{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,5,20]],"date-time":"2026-05-20T15:27:15Z","timestamp":1779290835437,"version":"3.51.4"},"reference-count":28,"publisher":"MDPI AG","issue":"1","license":[{"start":{"date-parts":[[2018,12,25]],"date-time":"2018-12-25T00:00:00Z","timestamp":1545696000000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["61601342"],"award-info":[{"award-number":["61601342"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["51772030"],"award-info":[{"award-number":["51772030"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"name":"Natural Science Basic Research Plan in Shaanxi Province of China","award":["2016ZDJC-07"],"award-info":[{"award-number":["2016ZDJC-07"]}]},{"name":"Shaanxi Postdoctoral Science Foundation funded project","award":["2017BSHYDZZ36"],"award-info":[{"award-number":["2017BSHYDZZ36"]}]},{"DOI":"10.13039\/501100012166","name":"National Key Research and Development Program of China","doi-asserted-by":"publisher","award":["2016YFB0100204"],"award-info":[{"award-number":["2016YFB0100204"]}],"id":[{"id":"10.13039\/501100012166","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>When flight vehicles (e.g., aerospace vehicles, Low Earth Orbit (LEO) satellites, near-space aircrafts, Unmanned Aerial Vehicles (UAVs) and drones) fly at high speed, their surfaces suffer the micro-pressure from high-altitude thin air. The long-term effect of this pressure causes the surface components of flight vehicle to deform or fall off, which can lead to a serious accident. To solve this problem, this paper proposes a sensitivity-compensated micro-pressure flexible sensor based on hyper-elastic plastic material and plate parallel capacitance. The sensor is able to measure a range of 0\u20136 kPa micro-pressure suffered by the flight vehicle\u2019s surface with high sensitivity and flexible devices. In this paper, we propose the principle, structure design and fabrication of the sensitivity-compensated micro-pressure flexible sensor. We carried out experiments to obtain the static characteristic curve between micro-pressure and the output capacitance of the sensor devices, and investigated the relationship between sensitivity and geometric parameters. We also compared the performance of the flexible sensor before and after sensitivity compensation. The result shows that the sensor can measure a range of 0\u20132 kPa and 2\u20136 kPa with a sensitivity of 0.27 kPa\u22121 and 0.021 kPa\u22121, which are 80% and 141.38% higher than the sensor before compensation; a linearity of 1.39% and 2.88%, which are 51.7% and 13.1% higher than the sensor before compensation; and a hysteresis and repeatability of 4.95% and 2.38%, respectively. The sensor has potential applications in flight vehicles to measure the micro-pressure with high sensitivity and flexibility.<\/jats:p>","DOI":"10.3390\/s19010072","type":"journal-article","created":{"date-parts":[[2018,12,26]],"date-time":"2018-12-26T04:29:54Z","timestamp":1545798594000},"page":"72","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":29,"title":["Sensitivity-Compensated Micro-Pressure Flexible Sensor for Aerospace Vehicle"],"prefix":"10.3390","volume":"19","author":[{"ORCID":"https:\/\/orcid.org\/0000-0003-3545-3280","authenticated-orcid":false,"given":"Xiaozhou","family":"L\u00fc","sequence":"first","affiliation":[{"name":"The School of Aerospace Science and Technology, Xidian University, Xi\u2019an 710071, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jianan","family":"Jiang","sequence":"additional","affiliation":[{"name":"The School of Aerospace Science and Technology, Xidian University, Xi\u2019an 710071, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Hui","family":"Wang","sequence":"additional","affiliation":[{"name":"The School of Aerospace Science and Technology, Xidian University, Xi\u2019an 710071, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Qiaobo","family":"Gao","sequence":"additional","affiliation":[{"name":"The School of Aerospace Science and Technology, Xidian University, Xi\u2019an 710071, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Shaobo","family":"Zhao","sequence":"additional","affiliation":[{"name":"The School of Aerospace Science and Technology, Xidian University, Xi\u2019an 710071, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Ning","family":"Li","sequence":"additional","affiliation":[{"name":"The School of Aerospace Science and Technology, Xidian University, Xi\u2019an 710071, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jiayi","family":"Yang","sequence":"additional","affiliation":[{"name":"The School of Aerospace Science and