{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,2,8]],"date-time":"2026-02-08T06:29:33Z","timestamp":1770532173759,"version":"3.49.0"},"reference-count":21,"publisher":"MDPI AG","issue":"5","license":[{"start":{"date-parts":[[2019,3,12]],"date-time":"2019-03-12T00:00:00Z","timestamp":1552348800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["11374327"],"award-info":[{"award-number":["11374327"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["11774381"],"award-info":[{"award-number":["11774381"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100015095","name":"institute of acoustics, Chinese academy of sciences","doi-asserted-by":"publisher","award":["QYZDY-SSW-JSC007"],"award-info":[{"award-number":["QYZDY-SSW-JSC007"]}],"id":[{"id":"10.13039\/501100015095","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>In this paper, a microscale high-frequency ultrasonic transducer was prepared by combining traditional planar ultrasonic phased-array technology and micro processing technology. The piezoelectric ceramic material PZT was used as the functional material of the transducer. The number of the arrays was 72, the width of each array was 50 \u03bcm, the pitch of each array was 70 \u03bcm, and the length of each array was 3 mm. The PZT chip was finely ground to a thickness of 130 \u03bcm and could reach a frequency of 10 MHz. The experimental platform of micron-scale precision was set up for a beam-forming lateral sound field test and imaging experiment to validate the theoretical analysis. The echo imaging test showed that a mold with a feature size of about 400 \u03bcm could be imaged well.<\/jats:p>","DOI":"10.3390\/s19051244","type":"journal-article","created":{"date-parts":[[2019,3,13]],"date-time":"2019-03-13T04:07:37Z","timestamp":1552450057000},"page":"1244","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":14,"title":["A Microscale Linear Phased-Array Ultrasonic Transducer Based on PZT Ceramics"],"prefix":"10.3390","volume":"19","author":[{"given":"Xue-Jiao","family":"Jiang","sequence":"first","affiliation":[{"name":"Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, China"},{"name":"School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100190, China"}]},{"given":"Meng-Wei","family":"Liu","sequence":"additional","affiliation":[{"name":"Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, China"}]},{"given":"Fang-Fang","family":"Shi","sequence":"additional","affiliation":[{"name":"Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, China"}]},{"given":"Wen","family":"Wang","sequence":"additional","affiliation":[{"name":"Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, China"}]},{"given":"Xian-Mei","family":"Wu","sequence":"additional","affiliation":[{"name":"Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, China"}]},{"given":"Jia-Yi","family":"Chen","sequence":"additional","affiliation":[{"name":"Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, China"}]}],"member":"1968","published-online":{"date-parts":[[2019,3,12]]},"reference":[{"key":"ref_1","unstructured":"Lu, Y., Tang, H.-Y., Fung, S., Boser, B.E., and Horsley, D.A. 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