{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,12]],"date-time":"2025-10-12T03:36:54Z","timestamp":1760240214793,"version":"build-2065373602"},"reference-count":39,"publisher":"MDPI AG","issue":"7","license":[{"start":{"date-parts":[[2019,4,2]],"date-time":"2019-04-02T00:00:00Z","timestamp":1554163200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>In this work, we present a novel pH sensor using efficient laterally coupled structure enabled by Complementary Metal-Oxide Semiconductor (CMOS) Fin Field-Effect Transistor (FinFET) processes. This new sensor features adjustable sensitivity, wide sensing range, multi-pad sensing capability and compatibility to advanced CMOS technologies. With a self-balanced readout scheme and proposed corresponding circuit, the proposed sensor is found to be easily embedded into integrated circuits (ICs) and expanded into sensors array. To ensure the robustness of this new device, the transient response and noise analysis are performed. In addition, an embedded calibration operation scheme is implemented to prevent the proposed sensing device from the background offset from process variation, providing reliable and stable sensing results.<\/jats:p>","DOI":"10.3390\/s19071585","type":"journal-article","created":{"date-parts":[[2019,4,3]],"date-time":"2019-04-03T03:39:28Z","timestamp":1554262768000},"page":"1585","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":5,"title":["Dynamic pH Sensor with Embedded Calibration Scheme by Advanced CMOS FinFET Technology"],"prefix":"10.3390","volume":"19","author":[{"given":"Chien-Ping","family":"Wang","sequence":"first","affiliation":[{"name":"Institute of Electronics Engineering, National Tsing Hua University, Hsinchu 30013, Taiwan"}]},{"given":"Ying-Chun","family":"Shen","sequence":"additional","affiliation":[{"name":"Institute of Materials Science and Engineering, National Tsing Hua University, Hsinchu 30013, Taiwan"}]},{"given":"Peng-Chun","family":"Liou","sequence":"additional","affiliation":[{"name":"Institute of Electronics Engineering, National Tsing Hua University, Hsinchu 30013, Taiwan"}]},{"given":"Yu-Lun","family":"Chueh","sequence":"additional","affiliation":[{"name":"Institute of Materials Science and Engineering, National Tsing Hua University, Hsinchu 30013, Taiwan"}]},{"given":"Yue-Der","family":"Chih","sequence":"additional","affiliation":[{"name":"Design Technology Division, Taiwan Semiconductor Manufacturing Company, Hsinchu 30075, Taiwan"}]},{"given":"Jonathan","family":"Chang","sequence":"additional","affiliation":[{"name":"Design Technology Division, Taiwan Semiconductor Manufacturing Company, Hsinchu 30075, Taiwan"}]},{"given":"Chrong-Jung","family":"Lin","sequence":"additional","affiliation":[{"name":"Institute of Electronics Engineering, National Tsing Hua University, Hsinchu 30013, Taiwan"}]},{"given":"Ya-Chin","family":"King","sequence":"additional","affiliation":[{"name":"Institute of Electronics Engineering, National Tsing Hua University, Hsinchu 30013, Taiwan"}]}],"member":"1968","published-online":{"date-parts":[[2019,4,2]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"763","DOI":"10.1016\/j.snb.2018.01.091","article-title":"Microstructured Optical Fiber Based Chloride Ion Sensing Method for Concrete Health Monitoring","volume":"260","author":"Ding","year":"2018","journal-title":"Sens. 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