{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,3,24]],"date-time":"2026-03-24T21:25:26Z","timestamp":1774387526487,"version":"3.50.1"},"reference-count":47,"publisher":"MDPI AG","issue":"9","license":[{"start":{"date-parts":[[2019,5,11]],"date-time":"2019-05-11T00:00:00Z","timestamp":1557532800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>Several fabrication techniques are recently used to produce a nanopattern for sensing, as focused ion beam milling (FIB), e-beam lithography (EBL), nanoimprinting, and soft lithography. Here, interference lithography is explored for the fabrication of large area nanohole arrays in metal films as an efficient, flexible, and scalable production method. The transmission spectra in air of the 1 cm2 substrate were evaluated to study the substrate behavior when hole-size, periodicity, and film thickness are varied, in order to elucidate the best sample for the most effective sensing performance. The efficiency of the nanohole array was tested for bulk sensing and compared with other platforms found in the literature. The sensitivity of ~1000 nm\/RIU, achieved with an array periodicity in the visible range, exceeds near infrared (NIR) performances previously reported, and demonstrates that interference lithography is one of the best alternative to other expensive and time-consuming nanofabrication methods.<\/jats:p>","DOI":"10.3390\/s19092182","type":"journal-article","created":{"date-parts":[[2019,5,13]],"date-time":"2019-05-13T05:35:39Z","timestamp":1557725739000},"page":"2182","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":26,"title":["Large Area Nanohole Arrays for Sensing Fabricated by Interference Lithography"],"prefix":"10.3390","volume":"19","author":[{"given":"Chiara","family":"Valsecchi","sequence":"first","affiliation":[{"name":"Engineering Department, Universidade Federal do Pampa, Alegrete 97546-550, RS, Brazil"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Luis Enrique","family":"Gomez Armas","sequence":"additional","affiliation":[{"name":"Engineering Department, Universidade Federal do Pampa, Alegrete 97546-550, RS, Brazil"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-3062-7125","authenticated-orcid":false,"given":"Jacson","family":"Weber de Menezes","sequence":"additional","affiliation":[{"name":"Engineering Department, Universidade Federal do Pampa, Alegrete 97546-550, RS, Brazil"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2019,5,11]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"667","DOI":"10.1038\/35570","article-title":"Extraordinary optical transmission through sub-wavelength hole arrays","volume":"391","author":"Ebbesen","year":"1998","journal-title":"Nature"},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"2104","DOI":"10.1021\/nl061670r","article-title":"Direct evidence for surface plasmon-mediated enhanced light transmission through metallic nanohole arrays","volume":"6","author":"Gao","year":"2006","journal-title":"Nano Lett."},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"5638","DOI":"10.1021\/la400085r","article-title":"Periodic metallic nanostructures as plasmonic chemical sensors","volume":"29","author":"Valsecchi","year":"2013","journal-title":"Langmuir"},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"891","DOI":"10.1364\/AOP.9.000891","article-title":"Sensing with periodic hole arrays","volume":"9","author":"Meunier","year":"2017","journal-title":"Adv. Opt. Photonics"},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"4748","DOI":"10.1039\/C4AN02258K","article-title":"Sensing applications based on plasmonic nanopores: The hole story","volume":"140","author":"Dahlin","year":"2015","journal-title":"Analyst"},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1016\/S0030-4018(01)01558-9","article-title":"Evanescently coupled resonance in surface plasmon enhanced transmission","volume":"200","author":"Krishnan","year":"2001","journal-title":"Opt. Commun."},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"2380","DOI":"10.1109\/JPROC.2016.2624340","article-title":"Optical biosensors based on plasmonic nanostructures: A review","volume":"104","author":"Wrobel","year":"2016","journal-title":"Proc. IEEE"},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"4813","DOI":"10.1021\/la0493621","article-title":"Surface plasmon sensor based on the enhanced light transmission through arrays of nanoholes in gold films","volume":"20","author":"Brolo","year":"2004","journal-title":"Langmuir"},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"1049","DOI":"10.1021\/ar800074d","article-title":"A new generation of sensors based on extraordinary optical transmission","volume":"41","author":"Gordon","year":"2008","journal-title":"Acc. Chem. Res."},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"4094","DOI":"10.1021\/ac070001a","article-title":"On-chip surface based detection with nanohole arrays","volume":"79","author":"Kumar","year":"2007","journal-title":"Anal. Chem."