{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,11,26]],"date-time":"2025-11-26T16:29:22Z","timestamp":1764174562326,"version":"build-2065373602"},"reference-count":33,"publisher":"MDPI AG","issue":"9","license":[{"start":{"date-parts":[[2018,9,1]],"date-time":"2018-09-01T00:00:00Z","timestamp":1535760000000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["51675157,51705123"],"award-info":[{"award-number":["51675157,51705123"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100003995","name":"Anhui Provincial Natural Science Foundation","doi-asserted-by":"publisher","award":["1708085QE105"],"award-info":[{"award-number":["1708085QE105"]}],"id":[{"id":"10.13039\/501100003995","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>Low-frequency vibration is a harmful factor that affects the accuracy of micro\/nano-measuring machines. Low-frequency vibration cannot be completely eliminated by passive control methods, such as the use of air-floating platforms. Therefore, low-frequency vibrations must be measured before being actively suppressed. In this study, the design of a low-cost high-sensitivity optical accelerometer is proposed. This optical accelerometer mainly comprises three components: a seismic mass, a leaf spring, and a sensing component based on a four-quadrant photodetector (QPD). When a vibration is detected, the seismic mass moves up and down due to the effect of inertia, and the leaf spring exhibits a corresponding elastic deformation, which is amplified by using an optical lever and measured by the QPD. Then, the acceleration can be calculated. The resonant frequencies and elastic coefficients of various seismic structures are simulated to attain the optimal detection of low-frequency, low-amplitude vibration. The accelerometer is calibrated using a homemade vibration calibration system, and the calibration experimental results demonstrate that the sensitivity of the optical accelerometer is 1.74 V (m\u00b7s\u22122)\u22121, the measurement range of the accelerometer is 0.003\u20137.29 m\u00b7s\u22122, and the operating frequencies range of 0.4\u201312 Hz. The standard deviation from ten measurements is under 7.9 \u00d7 10\u22124 m\u00b7s\u22122. The efficacy of the optical accelerometer in measuring low-frequency, low-amplitude dynamic responses is verified.<\/jats:p>","DOI":"10.3390\/s18092910","type":"journal-article","created":{"date-parts":[[2018,9,3]],"date-time":"2018-09-03T10:50:51Z","timestamp":1535971851000},"page":"2910","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":34,"title":["Development of a High-Sensitivity Optical Accelerometer for Low-Frequency Vibration Measurement"],"prefix":"10.3390","volume":"18","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-3743-6567","authenticated-orcid":false,"given":"Rui-Jun","family":"Li","sequence":"first","affiliation":[{"name":"School of Instrument Science and Opto\u2013Electronics Engineering, Hefei University of Technology, Hefei 230009, China"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-9482-9976","authenticated-orcid":false,"given":"Ying-Jun","family":"Lei","sequence":"additional","affiliation":[{"name":"School of Instrument Science and Opto\u2013Electronics Engineering, Hefei University of Technology, Hefei 230009, China"}]},{"given":"Zhen-Xin","family":"Chang","sequence":"additional","affiliation":[{"name":"School of Instrument Science and Opto\u2013Electronics Engineering, Hefei University of Technology, Hefei 230009, China"}]},{"given":"Lian-Sheng","family":"Zhang","sequence":"additional","affiliation":[{"name":"School of Instrument Science and Opto\u2013Electronics Engineering, Hefei University of Technology, Hefei 230009, China"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-1320-9412","authenticated-orcid":false,"given":"Kuang-Chao","family":"Fan","sequence":"additional","affiliation":[{"name":"School of Instrument Science and Opto\u2013Electronics Engineering, Hefei University of Technology, Hefei 230009, China"},{"name":"School of Mechanical Engineering, Dalian University of Technology, Dalian 116024, China"}]}],"member":"1968","published-online":{"date-parts":[[2018,9,1]]},"reference":[{"key":"ref_1","first-page":"1251","article-title":"Microtremor measurements: A tool for site effect estimation","volume":"3","author":"Bard","year":"1999","journal-title":"Eff. Surf. Geol. Seism. Motion"},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"250","DOI":"10.1785\/BSSA0890010250","article-title":"Microtremor measurements used to map thickness of soft sediments","volume":"89","author":"Seht","year":"1999","journal-title":"Bull. Seismol. Soc. Am."