{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,1,18]],"date-time":"2026-01-18T23:35:56Z","timestamp":1768779356626,"version":"3.49.0"},"reference-count":37,"publisher":"MDPI AG","issue":"1","license":[{"start":{"date-parts":[[2018,12,20]],"date-time":"2018-12-20T00:00:00Z","timestamp":1545264000000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100004663","name":"Ministry of Science and Technology, Taiwan","doi-asserted-by":"publisher","award":["MOST 106-2628-E-006-010-MY3 and 107-2218-E-194-002"],"award-info":[{"award-number":["MOST 106-2628-E-006-010-MY3 and 107-2218-E-194-002"]}],"id":[{"id":"10.13039\/501100004663","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>This paper proposes a system utilizing a Renishaw XL80 positioning error measuring interferometer and sensitivity analysis design to measure six-degree-of-freedom (6 DOF) geometric errors of a machine tool\u2019s linear guide. Each error is characterized by high independence with significantly reduced crosstalk, and error calculations are extremely fast and accurate. Initially, the real light path was simulated using Zemax. Then, Matlab\u2019s skew ray tracing method was used to perform mathematical modeling and ray matching. Each error\u2019s sensitivity to the sensor was then analyzed, and curve fitting was used to simplify and speed up the mathematical model computations. Finally, Solidworks was used to design the set of system modules, bringing the proposed system closer to a product. This system measured actual 6 DOF geometric errors of a machine tool\u2019s linear guide, and a comparison is made with the Renishaw XL-80 interferometer measurements. The resulting pitch, yaw, horizontal straightness, and vertical straightness error deviation ranges are \u00b10.5 arcsec, \u00b13.6 arcsec, \u00b12.1 \u03bcm, and \u00b12.3 \u03bcm, respectively. The maximum repeatability deviations for the measured guide\u2019s pitch, yaw, roll, horizontal straightness, vertical straightness, and positioning errors are 0.4 arcsec, 0.2 arcsec, 4.2 arcsec, 1.5 \u03bcm, 0.3 \u03bcm, and 3 \u03bcm, respectively.<\/jats:p>","DOI":"10.3390\/s19010005","type":"journal-article","created":{"date-parts":[[2018,12,20]],"date-time":"2018-12-20T12:54:36Z","timestamp":1545310476000},"page":"5","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":27,"title":["Design of a Measurement System for Six-Degree-of-Freedom Geometric Errors of a Linear Guide of a Machine Tool"],"prefix":"10.3390","volume":"19","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-3537-5828","authenticated-orcid":false,"given":"Chien-Sheng","family":"Liu","sequence":"first","affiliation":[{"name":"Department of Mechanical Engineering, National Cheng Kung University, Tainan City 70101, Taiwan"},{"name":"Department of Mechanical Engineering, National Chung Cheng University, Chiayi County 62102, Taiwan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jia-Jun","family":"Lai","sequence":"additional","affiliation":[{"name":"Department of Mechanical Engineering, National Chung Cheng University, Chiayi County 62102, Taiwan"},{"name":"Advanced Institute of Manufacturing with High-tech Innovations, National Chung Cheng University, Chiayi County 62102, Taiwan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yong-Tai","family":"Luo","sequence":"additional","affiliation":[{"name":"Department of Mechanical Engineering, National Chung Cheng University, Chiayi County 62102, Taiwan"},{"name":"Advanced Institute of Manufacturing with High-tech Innovations, National Chung Cheng University, Chiayi County 62102, Taiwan"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2018,12,20]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"1509","DOI":"10.1007\/s12541-012-0199-8","article-title":"Uncertainty investigation of grating interferometry in six degree-of-freedom motion error measurements","volume":"13","author":"Lee","year":"2012","journal-title":"Int. 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