{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,3,23]],"date-time":"2026-03-23T11:34:02Z","timestamp":1774265642815,"version":"3.50.1"},"reference-count":21,"publisher":"MDPI AG","issue":"11","license":[{"start":{"date-parts":[[2018,11,12]],"date-time":"2018-11-12T00:00:00Z","timestamp":1541980800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>We report the electrical characteristics and pH responses of a Si-nanonet ion-sensitive field-effect transistor with ultra-thin parylene-H as a gate sensing membrane. The fabricated device shows excellent DC characteristics: a low subthreshold swing of 85 mV\/dec, a high current on\/off ratio of ~107 and a low gate leakage current of ~10\u221210 A. The low interface trap density of 1.04 \u00d7 1012 cm\u22122 and high field-effect mobility of 510 cm2V\u22121s\u22121 were obtained. The pH responses of the devices were evaluated in various pH buffer solutions. A high pH sensitivity of 48.1 \u00b1 0.5 mV\/pH with a device-to-device variation of ~6.1% was achieved. From the low-frequency noise characterization, the signal-to-noise ratio was extracted as high as ~3400 A\/A with the lowest noise equivalent pH value of ~0.002 pH. These excellent intrinsic electrical and pH sensing performances suggest that parylene-H can be promising as a sensing membrane in an ISFET-based biosensor platform.<\/jats:p>","DOI":"10.3390\/s18113892","type":"journal-article","created":{"date-parts":[[2018,11,14]],"date-time":"2018-11-14T10:58:22Z","timestamp":1542193102000},"page":"3892","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":11,"title":["Electrical Characteristics and pH Response of a Parylene-H Sensing Membrane in a Si-Nanonet Ion-Sensitive Field-Effect Transistor"],"prefix":"10.3390","volume":"18","author":[{"given":"Bo","family":"Jin","sequence":"first","affiliation":[{"name":"Department of Electrical Engineering, Pohang University of Science and Technology, Pohang 37673, Korea"}]},{"given":"Ga-Yeon","family":"Lee","sequence":"additional","affiliation":[{"name":"Department of Materials Science and Engineering, Yonsei University, Seoul 03722, Korea"}]},{"given":"ChanOh","family":"Park","sequence":"additional","affiliation":[{"name":"Division of IT Convergence Engineering, Pohang University of Science and Technology, Pohang 37673, Korea"}]},{"given":"Donghoon","family":"Kim","sequence":"additional","affiliation":[{"name":"Department of Electrical Engineering, Pohang University of Science and Technology, Pohang 37673, Korea"}]},{"given":"Wonyeong","family":"Choi","sequence":"additional","affiliation":[{"name":"Department of Electrical Engineering, Pohang University of Science and Technology, Pohang 37673, Korea"}]},{"given":"Jae-Woo","family":"Yoo","sequence":"additional","affiliation":[{"name":"IM Healthcare Co. Ltd., Yongin 26354, Korea"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-9954-6860","authenticated-orcid":false,"given":"Jae-Chul","family":"Pyun","sequence":"additional","affiliation":[{"name":"Department of Materials Science and Engineering, Yonsei University, Seoul 03722, Korea"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-5473-2002","authenticated-orcid":false,"given":"Jeong-Soo","family":"Lee","sequence":"additional","affiliation":[{"name":"Department of Electrical Engineering, Pohang University of Science and Technology, Pohang 37673, Korea"}]}],"member":"1968","published-online":{"date-parts":[[2018,11,12]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"24","DOI":"10.1016\/j.trac.2012.12.012","article-title":"Advances in point-of-care technologies with biosensors based on carbon nanotubes","volume":"45","author":"Justino","year":"2013","journal-title":"TrAC Trends Anal. Chem."},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"1154","DOI":"10.1002\/adma.201304912","article-title":"25th Anniversary Article: Label-Free Electrical Biodetection Using Carbon Nanostructures","volume":"26","author":"Balasubramanian","year":"2014","journal-title":"Adv. Mater."},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"84","DOI":"10.1021\/acsomega.6b00014","article-title":"On the Use of Scalable NanoISFET Arrays of Silicon with Highly Reproducible Sensor Performance for Biosensor Applications","volume":"1","author":"Rani","year":"2016","journal-title":"ACS Omega"},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"1059","DOI":"10.1109\/LED.2013.2265391","article-title":"Improved Electrical Characteristics of Honeycomb Nanowire ISFETs","volume":"34","author":"Rim","year":"2013","journal-title":"IEEE Electron Device Lett."},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"345501","DOI":"10.1088\/0957-4484\/25\/34\/345501","article-title":"Suspended honeycomb nanowire ISFETs for improved stiction-free performance","volume":"25","author":"Kim","year":"2014","journal-title":"Nanotechnology"},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"7185","DOI":"10.1038\/s41598-017-07699-3","article-title":"Magnesium Oxide (MgO) pH-sensitive Sensing Membrane in Electrolyte-Insulator-Semiconductor Structures with CF4 Plasma Treatment","volume":"7","author":"Kao","year":"2017","journal-title":"Sci. Rep."