},{"key":"ref_3","doi-asserted-by":"crossref","unstructured":"Tian, B., Liu, H., Yang, N., Zhao, Y., and Jiang, Z. (2016). Design of a Piezoelectric Accelerometer with High Sensitivity and Low Transverse Effect. Sensors, 16.","DOI":"10.3390\/s16101587"},{"key":"ref_4","unstructured":"Zou, Q., Tan, W., Kim, E.S., and Loeb, G.E. (2004, January 25\u201329). Highly symmetric tri-axis piezoelectric bimorph accelerometer. Proceedings of the IEEE International Conference on MICRO Electro Mechanical Systems, Maastricht, The Netherlands."},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"1438","DOI":"10.1109\/JMEMS.2013.2262581","article-title":"Micromachined Piezoelectric Accelerometers via Epitaxial Silicon Cantilevers and Bulk Silicon Proof Masses","volume":"22","author":"Kim","year":"2013","journal-title":"J. Microelectromech. Syst."},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"554","DOI":"10.1063\/1.1134256","article-title":"High sensitivity piezoelectric accelerometer","volume":"46","author":"Tims","year":"1975","journal-title":"Rev. Sci. Instrum."},{"key":"ref_7","doi-asserted-by":"crossref","unstructured":"Kamentser, B. (1994). New Generation of Strain Gauge Accelerometers. SAE Tech. Paper.","DOI":"10.4271\/942151"},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"141","DOI":"10.1016\/j.sna.2011.11.017","article-title":"A 3-axis accelerometer and strain sensor system for building integrity monitoring","volume":"188","author":"Santana","year":"2012","journal-title":"Sens. Actuators A Phys."},{"key":"ref_9","doi-asserted-by":"crossref","unstructured":"Liu, F., Dai, Y., Karanja, J.M., and Yang, M. (2017). A Low Frequency FBG Accelerometer with Symmetrical Bended Spring Plates. Sensors, 17.","DOI":"10.3390\/s17010206"},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"6782","DOI":"10.1364\/AO.52.006782","article-title":"Low-cost vibration sensor based on dual fiber Bragg gratings and light intensity measurement","volume":"52","author":"Gao","year":"2013","journal-title":"Appl. Opt."},{"key":"ref_11","first-page":"25","article-title":"Flextensional fiber Bragg grating-based accelerometer for low frequency vibration measurement","volume":"9","author":"Zhang","year":"2011","journal-title":"Chin. Opt. Lett."},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"190","DOI":"10.1016\/j.yofte.2014.01.006","article-title":"Low-frequency fiber Bragg grating accelerometer based on a double-semicircle cantilever","volume":"20","author":"Zhang","year":"2014","journal-title":"Opt. Fiber Technol."},{"key":"ref_13","first-page":"90","article-title":"Fiber Bragg Grating Accelerometer Based on L-Shaped Rigid Beam and Elastic Diaphragm for Low-Frequency Vibration Measurement","volume":"35","author":"Zeng","year":"2015","journal-title":"Chin. Opt. Lett."},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"6401","DOI":"10.1364\/AO.52.006401","article-title":"Very sensitive fiber Bragg grating accelerometer using transverse forces with an easy over-range protection and low cross axial sensitivity","volume":"52","author":"Li","year":"2013","journal-title":"Appl. Opt."},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"16563","DOI":"10.3390\/s140916563","article-title":"Feasibility of Frequency-Modulated Wireless Transmission for a Multi-Purpose MEMS-Based Accelerometer","volume":"14","author":"Sabato","year":"2014","journal-title":"Sensors"},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"2942","DOI":"10.1109\/JSEN.2016.2522940","article-title":"A Novel Wireless Accelerometer Board for Measuring Low-Frequency and Low-Amplitude Structural Vibration","volume":"16","author":"Sabato","year":"2016","journal-title":"IEEE Sens. J."},{"key":"ref_17","doi-asserted-by":"crossref","unstructured":"Zhu, L., Fu, Y., Chow, R., Spencer, B.F., Park, J.W., and Mechitov, K. (2018). Development of a High-Sensitivity Wireless Accelerometer for Structural Health Monitoring. Sensors, 18.","DOI":"10.3390\/s18010262"},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"183","DOI":"10.12989\/sss.2010.6.3.183","article-title":"Structural monitoring of wind turbines using wireless sensor networks","volume":"6","author":"Swartz","year":"2010","journal-title":"Smart Struct. Syst."},{"key":"ref_19","first-page":"267","article-title":"Smart wireless sensor technology for structural health monitoring of civil structures","volume":"8","author":"Cho","year":"2008","journal-title":"Int. J. Steel Struct."},{"key":"ref_20","doi-asserted-by":"crossref","first-page":"849","DOI":"10.1177\/1045389X08098768","article-title":"Design of a robust, high-rate wireless sensor network for static and dynamic structural monitoring","volume":"20","author":"Whelan","year":"2009","journal-title":"J. Intell. Mater. Syst. Struct."