{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,11,5]],"date-time":"2025-11-05T11:14:20Z","timestamp":1762341260184,"version":"build-2065373602"},"reference-count":38,"publisher":"MDPI AG","issue":"9","license":[{"start":{"date-parts":[[2019,5,9]],"date-time":"2019-05-09T00:00:00Z","timestamp":1557360000000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["11504177"],"award-info":[{"award-number":["11504177"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>In this work, a silicon nanopillar array was created with nanosphere lithography. SnO2 film was deposited on this nanostructure by magnetron sputtering to form an SnO2\/silicon nanopillar array sensor. The humidity sensitivity, response time, and recovery time were all measured at room temperature (25 \u00b0C) with UV or without UV irradiation. As a result, the humidity sensitivity properties were improved by enlarging the specific surface area with ordered nanopillars and irradiating with UV light. These results indicate that nanostructure sensors have potential applications in the field of sensors.<\/jats:p>","DOI":"10.3390\/s19092141","type":"journal-article","created":{"date-parts":[[2019,5,9]],"date-time":"2019-05-09T11:22:35Z","timestamp":1557400955000},"page":"2141","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":4,"title":["Enhanced Humidity Sensing Response of SnO2\/Silicon Nanopillar Array by UV Irradiation"],"prefix":"10.3390","volume":"19","author":[{"given":"Wei","family":"Li","sequence":"first","affiliation":[{"name":"College of Electronic and Optical Engineering &amp; College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing 210023, China"},{"name":"School of Physics, Nanjing University, Nanjing 210093, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Linlin","family":"Wang","sequence":"additional","affiliation":[{"name":"College of Electronic and Optical Engineering &amp; College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing 210023, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yun","family":"Cai","sequence":"additional","affiliation":[{"name":"College of Electronic and Optical Engineering &amp; College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing 210023, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Peifeng","family":"Pan","sequence":"additional","affiliation":[{"name":"College of Electronic and Optical Engineering &amp; College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing 210023, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jinze","family":"Li","sequence":"additional","affiliation":[{"name":"College of Electronic and Optical Engineering &amp; College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing 210023, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Qingying","family":"Ren","sequence":"additional","affiliation":[{"name":"College of Electronic and Optical Engineering &amp; College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing 210023, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jie","family":"Xu","sequence":"additional","affiliation":[{"name":"College of Electronic and Optical Engineering &amp; College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing 210023, China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2019,5,9]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"368","DOI":"10.1016\/j.snb.2009.02.027","article-title":"A humidity sensor based on KCl-doped SnO2 nanofibers","volume":"138","author":"Song","year":"2009","journal-title":"Sens. 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