Technology, Xidian University, Xi\u2019an 710071, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Songlin","family":"Wang","sequence":"additional","affiliation":[{"name":"The School of Aerospace Science and Technology, Xidian University, Xi\u2019an 710071, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Weimin","family":"Bao","sequence":"additional","affiliation":[{"name":"The School of Aerospace Science and Technology, Xidian University, Xi\u2019an 710071, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Renjie","family":"Chen","sequence":"additional","affiliation":[{"name":"Beijing Key Laboratory of Environmental Science and Engineering, School of Chemical Engineering and the Environment, Beijing Institute of Technology, Beijing 100081, China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2018,12,25]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"055104","DOI":"10.1088\/1361-6501\/aa61b5","article-title":"A photodiode based miniature sun sensor","volume":"28","author":"Tao","year":"2017","journal-title":"Meas. Sci. Technol."},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"2077","DOI":"10.1016\/S0005-1098(01)00163-7","article-title":"Space Vehicle Dynamics and Control","volume":"37","author":"Mcclamroch","year":"2001","journal-title":"Automatica"},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"5816","DOI":"10.1175\/JCLI3937.1","article-title":"A New Globally Complete Monthly Historical Gridded Mean Sea Level Pressure Dataset (HadSLP2):1850\u20132004","volume":"19","author":"Allan","year":"2006","journal-title":"J. Clim."},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"58","DOI":"10.1063\/1.2807587","article-title":"Fluid Dynamics for Physicists","volume":"49","author":"Faber","year":"1996","journal-title":"Phys. Today"},{"key":"ref_5","unstructured":"Lin, L., and Yun, W. (1998, January 28). MEMS pressure sensors for aerospace applications. Proceedings of the 1998 IEEE Aerospace Conference, Aspen, CO, USA."},{"key":"ref_6","doi-asserted-by":"crossref","unstructured":"Cui, J.L., Zhang, B.Z., Duan, J.P., Guo, H., and Tang, J. (2016). Flexible Pressure Sensor with Ag Wrinkled Electrodes Based on PDMS Substrate. Sensors, 16.","DOI":"10.3390\/s16122131"},{"key":"ref_7","doi-asserted-by":"crossref","unstructured":"He, Y., Ming, Y., Li, W., Li, Y.F., Wu, M.Q., Song, J.Z., Li, X.J., and Liu, H. (2016). Highly Stable and Flexible Pressure Sensors with Modified Multi-Walled Carbon Nanotube\/Polymer Composites for Human Monitoring. Sensors, 18.","DOI":"10.3390\/s18051338"},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"9495","DOI":"10.1007\/s10854-017-6693-0","article-title":"Pressure-sensitive carbon black\/graphene nanoplatelets-silicone rubber hybrid conductive composites based on a three-dimensional polydopamine-modified polyurethane sponge","volume":"28","author":"Huang","year":"2017","journal-title":"J. Mater. Sci. Mater. Electron."},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"25463","DOI":"10.3390\/s151025463","article-title":"Piezoresistive Tactile Sensor Discriminating Multidirectional Forces","volume":"15","author":"Jung","year":"2015","journal-title":"Sensors"},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"910","DOI":"10.1109\/TED.2010.2102631","article-title":"A Locally Amplified Strain Sensor Based on a Piezoelectric Polymer and Organic Field-Effect Transistors","volume":"58","author":"Hsu","year":"2011","journal-title":"IEEE Trans. Electron Devices"},{"key":"ref_11","doi-asserted-by":"crossref","unstructured":"Yu, P., Liu, W.T., Gu, C.X., Cheng, X.Y., and Fu, X. (2016). Flexible Piezoelectric Tactile Sensor Array for Dynamic Three-Axis Force Measurement. Sensors, 16.","DOI":"10.3390\/s16060819"},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"2585","DOI":"10.1109\/TED.2018.2827382","article-title":"A Resonant Magnetic Field Sensor with High Quality Factor Based on Quartz Crystal Resonator and Magnetostrictive Stress Coupling","volume":"65","author":"Bian","year":"2018","journal-title":"IEEE Trans. Electron Devices"},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"1614","DOI":"10.1109\/TIM.2008.925336","article-title":"A New Flexible Optical Fiber Goniometer for Dynamic Angular Measurements: Application to Human Joint Movement Monitoring","volume":"57","author":"Donno","year":"2008","journal-title":"IEEE Trans. Instrum. Meas."},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"4655","DOI":"10.1364\/OL.39.004655","article-title":"Prospects for diode-pumped alkali-atom-based hollow-core photonic-crystal fiber lasers","volume":"39","author":"Yoav","year":"2014","journal-title":"Opt. Lett."