{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,1,23]],"date-time":"2026-01-23T07:02:43Z","timestamp":1769151763548,"version":"3.49.0"},"reference-count":30,"publisher":"MDPI AG","issue":"3","license":[{"start":{"date-parts":[[2019,1,22]],"date-time":"2019-01-22T00:00:00Z","timestamp":1548115200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100004955","name":"FFG","doi-asserted-by":"publisher","award":["Comet Programme"],"award-info":[{"award-number":["Comet Programme"]}],"id":[{"id":"10.13039\/501100004955","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>An inkjet- and 3D-printed capacitive sensor system with an all-digital and flexible sensor read-out hardware is reported. It enables spectrometer devices with significantly reduced device outlines and costs. The sensor is developed as multilayer inkjet-printed electrode structure on a 3D-printed copper housing. Very high required position resolutions of     r e  s  p o s   &lt; 50  nm     and a wide measurement range of     r m     = 1000    \u03bc   m at an offset of     d 0     = 1000    \u03bc   m in the considered spectrometers motivate this work. The read-out hardware provides high sampling rates of up to      r s  \u2248 10  ns     and enables the generation of trigger signals, i.e., the mirror control signal, without a time lag. The read-out circuitry is designed as a carrier frequency system, which enables flexible choices of bandwidth and measurement signal frequency. It thus allows for separation in frequency from coupling parasitics, i.e., other frequencies present in the device under test, and makes the read-out quasi-noise-immune.<\/jats:p>","DOI":"10.3390\/s19030443","type":"journal-article","created":{"date-parts":[[2019,1,24]],"date-time":"2019-01-24T03:52:32Z","timestamp":1548301952000},"page":"443","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":10,"title":["Characterization of a Robust 3D- and Inkjet-Printed Capacitive Position Sensor for a Spectrometer Application"],"prefix":"10.3390","volume":"19","author":[{"ORCID":"https:\/\/orcid.org\/0000-0001-8434-1440","authenticated-orcid":false,"given":"Lisa-Marie","family":"Faller","sequence":"first","affiliation":[{"name":"Institute for Smart System Technologies, Sensors and Actuators Department, Alpen-Adria-Universit\u00e4t Klagenfurt, 9020 Klagenfurt, Austria"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Martin","family":"Lenzhofer","sequence":"additional","affiliation":[{"name":"Carinthia Tech Research AG, High Tech Campus, 9524 Villach, Austria"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Christina","family":"Hirschl","sequence":"additional","affiliation":[{"name":"Carinthia Tech Research AG, High Tech Campus, 9524 Villach, Austria"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-1175-0037","authenticated-orcid":false,"given":"Martin","family":"Kraft","sequence":"additional","affiliation":[{"name":"Carinthia Tech Research AG, High Tech Campus, 9524 Villach, Austria"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Hubert","family":"Zangl","sequence":"additional","affiliation":[{"name":"Institute for Smart System Technologies, Sensors and Actuators Department, Alpen-Adria-Universit\u00e4t Klagenfurt, 9020 Klagenfurt, Austria"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2019,1,22]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"618604","DOI":"10.1117\/12.662853","article-title":"A Large Deflection Translatory Actuator for Optical Path Length Modulation","volume":"6186","author":"Drabe","year":"2006","journal-title":"Proc. SPIE"},{"key":"ref_2","doi-asserted-by":"crossref","unstructured":"Kraft, M., Kenda, A., Sandner, T., and Schenk, H. (2008, January 26\u201329). MEMS-based Compact FT-Spectrometers\u2014A Platform for Spectroscopic Mid-Infrared Sensors. Proceedings of the IEEE Sensors, Lecce, Italy.","DOI":"10.1109\/ICSENS.2008.4716400"},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"021006","DOI":"10.1117\/1.2945227","article-title":"Translatory MEMS actuators