{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,12]],"date-time":"2025-10-12T03:32:27Z","timestamp":1760239947431,"version":"build-2065373602"},"reference-count":48,"publisher":"MDPI AG","issue":"4","license":[{"start":{"date-parts":[[2019,2,20]],"date-time":"2019-02-20T00:00:00Z","timestamp":1550620800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"name":"TU Delft-Beijing Research Centre","award":["State Key Lab of Solid state lighting China"],"award-info":[{"award-number":["State Key Lab of Solid state lighting China"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>Capacitors made of interdigitated electrodes (IDEs) as a transducer platform for the sensing of volatile organic compounds (VOCs) have advantages due to their lower power operation and fabrication using standard micro-fabrication techniques. Integrating a micro-electromechanical system (MEMS), such as a microhotplate with IDE capacitor, further allows study of the temperature-dependent sensing response of VOCs. In this paper, the design, fabrication, and characterization of a low-power MEMS microhotplate with IDE capacitor to study the temperature-dependent sensing response to methanol using Zeolitic imidazolate framework (ZIF-8), a class of metal-organic framework (MOF), is presented. A Titanium nitride (TiN) microhotplate with aluminum IDEs suspended on a silicon nitride membrane is fabricated and characterized. The power consumption of the ZIF-8 MOF-coated device at an operating temperature of 50      \u2218    C is 4.5 mW and at 200      \u2218    C it is 26 mW. A calibration methodology for the effects of temperature of the isolation layer between the microhotplate electrodes and the capacitor IDEs is developed. The device coated with ZIF-8 MOF shows a response to methanol in the concentration range of 500 ppm to 7000 ppm. The detection limit of the sensor for methanol vapor at 20      \u2218    C is 100 ppm. In situ study of sensing properties of ZIF-8 MOF to methanol in the temperature range from 20      \u2218    C to 50      \u2218    C using the integrated microhotplate and IDE capacitor is presented. The kinetics of temperature-dependent adsorption and desorption of methanol by ZIF-8 MOF are fitted with double-exponential models. With the increase in temperature from 20      \u2218    C to 50      \u2218    C, the response time for sensing of methanol vapor concentration of 5000 ppm decreases by 28%, whereas the recovery time decreases by 70%.<\/jats:p>","DOI":"10.3390\/s19040888","type":"journal-article","created":{"date-parts":[[2019,2,20]],"date-time":"2019-02-20T11:45:39Z","timestamp":1550663139000},"page":"888","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":15,"title":["A Low-Power MEMS IDE Capacitor with Integrated Microhotplate: Application as Methanol Sensor using a Metal-Organic Framework Coating as Affinity Layer"],"prefix":"10.3390","volume":"19","author":[{"given":"Manjunath R.","family":"Venkatesh","sequence":"first","affiliation":[{"name":"Beijing Research Centre, Delft University of Technology, Mekelweg 4, 2628 CD Delft, The Netherlands"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-5513-4880","authenticated-orcid":false,"given":"Sumit","family":"Sachdeva","sequence":"additional","affiliation":[{"name":"Department of Chemical Engineering, Delft University of Technology, Van der Maasweg 9, 2629 HZ Delft, The Netherlands"}]},{"given":"Brahim","family":"El Mansouri","sequence":"additional","affiliation":[{"name":"Department of Microelectronics, Delft University of Technology, Mekelweg 4, 2628 CD Delft, The Netherlands"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-4638-7146","authenticated-orcid":false,"given":"Jia","family":"Wei","sequence":"additional","affiliation":[{"name":"Department of Microelectronics, Delft University of Technology, Mekelweg 4, 2628 CD Delft, The Netherlands"}]},{"given":"Andre","family":"Bossche","sequence":"additional","affiliation":[{"name":"Department of Microelectronics, Delft University of Technology, Mekelweg 4, 2628 CD Delft, The Netherlands"}]},{"given":"Duco","family":"Bosma","sequence":"additional","affiliation":[{"name":"Department of Chemical Engineering, Delft University of Technology, Van der Maasweg 9, 2629 HZ Delft, The Netherlands"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-7252-4047","authenticated-orcid":false,"given":"Louis C. P. M.","family":"de Smet","sequence":"additional","affiliation":[{"name":"Laboratory of Organic Chemistry, Wageningen University &amp; Research, Stippeneng 4, 6708 WE Wageningen, The Netherlands"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-3296-953X","authenticated-orcid":false,"given":"Ernst J. R.","family":"Sudh\u00f6lter","sequence":"additional","affiliation":[{"name":"Department of Chemical Engineering, Delft University of Technology, Van der Maasweg 9, 2629 HZ Delft, The Netherlands"}]},{"given":"Guo Qi","family":"Zhang","sequence":"additional","affiliation":[{"name":"Beijing Research Centre, Delft University of Technology, Mekelweg 4, 2628 CD Delft, The Netherlands"},{"name":"Department of Microelectronics, Delft University of Technology, Mekelweg 4, 2628 CD Delft, The Netherlands"}]}],"member":"1968","published-online":{"date-parts":[[2019,2,20]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"15119","DOI":"10.1016\/j.ceramint.2016.06.145","article-title":"Detection of hazardous volatile organic compounds (VOCs) by metal oxide nanostructures-based gas sensors: A review","volume":"42","author":"Mirzaei","year":"2016","journal-title":"Ceram. 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