{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,5,1]],"date-time":"2026-05-01T18:04:45Z","timestamp":1777658685272,"version":"3.51.4"},"reference-count":30,"publisher":"MDPI AG","issue":"1","license":[{"start":{"date-parts":[[2019,1,7]],"date-time":"2019-01-07T00:00:00Z","timestamp":1546819200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["61601455;61335008"],"award-info":[{"award-number":["61601455;61335008"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"name":"Technological Innovation Project of Instrument Function Development, Chinese Academy of Sciences","award":["Y6SH04F002"],"award-info":[{"award-number":["Y6SH04F002"]}]},{"name":"Hi-Tech Research Development Program of China","award":["2015AA042605"],"award-info":[{"award-number":["2015AA042605"]}]},{"name":"Chinese Academy of Sciences-Peking University Pioneer Cooperation Team","award":["XMXX201200019933"],"award-info":[{"award-number":["XMXX201200019933"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>Micro-Pirani vacuum sensors usually operate at hundreds of microwatts, which limits their application in battery-powered sensor systems. This paper reports a diode-based, low power consumption micro-Pirani vacuum sensor that has high sensitivity. Optimizations to the micro-Pirani vacuum sensor were made regarding two aspects. On the one hand, a greater temperature coefficient was obtained without increasing power consumption by taking advantage of series diodes; on the other hand, the sensor structure and geometries were redesigned to enlarge temperature variation. After that, the sensor was fabricated and tested. Test results indicated that the dynamic vacuum pressure range of the sensor was from 10\u22121 to 104 Pa when the forward bias current was as low as 10 \u03bcA with a power consumption of 50 \u03bcW. Average sensitivity was up to 90 \u03bcV\/Pa and the sensitivity of unit power consumption increased to 1.8 V\/W\/Pa. In addition, the sensor could also work at a greater forward bias current for better sensor performance.<\/jats:p>","DOI":"10.3390\/s19010188","type":"journal-article","created":{"date-parts":[[2019,1,9]],"date-time":"2019-01-09T03:06:06Z","timestamp":1547003166000},"page":"188","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":13,"title":["Highly Sensitive Diode-Based Micro-Pirani Vacuum Sensor with Low Power Consumption"],"prefix":"10.3390","volume":"19","author":[{"given":"Debo","family":"Wei","sequence":"first","affiliation":[{"name":"Smart Sensing Research and Development Centre, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China"},{"name":"School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100029, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jianyu","family":"Fu","sequence":"additional","affiliation":[{"name":"Smart Sensing Research and Development Centre, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China"},{"name":"School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100029, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Ruiwen","family":"Liu","sequence":"additional","affiliation":[{"name":"Smart Sensing Research and Development Centre, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Ying","family":"Hou","sequence":"additional","affiliation":[{"name":"Smart Sensing Research and Development Centre, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Chao","family":"Liu","sequence":"additional","affiliation":[{"name":"Smart Sensing Research and Development Centre, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China"},{"name":"School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100029, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Weibing","family":"Wang","sequence":"additional","affiliation":[{"name":"Smart Sensing Research and Development Centre, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China"},{"name":"School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100029, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Dapeng","family":"Chen","sequence":"additional","affiliation":[{"name":"Smart Sensing Research and Development Centre, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China"},{"name":"School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100029, China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2019,1,7]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"1184","DOI":"10.1109\/JMEMS.2011.2162492","article-title":"Modeling and Characterization of MicroPirani Vacuum Gauges Manufactured by a Low-Temperature Film Transfer Process","volume":"20","author":"Schelcher","year":"2011","journal-title":"J. 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