{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,5,14]],"date-time":"2026-05-14T03:59:42Z","timestamp":1778731182970,"version":"3.51.4"},"reference-count":49,"publisher":"MDPI AG","issue":"11","license":[{"start":{"date-parts":[[2018,11,11]],"date-time":"2018-11-11T00:00:00Z","timestamp":1541894400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"name":"National  Natural Science Foundation of China","award":["51675210"],"award-info":[{"award-number":["51675210"]}]},{"name":"National  Natural Science Foundation of China","award":["51675209"],"award-info":[{"award-number":["51675209"]}]},{"name":"China  Postdoctoral  Science  Foundation","award":["2016M602283"],"award-info":[{"award-number":["2016M602283"]}]},{"name":"China  Postdoctoral  Science  Foundation","award":["2017M612448"],"award-info":[{"award-number":["2017M612448"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>Three-dimensional (3D) measurement of microstructures has become increasingly important, and many microscopic measurement methods have been developed. For the dimension in several millimeters together with the accuracy at sub-pixel or sub-micron level, there is almost no effective measurement method now. Here we present a method combining the microscopic stereo measurement with the digital speckle projection. A microscopy experimental setup mainly composed of two telecentric cameras and an industrial projection module is established and a telecentric binocular stereo reconstruction procedure is carried out. The measurement accuracy has firstly been verified by performing 3D measurements of grid arrays at different locations and cylinder arrays with different height differences. Then two Mitutoyo step masters have been used for further verification. The experimental results show that the proposed method can obtain 3D information of the microstructure with a sub-pixel and even sub-micron measuring accuracy in millimeter scale.<\/jats:p>","DOI":"10.3390\/s18113882","type":"journal-article","created":{"date-parts":[[2018,11,14]],"date-time":"2018-11-14T10:58:22Z","timestamp":1542193102000},"page":"3882","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":12,"title":["Microscopic Three-Dimensional Measurement Based on Telecentric Stereo and Speckle Projection Methods"],"prefix":"10.3390","volume":"18","author":[{"given":"Kepeng","family":"Chen","sequence":"first","affiliation":[{"name":"State Key Laboratory of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan 430074, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Tielin","family":"Shi","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan 430074, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Qiang","family":"Liu","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan 430074, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Zirong","family":"Tang","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan 430074, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Guanglan","family":"Liao","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan 430074, China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2018,11,11]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"706","DOI":"10.1088\/0957-0233\/10\/8\/305","article-title":"Measurement of mechanical properties for MEMS materials","volume":"10","author":"Yi","year":"1999","journal-title":"Meas. 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