{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,2,19]],"date-time":"2026-02-19T04:56:24Z","timestamp":1771476984063,"version":"3.50.1"},"reference-count":40,"publisher":"MDPI AG","issue":"3","license":[{"start":{"date-parts":[[2019,2,6]],"date-time":"2019-02-06T00:00:00Z","timestamp":1549411200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["61874033"],"award-info":[{"award-number":["61874033"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"name":"Science Foundation of Shanghai Municipal Government","award":["18ZR1402600"],"award-info":[{"award-number":["18ZR1402600"]}]},{"name":"State Key Lab of ASIC and System, Fudan University","award":["2018MS003"],"award-info":[{"award-number":["2018MS003"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>Recently, humidity sensors have been investigated extensively due to their broad applications in chip fabrication, health care, agriculture, amongst others. We propose a capacitive humidity sensor with a shielding electrode under the interdigitated electrode (SIDE) based on polyimide (PI). Thanks to the shielding electrode, this humidity sensor combines the high sensitivity of parallel plate capacitive sensors and the fast response of interdigitated electrode capacitive sensors. We use COMSOL Multiphysics to design and optimize the SIDE structure. The experimental data show very good agreement with the simulation. The sensitivity of the SIDE sensor is 0.0063% \u00b1 0.0002% RH. Its response\/recovery time is 20 s\/22 s. The maximum capacitance drift under different relative humidity is 1.28% RH.<\/jats:p>","DOI":"10.3390\/s19030659","type":"journal-article","created":{"date-parts":[[2019,2,6]],"date-time":"2019-02-06T11:51:12Z","timestamp":1549453872000},"page":"659","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":30,"title":["Humidity Sensors with Shielding Electrode Under Interdigitated Electrode"],"prefix":"10.3390","volume":"19","author":[{"given":"Hong","family":"Liu","sequence":"first","affiliation":[{"name":"ASIC and System State Key Lab, Department of Microelectronics, Fudan University, Shanghai 200433, China"}]},{"given":"Qi","family":"Wang","sequence":"additional","affiliation":[{"name":"ASIC and System State Key Lab, Department of Microelectronics, Fudan University, Shanghai 200433, China"}]},{"given":"Wenjie","family":"Sheng","sequence":"additional","affiliation":[{"name":"ASIC and System State Key Lab, Department of Microelectronics, Fudan University, Shanghai 200433, China"}]},{"given":"Xubo","family":"Wang","sequence":"additional","affiliation":[{"name":"ASIC and System State Key Lab, Department of Microelectronics, Fudan University, Shanghai 200433, China"}]},{"given":"Kaidi","family":"Zhang","sequence":"additional","affiliation":[{"name":"ASIC and System State Key Lab, Department of Microelectronics, Fudan University, Shanghai 200433, China"}]},{"given":"Lin","family":"Du","sequence":"additional","affiliation":[{"name":"ASIC and System State Key Lab, Department of Microelectronics, Fudan University, Shanghai 200433, China"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-9098-5661","authenticated-orcid":false,"given":"Jia","family":"Zhou","sequence":"additional","affiliation":[{"name":"ASIC and System State Key Lab, Department of Microelectronics, Fudan University, Shanghai 200433, China"}]}],"member":"1968","published-online":{"date-parts":[[2019,2,6]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"211","DOI":"10.1016\/S0925-4005(03)00090-X","article-title":"Fast response humidity sensors for a medical microsystem","volume":"91","author":"Pellet","year":"2003","journal-title":"Sensors Actuators B Chem."},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"274","DOI":"10.1166\/sl.2005.045","article-title":"Humidity Sensors: A Review of Materials and Mechanisms","volume":"3","author":"Chen","year":"2005","journal-title":"Sens. Lett."},{"key":"ref_3","first-page":"15","article-title":"Capacitive Humidity Sensor Tag Smart Refrigerator System using the Capacitive to Voltage Converter (CVC)","volume":"36","author":"Lee","year":"2011","journal-title":"Int. J. Adv. Sci. Technol."},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"3986","DOI":"10.3390\/s140303986","article-title":"Toward a new generation of photonic humidity sensors","volume":"14","author":"Kolpakov","year":"2014","journal-title":"Sensors"},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"7881","DOI":"10.3390\/s140507881","article-title":"Humidity sensors principle, mechanism, and fabrication technologies: A comprehensive review","volume":"14","author":"Farahani","year":"2014","journal-title":"Sensors"},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"553","DOI":"10.1016\/j.bios.2014.09.039","article-title":"Printed and flexible biosensor for antioxidants using interdigitated ink-jetted electrodes and gravure-deposited active layer","volume":"67","author":"Pavinatto","year":"2015","journal-title":"Biosens. Bioelectron."},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1166\/sl.2005.001","article-title":"Humidity Sensors: A Review","volume":"3","author":"Lee","year":"2005","journal-title":"Sens. Lett."