},{"key":"ref_21","doi-asserted-by":"crossref","unstructured":"Boller, C., Chang, F.K., and Fujino, Y. (2009). Microelectromechanical systems (MEMS). Encyclopedia of Structural Health Monitoring, Wiley.","DOI":"10.1002\/9780470061626"},{"key":"ref_22","doi-asserted-by":"crossref","first-page":"693234","DOI":"10.1117\/12.776695","article-title":"Structural health monitoring sensor development for the Imote2 platform","volume":"6932","author":"Rice","year":"2008","journal-title":"Proc. SPIE"},{"key":"ref_23","doi-asserted-by":"crossref","unstructured":"Kohler, M.D., Hao, S., Mishra, N., Govindan, R., and Nigbor, R. (2015). ShakeNet: A Portable Wireless Sensor Network for Instrumenting Large Civil Structures, United States Geological Survey. Technical Report 2015-1134.","DOI":"10.3133\/ofr20151134"},{"key":"ref_24","doi-asserted-by":"crossref","unstructured":"Kohler, M.D., Heaton, T.H., and Cheng, M.-H. (2013, January 19). The Community Seismic Network and Quake-Catcher Network: Enabling Structural Health Monitoring through Instrumentation by Community Participants. Proceedings of the SPIE International Society for Optical Engineering, Bellingham, WA, USA.","DOI":"10.1117\/12.2010306"},{"key":"ref_25","doi-asserted-by":"crossref","first-page":"2498","DOI":"10.1088\/0957-0233\/16\/12\/014","article-title":"Development of an optical accelerometer with a DVD pick-up head","volume":"16","author":"Chu","year":"2005","journal-title":"Meas. Sci. Technol."},{"key":"ref_26","doi-asserted-by":"crossref","first-page":"817","DOI":"10.1088\/0957-0233\/19\/8\/084012","article-title":"Development of an optical accelerometer for low-frequency vibration using the voice coil on a DVD pickup head","volume":"19","author":"Liu","year":"2008","journal-title":"Meas. Sci. Technol."},{"key":"ref_27","doi-asserted-by":"crossref","first-page":"265","DOI":"10.1088\/0957-0233\/18\/1\/033","article-title":"Two-dimensional optical accelerometer based on commercial DVD pick-up head","volume":"18","author":"Chu","year":"2007","journal-title":"Meas. Sci. Technol."},{"key":"ref_28","doi-asserted-by":"crossref","first-page":"105001","DOI":"10.1063\/1.4931692","article-title":"Theory and experiment research for ultra-low frequency maglev vibration sensor","volume":"86","author":"Zheng","year":"2015","journal-title":"Rev. Sci. Instrum."},{"key":"ref_29","doi-asserted-by":"crossref","first-page":"4556","DOI":"10.1109\/JSEN.2013.2270554","article-title":"All-metal optical fiber accelerometer with low transverse sensitivity for seismic monitoring","volume":"13","author":"Jiang","year":"2013","journal-title":"IEEE Sens. J."},{"key":"ref_30","doi-asserted-by":"crossref","first-page":"15303","DOI":"10.1088\/0957-0233\/22\/1\/015303","article-title":"A high-resolution fiber optic accelerometer based on intracavity phase-generated carrier (PGC) modulation","volume":"22","author":"Lin","year":"2011","journal-title":"Meas. Sci. Technol."},{"key":"ref_31","doi-asserted-by":"crossref","first-page":"034008","DOI":"10.1088\/1361-6501\/aa9f6d","article-title":"High-precision and low-cost vibration generator for low-frequency calibration system","volume":"29","author":"Li","year":"2018","journal-title":"Meas. Sci. Technol."},{"key":"ref_32","doi-asserted-by":"crossref","unstructured":"Wang, H., Liu, Y., Li, W., and Feng, Z. (November, January 29). Design of ultrastable and high resolution eddy-current displacement sensor system. Proceedings of the IECON 2014\u201440th Annual Conference of the IEEE Industrial Electronics Society, Dallas, TX, USA.","DOI":"10.1109\/IECON.2014.7048828"},{"key":"ref_33","doi-asserted-by":"crossref","first-page":"362","DOI":"10.1016\/j.sna.2013.09.016","article-title":"Ultrastable and highly sensitive eddy current displacement sensor using self-temperature compensation","volume":"203","author":"Wang","year":"2013","journal-title":"Sens. Actuators A Phys."}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/18\/9\/2910\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T15:18:22Z","timestamp":1760195902000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/18\/9\/2910"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2018,9,1]]},"references-count":33,"journal-issue":{"issue":"9","published-online":{"date-parts":[[2018,9]]}},"alternative-id":["s18092910"],"URL":"https:\/\/doi.org\/10.3390\/s18092910","relation":{},"ISSN":["1424-8220"],"issn-type":[{"type":"electronic","value":"1424-8220"}],"subject":[],"published":{"date-parts":[[2018,9,1]]}}}