for optical path length modulation in miniaturized Fourier-transform infrared spectrometers","volume":"7","author":"Sandner","year":"2008","journal-title":"J. Micro\/Nanolithogr. MEMS MOEMS"},{"key":"ref_4","first-page":"731901","article-title":"Improved MOEMS based ultra rapid Fourier transform infrared spectrometer","volume":"7319","author":"Tortschanoff","year":"2009","journal-title":"Proc. SPIE"},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"901","DOI":"10.1007\/s00542-010-1029-5","article-title":"MOEMS translatory actuator characterisation, position encoding and closed-loop control","volume":"16","author":"Lenzhofer","year":"2010","journal-title":"Microsyst. Technol."},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"011115","DOI":"10.1117\/1.JMM.13.1.011115","article-title":"Translatory MOEMS actuator and system integration for miniaturized Fourier transform spectrometers","volume":"13","author":"Sandner","year":"2014","journal-title":"J. Micro\/Nanolithogr. MEMS MOEMS"},{"key":"ref_7","doi-asserted-by":"crossref","unstructured":"Tanahashi, T., Toda, M., Miyashita, H., and Ono, T. (2013, January 16\u201320). Miniature Fourier Transform Infrared Spectrometer for Middle Infrared Wavelength range. Proceedings of the 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), Barcelona, Spain.","DOI":"10.1109\/Transducers.2013.6627316"},{"key":"ref_8","unstructured":"An, Y., Wang, Z., Zhu, T., Dong, K., and Li, X. (2016, January 5\u20137). Development Staturs and Aberration Overview of Micro Spectrometer with Czerny-Turner Structure. Proceedings of the 2016 IEEE Optoelectronics Global Conference (OGC), Shenzhen, China."},{"key":"ref_9","doi-asserted-by":"crossref","unstructured":"Marchetti, S., and Tuccillo, F. (2014, January 29\u201330). Miniaturized Fiber Bragg Grating Spectrometer. Proceedings of the 2014 IEEE Metrology for Aerospace (MetroAeroSpace), Benevento, Italy.","DOI":"10.1109\/MetroAeroSpace.2014.6865977"},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"7377","DOI":"10.1109\/TIE.2017.2698417","article-title":"Features of Capacitive Displacement Sensing That Provide High-Accuracy Measurements with Reduced Manufacturing Precision","volume":"64","author":"Peng","year":"2017","journal-title":"IEEE Trans. Ind. Electron."},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"913","DOI":"10.1109\/TIE.2009.2013691","article-title":"Applications of Microelectromechanical Systems in Industrial Processes and Services","volume":"56","author":"Dean","year":"2009","journal-title":"IEEE Trans. Ind. Electron."},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"2597","DOI":"10.1109\/TIE.2010.2098362","article-title":"Strong and Weak Electric Field Interfering: Capacitive Icing Detection and Capacitive Energy Harvesting on a 220-kV High-Voltage Overhead Power Line","volume":"58","author":"Moser","year":"2011","journal-title":"IEEE Trans. Ind. Electron."},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"5728","DOI":"10.1109\/TIE.2017.2677308","article-title":"A Wide-Range Capacitive Sensor for Linear and Angular Displacement Measurement","volume":"64","author":"Anandan","year":"2017","journal-title":"IEEE Trans. Ind. Electron."},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"4910","DOI":"10.1109\/TIE.2017.2669887","article-title":"Tracking ToTouch Trajectory on Capacitive Touch Panels Using an Adjustable Weighted Prediction Covariance Matrix","volume":"64","author":"Lin","year":"2017","journal-title":"IEEE Trans. Ind. Electron."},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"4855","DOI":"10.1109\/TIE.2011.2173096","article-title":"Robust Precision Position Detection With an Optical MEMS Hybrid Device","volume":"59","author":"Hortschitz","year":"2012","journal-title":"IEEE Trans. Ind. Electron."},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"5","DOI":"10.1109\/MIE.2013.2285240","article-title":"Measuring in the Subnanometer Range","volume":"8","author":"Nihtianov","year":"2014","journal-title":"IEEE Ind. Electron. Mag."