},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"219","DOI":"10.1364\/OE.16.000219","article-title":"Laser-illuminated nanohole arrays for multiplex plasmonic microarray sensing","volume":"16","author":"Lesuffleur","year":"2008","journal-title":"Opt. Express"},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"18119","DOI":"10.1364\/OE.15.018119","article-title":"Tailoring the sensing capabilities of nanohole arrays in gold films with Rayleigh anomaly-surface plasmon polaritons","volume":"15","author":"McMahon","year":"2007","journal-title":"Opt. Express"},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"4316","DOI":"10.1063\/1.1815379","article-title":"Influence of hole size on the extraordinary transmission through subwavelength hole arrays","volume":"85","author":"Segerink","year":"2004","journal-title":"Appl. Phys. Lett."},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"2445","DOI":"10.1039\/c3lc50107h","article-title":"On chip nanohole array based sensing: A review","volume":"13","author":"Escobedo","year":"2013","journal-title":"Lab Chip"},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"436","DOI":"10.1021\/ja807704v","article-title":"Attomolar protein detection using in-hole surface plasmon resonance","volume":"131","author":"Ferreira","year":"2009","journal-title":"J. Am. Chem. Soc."},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"495","DOI":"10.1002\/adma.200600882","article-title":"Nanoimprint lithography: Methods and material requirements","volume":"19","author":"Guo","year":"2007","journal-title":"Adv. Mater."},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"3187","DOI":"10.1021\/ac203160r","article-title":"Electrochemical surface plasmon resonance measurement based on gold nanohole array fabricated by nanoimprinting technique","volume":"84","author":"Nakamoto","year":"2012","journal-title":"Anal. Chem."},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"632","DOI":"10.1016\/j.mee.2008.12.093","article-title":"Gold nanohole arrays for biochemical sensing fabricated by soft UV nanoimprint lithography","volume":"86","author":"Cheng","year":"2009","journal-title":"Microelectron. Eng."},{"key":"ref_19","doi-asserted-by":"crossref","first-page":"5067","DOI":"10.1039\/c1nr10883b","article-title":"Development of a mass-producible on-chip plasmonic nanohole array biosensor","volume":"3","author":"Nakamoto","year":"2011","journal-title":"Nanoscale"},{"key":"ref_20","doi-asserted-by":"crossref","first-page":"13685","DOI":"10.1021\/la9020614","article-title":"Self-assembled plasmonic nanohole arrays","volume":"23","author":"Lee","year":"2009","journal-title":"Langmuir"},{"key":"ref_21","doi-asserted-by":"crossref","first-page":"1714","DOI":"10.1039\/b808820a","article-title":"Analytical and physical optimization of nanohole-array sensors prepared by modified nanosphere lithography","volume":"133","author":"Menegazzo","year":"2008","journal-title":"Analyst"},{"key":"ref_22","doi-asserted-by":"crossref","first-page":"153","DOI":"10.1146\/annurev.matsci.28.1.153","article-title":"Soft lithography","volume":"28","author":"Xia","year":"1998","journal-title":"Annu. Ver. Mater. Sci."},{"key":"ref_23","doi-asserted-by":"crossref","first-page":"549","DOI":"10.1038\/nnano.2007.252","article-title":"Multiscale patterning of plasmonic metamaterials","volume":"2","author":"Henzie","year":"2007","journal-title":"Nat. Nanotechnol."},{"key":"ref_24","doi-asserted-by":"crossref","first-page":"195501","DOI":"10.1088\/0957-4484\/24\/19\/195501","article-title":"Plasmonic nanohole array sensors fabricated by template transfer with improved optical performance","volume":"24","author":"Jiu","year":"2013","journal-title":"Nanotechnology"},{"key":"ref_25","doi-asserted-by":"crossref","first-page":"1704","DOI":"10.1109\/JPROC.2005.853538","article-title":"Optical and Interferometric Lithography Nanotechnology Enablers","volume":"93","author":"Brueck","year":"2005","journal-title":"Proc. IEEE"},{"key":"ref_26","doi-asserted-by":"crossref","first-page":"6502","DOI":"10.1364\/AO.54.006502","article-title":"Improving the performance of gold nanohole array biosensors by controlling the optical collimation conditions","volume":"54","author":"Menezes","year":"2015","journal-title":"Appl. Opt."},{"key":"ref_27","doi-asserted-by":"crossref","first-page":"1521","DOI":"10.1166\/jnn.2014.9199","article-title":"Nanopatterning by laser interference lithography: Applications to optical devices","volume":"14","author":"Seo","year":"2014","journal-title":"J. Nanosci. Nanotechnol."},{"key":"ref_28","doi-asserted-by":"crossref","first-page":"21","DOI":"10.3390\/mi3010021","article-title":"Plasmonic nanostructures prepared by soft UV nanoimprint lithography and their application in biological sensing","volume":"3","author":"Barbillon","year":"2012","journal-title":"Micromachines"},{"key":"ref_29","doi-asserted-by":"crossref","first-page":"3557","DOI":"10.1021\/nl201004c","article-title":"\u03bb3\/1000 plasmonic nanocavities for biosensing fabricated by soft UV nanoimprint lithography","volume":"11","author":"Cattoni","year":"2011","journal-title":"Nano Lett."