared Wavelength by Utilizing Electromagnetic Force"],"prefix":"10.3390","volume":"18","author":[{"given":"Dong Geon","family":"Jung","sequence":"first","affiliation":[{"name":"School of Electronics Engineering, College of IT Engineering, Kyungpook National University, Daegu 41566, Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Jun Yeop","family":"Lee","sequence":"additional","affiliation":[{"name":"School of Electronics Engineering, College of IT Engineering, Kyungpook National University, Daegu 41566, Korea"},{"name":"Aircraft System Technology Group, Korea Institute of Industrial Technology (KITECH), Daegu 42994, Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Jae Keon","family":"Kim","sequence":"additional","affiliation":[{"name":"Aircraft System Technology Group, Korea Institute of Industrial Technology (KITECH), Daegu 42994, Korea"},{"name":"Department of Sensor and Display Engineering, Kyungpook National University, Daegu 41566, Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Daewoong","family":"Jung","sequence":"additional","affiliation":[{"name":"Aircraft System Technology Group, Korea Institute of Industrial Technology (KITECH), Daegu 42994, Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Seong Ho","family":"Kong","sequence":"additional","affiliation":[{"name":"School of Electronics Engineering, College of IT Engineering, Kyungpook National University, Daegu 41566, Korea"},{"name":"Department of Sensor and Display Engineering, Kyungpook National University, Daegu 41566, Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"1968","published-online":{"date-parts":[[2018,8,6]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"136","DOI":"10.1016\/j.infrared.2010.12.003","article-title":"Recent progress in infrared detector technology","volume":"54","author":"Rogalski","year":"2011","journal-title":"Infrared Phys. Technol."},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"264","DOI":"10.1109\/TIM.2004.834050","article-title":"Spectral Performance of a Micromachined Infrared Spectrum Analyzerin Silicon","volume":"54","author":"Kong","year":"2005","journal-title":"IEEE Trans. Instrum. Meas."},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"892","DOI":"10.1016\/j.snb.2011.11.058","article-title":"Fully quantitative characterization of CMOS\u2013MEMS polysilicon\/titanium thermopile infrared sensors","volume":"161","author":"Chen","year":"2012","journal-title":"Sens. Actuators B Chem."},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"916482","DOI":"10.1155\/2012\/916482","article-title":"Plasmonic Band-Pass Microfilters for LWIR Absorption Spectroscopy","volume":"2012","author":"Banks","year":"2012","journal-title":"Int. J. Opt."},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"393","DOI":"10.1016\/j.snb.2013.06.106","article-title":"Surface stress sensor using MEMS-based Fabry\u2013Perot interferometer for label-free biosensing","volume":"188","author":"Takahashi","year":"2013","journal-title":"Sens. Actuators B Chem."},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"264","DOI":"10.1002\/ecj.10433","article-title":"Infrared absorption sensor for multiple gas sensing. Development of a Fabry-Perot spectrometer with ultrawide wavelength range","volume":"96","author":"Enomoto","year":"2013","journal-title":"Electron. Commun. Jpn."},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"1522","DOI":"10.1109\/68.887731","article-title":"A new and simple concept of tunable two-chip microcavities for filter applications in WDM systems","volume":"12","author":"Aziz","year":"2000","journal-title":"IEEE Photon. Technol. Lett."},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"298","DOI":"10.1016\/j.sna.2011.12.021","article-title":"Fabrication and characterization of a thermal tunable bulk-micromachined optical filter","volume":"188","author":"Li","year":"2012","journal-title":"Sens. Actuators A Phys."},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"815","DOI":"10.1109\/JMEMS.2002.803278","article-title":"Tunable optical filter of porous silicon as key component for a MEMS spectrometer","volume":"11","author":"Lammel","year":"2002","journal-title":"J. Microelectromech. Syst."},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"888","DOI":"10.1109\/LED.2005.859651","article-title":"Monolithic integration of an infrared photon detector with a MEMS-based tunable filter","volume":"26","author":"Musca","year":"2005","journal-title":"IEEE Electron Device Lett."},{"key":"ref_11","doi-asserted-by":"crossref","unstructured":"Lee, C.L., Liu, K.W., Luo, H.H., Wu, M.S., and Ma, C.T. (2017). A hot-polymer fiber fabry-perot interferometer anemometer for sensing airflow. Sensors, 17.","DOI":"10.3390\/s17092015"},{"key":"ref_12","doi-asserted-by":"crossref","unstructured":"Chen, Z., Xiong, S., Gao, S., Zhang, H., Wan, L., Huang, X., Huang, B., Feng, Y., Liu, W., and Li, Z. (2018). High-temperature sensor based on fabry-perot interferometer in microfiber tip. Sensors, 18.","DOI":"10.3390\/s18010202"},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"39","DOI":"10.1016\/j.sna.2004.01.047","article-title":"A surface micromachining process for the development of a medium-infrared tuneable Fabry\u2013Perot interferometer","volume":"113","author":"Calaza","year":"2004","journal-title":"Sens. Actuators A Phys."