},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"196","DOI":"10.1016\/S0924-4247(01)00788-9","article-title":"Recent achievements in miniaturised humidity sensors\u2014A review of transduction techniques","volume":"96","author":"Rittersma","year":"2002","journal-title":"Sensors Actuators A Phys."},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"710","DOI":"10.1038\/nature06207","article-title":"Attribution of observed surface humidity changes to human influence","volume":"449","author":"Willett","year":"2007","journal-title":"Nature"},{"key":"ref_10","doi-asserted-by":"crossref","unstructured":"Imam, S.A., Choudhary, A., and Sachan, V.K. (2015, January 8\u201310). Design issues for wireless sensor networks and smart humidity sensors for precision agriculture: A review. Proceedings of the 2015 International Conference on Soft Computing Techniques and Implementations (ICSCTI), Faridabad, India.","DOI":"10.1109\/ICSCTI.2015.7489591"},{"key":"ref_11","first-page":"525","article-title":"Weather Monitoring Using Wireless Sensor Networks based on IOT","volume":"4","author":"Chandana","year":"2018","journal-title":"Int. J. Sci. Res. Sci. Technol."},{"key":"ref_12","first-page":"155","article-title":"A Wireless Sensor Network for Weather and Disaster Alarm Systems","volume":"6","author":"Yawut","year":"2011","journal-title":"Int. Conf. Inf. Electron. Eng."},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"479","DOI":"10.1046\/j.1365-2486.2003.00629.x","article-title":"Assessing the eddy covariance technique for evaluating carbon dioxide exchange rates of ecosystems: Past, present and future","volume":"9","author":"Baldocchi","year":"2003","journal-title":"Glob. Chang. Biol."},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"309","DOI":"10.1109\/7361.983470","article-title":"Micromachined Water Vapor Sensors: A Review of Sensing Technologies","volume":"1","author":"Fenner","year":"2001","journal-title":"IEEE Sens. J."},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"416","DOI":"10.1016\/j.snb.2016.01.015","article-title":"Recent trends of ceramic humidity sensors development: A review","volume":"228","author":"Blank","year":"2016","journal-title":"Sensors Actuators B Chem."},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"197","DOI":"10.1109\/84.925735","article-title":"A high-sensitivity polyimide capacitive relative humidity sensor for monitoring anodically bonded hermetic micropackages","volume":"10","author":"Dokmeci","year":"2001","journal-title":"J. Microelectromech. Syst."},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"491","DOI":"10.1016\/j.snb.2003.12.060","article-title":"A novel capacitive-type humidity sensor using CMOS fabrication technology","volume":"99","author":"Gu","year":"2004","journal-title":"Sensors Actuators B Chem."},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"3135","DOI":"10.3390\/s110303135","article-title":"A high temperature capacitive humidity sensor based on mesoporous silica","volume":"11","author":"Wagner","year":"2011","journal-title":"Sensors"},{"key":"ref_19","doi-asserted-by":"crossref","first-page":"2","DOI":"10.1016\/j.snb.2009.11.054","article-title":"Nano-grass polyimide-based humidity sensors","volume":"154","author":"Lee","year":"2011","journal-title":"Sensors Actuators B Chem."},{"key":"ref_20","doi-asserted-by":"crossref","first-page":"240","DOI":"10.1016\/S0925-4005(98)00134-8","article-title":"Humidity sensors using polyvinyl alcohol mixed with electrolytes","volume":"49","author":"Yang","year":"1998","journal-title":"Sensors Actuators B Chem."},{"key":"ref_21","doi-asserted-by":"crossref","first-page":"441","DOI":"10.1016\/j.snb.2009.07.007","article-title":"Capacitive humidity sensor design based on anodic aluminum oxide","volume":"141","author":"Kim","year":"2009","journal-title":"Sensors Actuators B Chem."},{"key":"ref_22","doi-asserted-by":"crossref","first-page":"225305","DOI":"10.1088\/0022-3727\/45\/22\/225305","article-title":"A novel humidity sensor based on alumina nanowire films","volume":"45","author":"Feng","year":"2012","journal-title":"J. Phys. D Appl. Phys."},{"key":"ref_23","doi-asserted-by":"crossref","first-page":"3522","DOI":"10.1007\/s11664-014-3190-6","article-title":"Effects of partial replacement of iron with tungsten on microstructure, electrical, magnetic and humidity properties of copper-zinc ferrite material","volume":"43","author":"Tudorache","year":"2014","journal-title":"J. Electron. Mater."},{"key":"ref_24","doi-asserted-by":"crossref","first-page":"175","DOI":"10.1016\/j.apsusc.2014.02.138","article-title":"Electrical properties and humidity sensor characteristics of lead hydroxyapatite material","volume":"303","author":"Tudorache","year":"2014","journal-title":"Appl. Surf. Sci."},{"key":"ref_25","doi-asserted-by":"crossref","first-page":"276","DOI":"10.1016\/j.spmi.2014.11.022","article-title":"Humidity sensors applicative characteristics of granularized and porous Bi2O3 thin films prepared by oxygen plasma-assisted pulsed laser deposition","volume":"77","author":"Tudorache","year":"2015","journal-title":"Superlattices Microstruct."