},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"9595","DOI":"10.1109\/TIE.2017.2726982","article-title":"Advances in Capacitive, Eddy Current, and Magnetic Displacement Sensors and Corresponding Interfaces","volume":"64","author":"George","year":"2017","journal-title":"IEEE Trans. Ind. Electron."},{"key":"ref_18","doi-asserted-by":"crossref","unstructured":"Faller, L.M., Leitzke, J.P., and Zangl, H. (2017, January 22\u201325). Design of a Fast, High-Resolution Sensor Evaluation Platform applied to a Capacitive Position Sensor for a Micromirror. Proceedings of the 2017 IEEE International Instrumentation and Measurement Technology Conference (I2MTC), Turin, Italy.","DOI":"10.1109\/I2MTC.2017.7969660"},{"key":"ref_19","doi-asserted-by":"crossref","first-page":"559","DOI":"10.1109\/JMEMS.2017.2672039","article-title":"Feasibility Considerations on an IInkjet-Printed Capacitive Postion Sensor for Electrostatically Actuated Resonant MEMS-Mirror Systems","volume":"26","author":"Faller","year":"2017","journal-title":"IEEE J. Microelectromech. Syst."},{"key":"ref_20","doi-asserted-by":"crossref","first-page":"1014","DOI":"10.1109\/TIM.2017.2771955","article-title":"Design and Evaluation of a Fast, High-Resolution Sensor Evaluation Platform applied to MEMS Position Sensing","volume":"67","author":"Faller","year":"2017","journal-title":"IEEE Trans. Instrum. Meas."},{"key":"ref_21","doi-asserted-by":"crossref","unstructured":"Smith, B.C. (2011). Fundamentals of Fourier Transform Infrared Spectroscopy, CRC Press.","DOI":"10.1201\/b10777"},{"key":"ref_22","unstructured":"Vanasse, G.A. (1981). Spectrometric Techniques II, Academic Press."},{"key":"ref_23","doi-asserted-by":"crossref","unstructured":"Griffith, P.R., and de Haseth, J.A. (2007). Fourier Transform Infrared Spectroscopy, John Wiley & Sons.","DOI":"10.1002\/047010631X"},{"key":"ref_24","doi-asserted-by":"crossref","first-page":"965","DOI":"10.1366\/000370202760249684","article-title":"Generalized Implementation of Rapid-Scan Fourier Transform Infrared Spectroscopic Imaging","volume":"56","author":"Huffman","year":"2002","journal-title":"Appl. Spectrosc."},{"key":"ref_25","doi-asserted-by":"crossref","unstructured":"Sandner, T., Grasshoff, T., and Schenk, H. (2010, January 9\u201312). Translatory MEMS Actuator with Extraordinary Large Stroke for Optical Path Length Modulation. Proceedings of the IEEE International Conference on Optical MEMS & Nanophotonics, Sapporo, Japan.","DOI":"10.5162\/irs11\/ip12"},{"key":"ref_26","doi-asserted-by":"crossref","first-page":"715","DOI":"10.1109\/2944.892609","article-title":"Large Deflection Micromechanical Scanning Mirrors for Linear Scans and Pattern Generation","volume":"6","author":"Schenk","year":"2000","journal-title":"IEEE J. Sel. Top. Quantum Electron."},{"key":"ref_27","doi-asserted-by":"crossref","first-page":"211","DOI":"10.1016\/j.matchar.2018.02.009","article-title":"AM Metal Substrates for Inkjet-Printing of Smart Devices","volume":"143","author":"Faller","year":"2018","journal-title":"Meter. Charact."},{"key":"ref_28","doi-asserted-by":"crossref","first-page":"1024611","DOI":"10.1117\/12.2264792","article-title":"Robust Design of an Inkjet-Printed Capacitive Sensor for Position Tracking of a MOEMS-Mirror in a Michelson Interferometer Setup","volume":"10246","author":"Faller","year":"2017","journal-title":"Proc. SPIE"},{"key":"ref_29","doi-asserted-by":"crossref","first-page":"2697","DOI":"10.1109\/TIE.2010.2076310","article-title":"Electrical Noise in MEMS Capacitive Elements Resulting From EnEnvironment Mechanical Vibrations in Harsh Environments","volume":"58","author":"Dean","year":"2011","journal-title":"IEEE Trans. Ind. Electron."},{"key":"ref_30","doi-asserted-by":"crossref","first-page":"1261","DOI":"10.1109\/TIM.2003.816812","article-title":"Design Rules for Robust Capacitive Sensors","volume":"52","author":"Brasseur","year":"2003","journal-title":"IEEE Trans. Instrum. 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