},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"116","DOI":"10.1016\/j.sna.2007.10.080","article-title":"A hybid-assembled MEMS Fabry-perot wavelength tunable filter","volume":"145\u2013146","author":"Yamanoi","year":"2008","journal-title":"Sens. Actuators A Phys."},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"3071","DOI":"10.3390\/s7123071","article-title":"Three cavity tunable MEMS fary perot interferometer","volume":"7","author":"Parashar","year":"2007","journal-title":"Sensors"},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"610","DOI":"10.1109\/JMEMS.2010.2043641","article-title":"Multifunctional tunable optical filter using MEMS spatial light modulator","volume":"19","author":"Jeong","year":"2010","journal-title":"J. Microelectromech. Syst."},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"394","DOI":"10.1109\/68.661421","article-title":"Widely tunable fabry\u2013perot filter using Ga(Al)As\u2013AlO deformable mirrors","volume":"10","author":"Tayebati","year":"2002","journal-title":"IEEE Photonics Technol. Lett."},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"181","DOI":"10.1109\/JMEMS.2011.2174413","article-title":"Fabrication and analysis of a MEMS NIR Fabry-Perot Interferometer","volume":"21","author":"Russin","year":"2012","journal-title":"J. Microelectromech. Syst."},{"key":"ref_19","doi-asserted-by":"crossref","first-page":"5742","DOI":"10.1364\/OE.15.005742","article-title":"Longwave infrared (LWIR) coded aperture dispersive spectrometer","volume":"15","author":"Fernandez","year":"2007","journal-title":"Opt. Express"},{"key":"ref_20","doi-asserted-by":"crossref","first-page":"06FP09","DOI":"10.7567\/JJAP.54.06FP09","article-title":"A fabry-perot interferometer-based long-wavelength infrared spectrometer utilizing an novel PDMS patterning technique","volume":"54","author":"Jung","year":"2015","journal-title":"Jpn. J. Appl. Phys."},{"key":"ref_21","doi-asserted-by":"crossref","first-page":"2250","DOI":"10.1109\/TNS.2011.2157833","article-title":"Verification of High Dose Rate 192 Ir Source Position During Brachytherapy Treatment Using Silicon Pixel Detectors","volume":"58","author":"Batic","year":"2011","journal-title":"IEEE Trans. Nucl. Sci."},{"key":"ref_22","doi-asserted-by":"crossref","first-page":"410","DOI":"10.1016\/j.snb.2009.01.013","article-title":"Design of CO, CO2 and CH4 gas sensors based on correlation spectroscopy using a Fabry\u2013Perot interferometer","volume":"137","author":"Rutt","year":"2009","journal-title":"Sens. Actuators B Chem."},{"key":"ref_23","doi-asserted-by":"crossref","first-page":"549","DOI":"10.1117\/12.608698","article-title":"Design of infrared wavelength-selective microbolometers using planar multimode detectors","volume":"5836","author":"Han","year":"2005","journal-title":"Proc. SPIE"},{"key":"ref_24","doi-asserted-by":"crossref","first-page":"021107","DOI":"10.1063\/1.2757123","article-title":"Germanium near infrared detector in silicon on insulator","volume":"91","author":"Colace","year":"2007","journal-title":"Appl. Phys. Lett."},{"key":"ref_25","doi-asserted-by":"crossref","first-page":"113508","DOI":"10.1063\/1.3638459","article-title":"Amorphous HgCdTe infrared photoconductive detector with high detectivity above 200 K","volume":"99","author":"Wang","year":"2011","journal-title":"Appl. Phys. Lett."},{"key":"ref_26","doi-asserted-by":"crossref","first-page":"06GL12","DOI":"10.7567\/JJAP.52.06GL12","article-title":"Infrared detector array with an incident-ray concentrator","volume":"52","author":"Choi","year":"2013","journal-title":"Jpn. J. Appl. Phys."},{"key":"ref_27","doi-asserted-by":"crossref","first-page":"27","DOI":"10.1016\/j.scitotenv.2013.10.105","article-title":"Dispersive infrared spectroscopy measurements of atmospheric CO2 using a Fabry\u2013P\u00e9rot interferometer sensor","volume":"472","author":"Chan","year":"2014","journal-title":"Sci. Total Environ."},{"key":"ref_28","doi-asserted-by":"crossref","first-page":"6943","DOI":"10.1143\/JJAP.47.6943","article-title":"Micro-Electro-Mechanical-Systems-based infrared spectrometer composed of multi-slit grating and bolometer array","volume":"47","author":"Yang","year":"2008","journal-title":"Jpn. J. Appl. Phys."},{"key":"ref_29","doi-asserted-by":"crossref","first-page":"115028","DOI":"10.1088\/0960-1317\/22\/11\/115028","article-title":"Design and fabrication of PMMA-micromachined fluid lens based on electromagnetic actuation on PMMA\u2013PDMS bonded membrane","volume":"22","author":"Lee","year":"2012","journal-title":"J. Micromech. Microeng."},{"key":"ref_30","doi-asserted-by":"crossref","first-page":"047002","DOI":"10.1088\/0960-1317\/19\/4\/047002","article-title":"Patterning PDMS using acombination ofwetand dry etching","volume":"19","author":"Balakrisnan","year":"2009","journal-title":"J. Micromech. Microeng."}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/18\/8\/2572\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T15:16:51Z","timestamp":1760195811000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/18\/8\/2572"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2018,8,6]]},"references-count":30,"journal-issue":{"issue":"8","published-online":{"date-parts":[[2018,8]]}},"alternative-id":["s18082572"],"URL":"https:\/\/doi.org\/10.3390\/s18082572","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2018,8,6]]}}}