{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,4,23]],"date-time":"2026-04-23T11:00:50Z","timestamp":1776942050208,"version":"3.51.4"},"reference-count":17,"publisher":"MDPI AG","issue":"2","license":[{"start":{"date-parts":[[2019,1,19]],"date-time":"2019-01-19T00:00:00Z","timestamp":1547856000000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100001809","name":"the National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["51622509"],"award-info":[{"award-number":["51622509"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"name":"the Fundamental Research Funds for the Central Universities","award":["3102017jg02007"],"award-info":[{"award-number":["3102017jg02007"]}]},{"name":"the 111 Project","award":["B13044"],"award-info":[{"award-number":["B13044"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>This study describes a novel fiber optic extrinsic Fabry\u2013Perot interferometric (EFPI) ultrasonic sensor comprising a low-cost and high-performance silicon diaphragm. A vibrating diaphragm, 5 \u03bcm thick, was fabricated by using the Microelectromechanical Systems (MEMS) processing technology on a silicon-on-insulator (SOI) wafer. The Fabry\u2013Perot (FP) cavity length was solely determined during the manufacturing process of the diaphragm by defining a specific stepped hole on the handling layer of the SOI wafer, which made the assembly of the sensor easier. In addition, the use of cheap and commercially available components and MEMS processing technology in the development of the sensing system, limited the cost of the sensor. The experimental tests showed that the minimum detectable ultrasonic pressure was 1.5 mPa\/sqrt(Hz) \u22120.625 mPa\/sqrt(Hz) between 20 kHz and 40 kHz. As a result, this sensor has the potential to successfully detect weak ultrasonic signals.<\/jats:p>","DOI":"10.3390\/s19020406","type":"journal-article","created":{"date-parts":[[2019,1,22]],"date-time":"2019-01-22T03:08:22Z","timestamp":1548126502000},"page":"406","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":28,"title":["Low-Cost, High-Performance Fiber Optic Fabry\u2013Perot Sensor for Ultrasonic Wave Detection"],"prefix":"10.3390","volume":"19","author":[{"given":"Haoyong","family":"Li","sequence":"first","affiliation":[{"name":"Key Laboratory of Micro\/Nano Systems for Aerospace (Ministry of Education), Northwestern Polytechnical University, Xi\u2019an 710072, China"},{"name":"Key Laboratory of Micro- and Nano-Electro-Mechanical Systems of Shaanxi Province, Northwestern Polytechnical University, Xi\u2019an 710072, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Delin","family":"Li","sequence":"additional","affiliation":[{"name":"Key Laboratory of Micro\/Nano Systems for Aerospace (Ministry of Education), Northwestern Polytechnical University, Xi\u2019an 710072, China"},{"name":"Key Laboratory of Micro- and Nano-Electro-Mechanical Systems of Shaanxi Province, Northwestern Polytechnical University, Xi\u2019an 710072, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Chaoyu","family":"Xiong","sequence":"additional","affiliation":[{"name":"Key Laboratory of Micro\/Nano Systems for Aerospace (Ministry of Education), Northwestern Polytechnical University, Xi\u2019an 710072, China"},{"name":"Key Laboratory of Micro- and Nano-Electro-Mechanical Systems of Shaanxi Province, Northwestern Polytechnical University, Xi\u2019an 710072, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-8473-1462","authenticated-orcid":false,"given":"Wenrong","family":"Si","sequence":"additional","affiliation":[{"name":"State Grid Shanghai Electric Power Research Institute, Shanghai 200437, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Chenzhao","family":"Fu","sequence":"additional","affiliation":[{"name":"State Grid Shanghai Electric Power Research Institute, Shanghai 200437, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Peng","family":"Yuan","sequence":"additional","affiliation":[{"name":"Xi\u2019an Maorong Power Equipment Co., Ltd., Xi\u2019an 710048, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yiting","family":"Yu","sequence":"additional","affiliation":[{"name":"Key Laboratory of Micro\/Nano Systems for Aerospace (Ministry of Education), Northwestern Polytechnical University, Xi\u2019an 710072, China"},{"name":"Key Laboratory of Micro- and Nano-Electro-Mechanical Systems of Shaanxi Province, Northwestern Polytechnical University, Xi\u2019an 710072, China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2019,1,19]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"5276","DOI":"10.1109\/JLT.2017.2761778","article-title":"High-sensitivity fabry-perot interferometric acoustic sensor for low-frequency acoustic pressure detections","volume":"35","author":"Gong","year":"2017","journal-title":"J. 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Sensors, 17.","DOI":"10.3390\/s17030593"},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"72","DOI":"10.1007\/s13320-010-0017-9","article-title":"Pressure sensor based on the fiber-optic extrinsic Fabry-Perot interferometer","volume":"1","author":"Yu","year":"2011","journal-title":"Photonic Sens."}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/19\/2\/406\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T12:27:25Z","timestamp":1760185645000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/19\/2\/406"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2019,1,19]]},"references-count":17,"journal-issue":{"issue":"2","published-online":{"date-parts":[[2019,1]]}},"alternative-id":["s19020406"],"URL":"https:\/\/doi.org\/10.3390\/s19020406","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2019,1,19]]}}}