},{"key":"ref_26","doi-asserted-by":"crossref","first-page":"272","DOI":"10.1007\/s10854-015-3750-4","article-title":"Humidity sensor characteristics and electrical properties of Ni\u2013Zn\u2013Dy ferrite material prepared using different chelating-fuel agents","volume":"27","author":"Tudorache","year":"2016","journal-title":"J. Mater. Sci. Mater. Electron."},{"key":"ref_27","doi-asserted-by":"crossref","first-page":"1342","DOI":"10.1039\/b205085d","article-title":"O2 plasma treated polyimide-based humidity sensors","volume":"127","author":"Suzuki","year":"2002","journal-title":"Analyst"},{"key":"ref_28","doi-asserted-by":"crossref","first-page":"302","DOI":"10.1016\/j.snb.2009.09.004","article-title":"Design and optimization of an ultra thin flexible capacitive humidity sensor","volume":"143","author":"Zampetti","year":"2009","journal-title":"Sensors Actuators B Chem."},{"key":"ref_29","doi-asserted-by":"crossref","first-page":"2017","DOI":"10.1007\/s00542-010-1139-0","article-title":"High-performance capacitive humidity sensor with novel electrode and polyimide layer based on MEMS technology","volume":"16","author":"Kim","year":"2010","journal-title":"Microsyst. Technol."},{"key":"ref_30","doi-asserted-by":"crossref","unstructured":"Liu, M.Q., Wang, C., and Kim, N.Y. (2017). High-sensitivity and low-hysteresis porous mim-type capacitive humidity sensor using functional polymer mixed with TiO2 microparticles. Sensors, 17.","DOI":"10.3390\/s17020284"},{"key":"ref_31","doi-asserted-by":"crossref","first-page":"211","DOI":"10.1016\/S0925-4005(97)80264-X","article-title":"Comparison of conductometric humidity-sensing polymers","volume":"40","author":"Wang","year":"1997","journal-title":"Sens. Actuators B Chem."},{"key":"ref_32","unstructured":"Fujita, S., and Kamei, Y. (2002, January 1\u20133). Electrical properties of polyimide with water absorption. Proceedings of the 11th IEEE International Symposium on Electrets, Melbourne, VIC, Australia."},{"key":"ref_33","doi-asserted-by":"crossref","first-page":"211","DOI":"10.1016\/S0925-4005(97)00157-3","article-title":"Planar interdigitated electrolyte-conductivity sensors on an insulating substrate covered with Ta2O5","volume":"43","author":"Olthuis","year":"1997","journal-title":"Sensors Actuators B Chem."},{"key":"ref_34","doi-asserted-by":"crossref","first-page":"13931","DOI":"10.1021\/la202546a","article-title":"Nanoparticle-enhanced sensitivity of a nanogap-interdigitated electrode array impedimetric biosensor","volume":"27","author":"Singh","year":"2011","journal-title":"Langmuir"},{"key":"ref_35","doi-asserted-by":"crossref","first-page":"431","DOI":"10.1016\/j.proeng.2011.12.107","article-title":"A numerically efficient method of modeling interdigitated electrodes for capacitive film sensing","volume":"25","author":"Schaur","year":"2011","journal-title":"Procedia Eng."},{"key":"ref_36","doi-asserted-by":"crossref","first-page":"22001","DOI":"10.1088\/1361-6501\/28\/2\/022001","article-title":"Chemicapacitors as a versatile platform for miniature gas and vapor sensors","volume":"28","author":"Blue","year":"2017","journal-title":"Meas. Sci. Technol."},{"key":"ref_37","doi-asserted-by":"crossref","first-page":"704","DOI":"10.1016\/j.snb.2017.11.060","article-title":"High-Performance porous MIM-type capacitive humidity sensor realized via inductive coupled plasma and reactive-Ion etching","volume":"258","author":"Qiang","year":"2018","journal-title":"Sensors Actuators B Chem."},{"key":"ref_38","doi-asserted-by":"crossref","first-page":"1220","DOI":"10.1109\/T-ED.1985.22104","article-title":"A polyimide-based capacitive humidity sensor","volume":"32","author":"Schubert","year":"1985","journal-title":"IEEE Trans. Electron Devices"},{"key":"ref_39","doi-asserted-by":"crossref","first-page":"304","DOI":"10.1016\/S0925-4005(01)00597-4","article-title":"Humidity sensors for a pulmonary function diagnostic microsystem","volume":"76","author":"Laville","year":"2001","journal-title":"Sensors Actuators B Chem."},{"key":"ref_40","doi-asserted-by":"crossref","unstructured":"Kim, J.H., Hong, S.M., Lee, J.S., Moon, B.M., and Kim, K. (2009, January 5\u20138). High sensitivity capacitive humidity sensor with a novel polyimide design fabricated by mems technology. Proceedings of the 4th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems, NEMS 2009, Shenzhen, China.","DOI":"10.1109\/NEMS.2009.5068676"}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/19\/3\/659\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T12:31:16Z","timestamp":1760185876000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/19\/3\/659"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2019,2,6]]},"references-count":40,"journal-issue":{"issue":"3","published-online":{"date-parts":[[2019,2]]}},"alternative-id":["s19030659"],"URL":"https:\/\/doi.org\/10.3390\/s19030659","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2019,2,6]]}}}