},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"2405","DOI":"10.1038\/s41598-017-02692-2","article-title":"Influence of NH3 plasma and Ti doping on pH-sensitive CeO2 electrolyte-insulator-semiconductor biosensors","volume":"7","author":"Kao","year":"2017","journal-title":"Sci. Rep."},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1016\/j.snb.2013.05.077","article-title":"The dual role of Parylene C in chemical sensing: Acting as an encapsulant and as a sensing membrane for pH monitoring applications","volume":"186","author":"Trantidou","year":"2013","journal-title":"Sens. Actuators B"},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"56","DOI":"10.1016\/j.bios.2011.08.026","article-title":"One step immobilization of peptides and proteins by using modified parylene with formyl groups","volume":"30","author":"Ko","year":"2011","journal-title":"Biosens. Bioelectron."},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"242","DOI":"10.1007\/s13206-011-5308-8","article-title":"Fluorescence immunoassay of anti-cyclic citrulinated peptide (CCP) autoantibodies by using parylene-H film","volume":"5","author":"Ko","year":"2011","journal-title":"BioChip J."},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"89","DOI":"10.1016\/j.snb.2010.01.035","article-title":"Application of a functionalized parylene film as a linker layer of SPR biosensor","volume":"154","author":"Jeon","year":"2011","journal-title":"Sens. Actuators B"},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"44","DOI":"10.1016\/j.jim.2009.11.015","article-title":"Parylene-A coated microplate for covalent immobilization of proteins and peptides","volume":"353","author":"Jeon","year":"2010","journal-title":"J. Immunol. Methods"},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"232","DOI":"10.1109\/16.981212","article-title":"A study of soft and hard breakdown\u2014Part I: Analysis of statistical percolation conductance","volume":"49","author":"Alam","year":"2002","journal-title":"IEEE Trans. Electron Devices"},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"064103","DOI":"10.1063\/1.4752022","article-title":"Effect of film thickness on structural, morphology, dielectric and electrical properties of parylene C films","volume":"112","author":"Kahouli","year":"2012","journal-title":"Br. J. Appl. Phys."},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"104001","DOI":"10.7567\/JJAP.57.104001","article-title":"Impact of geometrical parameters on the electrical performance of network-channel polycrystalline silicon thin-film transistors","volume":"57","author":"Junyoung","year":"2018","journal-title":"Jpn. J. Appl. Phys."},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"1313","DOI":"10.1002\/pssa.201431862","article-title":"Handheld readout system for field-effect transistor biosensor arrays for label-free detection of biomolecules","volume":"212","author":"Nguyen","year":"2015","journal-title":"Phys. Status Solidi A"},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"1662","DOI":"10.1021\/ac503374j","article-title":"Complementary Metal Oxide Semiconductor Compatible Silicon Nanowires-on-a-Chip: Fabrication and Preclinical Validation for the Detection of a Cancer Prognostic Protein Marker in Serum","volume":"87","author":"Tran","year":"2015","journal-title":"Anal. Chem."},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"4562","DOI":"10.3390\/s110504562","article-title":"Optimization of Urea-EnFET Based on Ta2O5 Layer with Post Annealing","volume":"11","author":"Lue","year":"2011","journal-title":"Sensors"},{"key":"ref_19","doi-asserted-by":"crossref","first-page":"11629","DOI":"10.3390\/s140711629","article-title":"Parylene C-Based Flexible Electronics for pH Monitoring Applications","volume":"14","author":"Trantidou","year":"2014","journal-title":"Sensors"},{"key":"ref_20","doi-asserted-by":"crossref","unstructured":"Haartman, M.V., and Ostling, M. (2007). Low-Frequency Noise in Advanced MOS Devices, Springer.","DOI":"10.1007\/978-1-4020-5910-0"},{"key":"ref_21","doi-asserted-by":"crossref","first-page":"5012","DOI":"10.1039\/c1an15568g","article-title":"Silicon nanowire ion sensitive field-effect transistor with integrated Ag\/AgCl electrode: pH sensing and noise characteristics","volume":"136","author":"Kim","year":"2011","journal-title":"Analyst"}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/18\/11\/3892\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T15:29:12Z","timestamp":1760196552000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/18\/11\/3892"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2018,11,12]]},"references-count":21,"journal-issue":{"issue":"11","published-online":{"date-parts":[[2018,11]]}},"alternative-id":["s18113892"],"URL":"https:\/\/doi.org\/10.3390\/s18113892","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2018,11,12]]}}}