{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,14]],"date-time":"2025-10-14T07:08:28Z","timestamp":1760425708167,"version":"build-2065373602"},"reference-count":27,"publisher":"MDPI AG","issue":"4","license":[{"start":{"date-parts":[[2019,2,21]],"date-time":"2019-02-21T00:00:00Z","timestamp":1550707200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"name":"Nieders\u00e4chsisches Vorab","award":["QUANOMET NP2-2"],"award-info":[{"award-number":["QUANOMET NP2-2"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>In this paper, a self-out-readable, miniaturized cantilever resonator for highly sensitive airborne nanoparticle (NP) detection is presented. The cantilever, which is operated in the fundamental in-plane resonance mode, is used as a microbalance with femtogram resolution. To maximize sensitivity and read-out signal amplitude of the piezo-resistive Wheatstone half bridge, the geometric parameters of the sensor design are optimized by finite element modelling (FEM). The electrical read-out of the cantilever movement is realized by piezo-resistive struts at the sides of the cantilever resonator that enable real-time tracking using a phase-locked loop (PLL) circuit. Cantilevers with minimum resonator mass of 1.72 ng and resonance frequency of ~440 kHz were fabricated, providing a theoretical sensitivity of 7.8 fg\/Hz. In addition, for electrostatic NP collection, the cantilever has a negative-biased electrode located at its free end. Moreover, the counter-electrode surrounding the cantilever and a \u00b5-channel, guiding the particle-laden air flow towards the cantilever, are integrated with the sensor chip. \u00b5-channels and varying sampling voltages will also be used to accomplish particle separation for size-selective NP detection. To sum up, the presented airborne NP sensor is expected to demonstrate significant improvements in the field of handheld, micro-\/nanoelectromechanical systems (M\/NEMS)-based NP monitoring devices.<\/jats:p>","DOI":"10.3390\/s19040901","type":"journal-article","created":{"date-parts":[[2019,2,22]],"date-time":"2019-02-22T03:49:44Z","timestamp":1550807384000},"page":"901","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":11,"title":["Strategy toward Miniaturized, Self-out-Readable Resonant Cantilever and Integrated Electrostatic Microchannel Separator for Highly Sensitive Airborne Nanoparticle Detection"],"prefix":"10.3390","volume":"19","author":[{"ORCID":"https:\/\/orcid.org\/0000-0003-3902-8521","authenticated-orcid":false,"given":"Maik","family":"Bertke","sequence":"first","affiliation":[{"name":"Institute of Semiconductor Technology (IHT), Technische Universit\u00e4t Braunschweig, Hans-Sommer-Str. 66, 38106 Braunschweig, Germany"},{"name":"Laboratory for Emerging Nanometrology (LENA), Technische Universit\u00e4t Braunschweig, Langer Kamp 6a, 38106 Braunschweig, Germany"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-7279-4378","authenticated-orcid":false,"given":"Jiushuai","family":"Xu","sequence":"additional","affiliation":[{"name":"Institute of Semiconductor Technology (IHT), Technische Universit\u00e4t Braunschweig, Hans-Sommer-Str. 66, 38106 Braunschweig, Germany"},{"name":"Laboratory for Emerging Nanometrology (LENA), Technische Universit\u00e4t Braunschweig, Langer Kamp 6a, 38106 Braunschweig, Germany"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-1027-9968","authenticated-orcid":false,"given":"Michael","family":"Fahrbach","sequence":"additional","affiliation":[{"name":"Institute of Semiconductor Technology (IHT), Technische Universit\u00e4t Braunschweig, Hans-Sommer-Str. 66, 38106 Braunschweig, Germany"},{"name":"Laboratory for Emerging Nanometrology (LENA), Technische Universit\u00e4t Braunschweig, Langer Kamp 6a, 38106 Braunschweig, Germany"}]},{"given":"Andi","family":"Setiono","sequence":"additional","affiliation":[{"name":"Institute of Semiconductor Technology (IHT), Technische Universit\u00e4t Braunschweig, Hans-Sommer-Str. 66, 38106 Braunschweig, Germany"},{"name":"Laboratory for Emerging Nanometrology (LENA), Technische Universit\u00e4t Braunschweig, Langer Kamp 6a, 38106 Braunschweig, Germany"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-4522-3625","authenticated-orcid":false,"given":"Hutomo Suryo","family":"Wasisto","sequence":"additional","affiliation":[{"name":"Institute of Semiconductor Technology (IHT), Technische Universit\u00e4t Braunschweig, Hans-Sommer-Str. 66, 38106 Braunschweig, Germany"},{"name":"Laboratory for Emerging Nanometrology (LENA), Technische Universit\u00e4t Braunschweig, Langer Kamp 6a, 38106 Braunschweig, Germany"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-5801-813X","authenticated-orcid":false,"given":"Erwin","family":"Peiner","sequence":"additional","affiliation":[{"name":"Institute of Semiconductor Technology (IHT), Technische Universit\u00e4t Braunschweig, Hans-Sommer-Str. 66, 38106 Braunschweig, Germany"},{"name":"Laboratory for Emerging Nanometrology (LENA), Technische Universit\u00e4t Braunschweig, Langer Kamp 6a, 38106 Braunschweig, Germany"}]}],"member":"1968","published-online":{"date-parts":[[2019,2,21]]},"reference":[{"key":"ref_1","unstructured":"Ramachandran, G. 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