},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"413","DOI":"10.1080\/02726343.2013.792723","article-title":"Multicore Photonic Crystal Fiber Based 1 \u00d7 8 Two-Dimensional Intensity Splitters\/Couplers","volume":"33","author":"Malka","year":"2013","journal-title":"Electromagnetics"},{"key":"ref_16","doi-asserted-by":"crossref","unstructured":"Malka, D., Cohen, E., and Zalevsky, Z. (2017). Design of 4 \u00d7 1 Power Beam Combiner Based on MultiCore Photonic Crystal Fiber. Appl. Sci., 7.","DOI":"10.3390\/app7070695"},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"648","DOI":"10.1109\/16.47769","article-title":"A balanced dual-diaphragm resonant pressure sensor in silicon","volume":"37","author":"Stemme","year":"1990","journal-title":"IEEE Trans. Electron Devices"},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"3970","DOI":"10.1109\/TIE.2017.2650860","article-title":"Three-Dimensional Interfacial Stress Decoupling Method for Rehabilitation Therapy Robot","volume":"64","author":"Bao","year":"2017","journal-title":"IEEE Trans. Ind. Electron."},{"key":"ref_19","doi-asserted-by":"crossref","first-page":"1968","DOI":"10.1109\/TED.2017.2682099","article-title":"Flexible Capacitive Hydrogel Tactile Sensor with Adjustable Measurement Range Using Liquid Crystal and Carbon Nanotubes Composites","volume":"64","author":"Chen","year":"2017","journal-title":"IEEE Trans. Electron Devices"},{"key":"ref_20","doi-asserted-by":"crossref","unstructured":"Toyama, S., Tanaka, Y., Shirogane, S., Nakamura, T., Umino, T., Uehara, R., Okamoto, T., and Igarashi, H. (2017). Development of Wearable Sheet-Type Shear Force Sensor and Measurement System that is Insusceptible to Temperature and Pressure. Sensors, 17.","DOI":"10.3390\/s17081752"},{"key":"ref_21","doi-asserted-by":"crossref","first-page":"934","DOI":"10.1109\/JMEMS.2008.921727","article-title":"Normal and Shear Force Measurement Using a Flexible Polymer Tactile Sensor With Embedded Multiple Capacitors","volume":"17","author":"Lee","year":"2008","journal-title":"J. Microelectromech. Syst."},{"key":"ref_22","doi-asserted-by":"crossref","first-page":"859","DOI":"10.1038\/nmat2834","article-title":"Highly sensitive flexible pressure sensors with microstructured rubber dielectric layers","volume":"9","author":"Mannsfeld","year":"2010","journal-title":"Nat. Mater."},{"key":"ref_23","doi-asserted-by":"crossref","unstructured":"Riedl, X., Bolzmacher, C., Wagner, R., Bauer, K., and Schwesinger, N. (2010). A novel PDMS based capacitive pressure sensor. IEEE Sens., 2255\u20132258.","DOI":"10.1109\/ICSENS.2010.5690709"},{"key":"ref_24","doi-asserted-by":"crossref","unstructured":"Wang, Y., Xi, K., Liang, G., Mei, M., and Chen, Z. (2014, January 28\u201330). A flexible capacitive tactile sensor array for prosthetic hand real-time contact force measurement. Proceedings of the IEEE International Conference on Information and Automation, Hailar, China.","DOI":"10.1109\/ICInfA.2014.6932786"},{"key":"ref_25","doi-asserted-by":"crossref","first-page":"1510","DOI":"10.1109\/JMEMS.2015.2418095","article-title":"Flexible Capacitive Tactile Sensor Array with Truncated Pyramids as Dielectric Layer for Three-Axis Force Measurement","volume":"24","author":"Liang","year":"2015","journal-title":"J. Microelectromech. Syst."},{"key":"ref_26","first-page":"4899","article-title":"Effect of combination oven and microwave heating in the resin semi-curing process on the physical properties of \u2019compreg\u2019 OPW","volume":"9","author":"Khairunnisha","year":"2014","journal-title":"Bioresources"},{"key":"ref_27","doi-asserted-by":"crossref","first-page":"1982","DOI":"10.1016\/j.mee.2010.12.108","article-title":"Measurement of nonlinear mechanical properties of PDMS elastomer","volume":"88","author":"Kim","year":"2011","journal-title":"Microelectron. Eng."},{"key":"ref_28","unstructured":"Huang, R.C., and Anand, L. (2018, December 24). Non-Linear Mechanical Behavior of the Elastomer Polydimethylsiloxane (PDMS) Used in the Manufacture of Microfluidic Devices. Available online: https:\/\/dspace.mit.edu\/bitstream\/handle\/1721.1\/7456\/IMST017.pdf?sequence=1."}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/19\/1\/72\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T15:36:05Z","timestamp":1760196965000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/19\/1\/72"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2018,12,25]]},"references-count":28,"journal-issue":{"issue":"1","published-online":{"date-parts":[[2019,1]]}},"alternative-id":["s19010072"],"URL":"https:\/\/doi.org\/10.3390\/s19010072","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2018,12,25]]}}}