},{"key":"ref_30","first-page":"236","article-title":"Colloidal lithography\u2014The art of nanochemical patterning","volume":"4","author":"Zhang","year":"2009","journal-title":"Chemistry"},{"key":"ref_31","doi-asserted-by":"crossref","first-page":"1553","DOI":"10.1116\/1.579726","article-title":"Nanosphere lithography: A materials general fabrication process for periodic particle array surfaces","volume":"13","author":"Hulteen","year":"1995","journal-title":"J. Vac. Sci."},{"key":"ref_32","doi-asserted-by":"crossref","first-page":"22351","DOI":"10.1021\/jp0545400","article-title":"Plasmonic properties of film over nanowell surfaces fabricated by nanosphere lithography","volume":"109","author":"Hicks","year":"2005","journal-title":"J. Phys. Chem. B"},{"key":"ref_33","doi-asserted-by":"crossref","first-page":"485302","DOI":"10.1088\/0957-4484\/18\/48\/485302","article-title":"A deep sub-wavelength process for the formation of a highly uniform arrays of nanoholes and nanopillars","volume":"18","author":"Wu","year":"2007","journal-title":"Nanotechnology"},{"key":"ref_34","doi-asserted-by":"crossref","first-page":"351","DOI":"10.1007\/s11671-008-9164-y","article-title":"Fabrication of large area periodic nanostructures using nanosphere lithography","volume":"3","author":"Wu","year":"2008","journal-title":"Nanoscale Res. Lett."},{"key":"ref_35","doi-asserted-by":"crossref","first-page":"171","DOI":"10.1016\/j.matlet.2017.07.134","article-title":"3D nanohole arrays generated by spherical-lens photolithography","volume":"209","author":"Geng","year":"2017","journal-title":"Mater. Lett."},{"key":"ref_36","doi-asserted-by":"crossref","first-page":"8578","DOI":"10.1364\/OE.14.008578","article-title":"Recording different geometries of 2D hexagonal photonic crystals by choosing the phase between two-beam interference exposures","volume":"14","author":"Menezes","year":"2006","journal-title":"Opt. Express"},{"key":"ref_37","doi-asserted-by":"crossref","first-page":"3499","DOI":"10.1364\/AO.49.003499","article-title":"Holographic technique for measurement of the kinetic constant and optical modulation of photosensitive materials","volume":"49","author":"Avila","year":"2010","journal-title":"Appl. Opt."},{"key":"ref_38","doi-asserted-by":"crossref","first-page":"164705","DOI":"10.1063\/1.2360270","article-title":"An analytic model for the optical properties of gold","volume":"125","author":"Etchegoin","year":"2006","journal-title":"J. Chem. Phys."},{"key":"ref_39","doi-asserted-by":"crossref","first-page":"4370","DOI":"10.1103\/PhysRevB.6.4370","article-title":"Optical Constants of the Noble Metals","volume":"6","author":"Johnson","year":"1972","journal-title":"Phys. Rev. B"},{"key":"ref_40","unstructured":"Parida, O.P., and Bhat, N. (November, January 30). Characterization of optical properties of SU-8 and fabrication of optical components. ICOP. Proceedings of the International Conference on Optics and Photonics, Chandigarh, India."},{"key":"ref_41","doi-asserted-by":"crossref","first-page":"22255","DOI":"10.1364\/OE.18.022255","article-title":"Experimental and numerical analysis on the optical resonance transmission properties of nano-hole arrays","volume":"18","author":"Najiminaini","year":"2010","journal-title":"Opt. Express"},{"key":"ref_42","doi-asserted-by":"crossref","first-page":"26","DOI":"10.1109\/JPHOT.2011.2177652","article-title":"Reflection and Transmission Modes in Nanohole-Array-Based Plasmonic Sensors","volume":"4","author":"Wu","year":"2012","journal-title":"IEEE Photonics J."},{"key":"ref_43","doi-asserted-by":"crossref","first-page":"3488","DOI":"10.1364\/OE.15.003488","article-title":"Optimization of surface plasmons launching from subwavelength hole arrays: Modelling and experiments","volume":"15","author":"Laluet","year":"2007","journal-title":"Opt. Express"},{"key":"ref_44","doi-asserted-by":"crossref","first-page":"485105","DOI":"10.1088\/0022-3727\/45\/48\/485105","article-title":"Optical behaviour of thick gold and silver films with periodic circular nanohole arrays","volume":"45","author":"Hajiaboli","year":"2012","journal-title":"J. Phys. D Appl. Phys."},{"key":"ref_45","doi-asserted-by":"crossref","first-page":"2244","DOI":"10.1021\/ac702555r","article-title":"Gold Nanohole Array Substrates as Immunobiosensors","volume":"80","author":"Sharpe","year":"2008","journal-title":"Anal. Chem."},{"key":"ref_46","doi-asserted-by":"crossref","first-page":"021101","DOI":"10.1063\/1.3290633","article-title":"Integrated nanoplasmonic-nanofluidic biosensors with targeted delivery of analytes","volume":"96","author":"Yanik","year":"2010","journal-title":"App. Phys. Lett."},{"key":"ref_47","doi-asserted-by":"crossref","first-page":"560","DOI":"10.1016\/j.bios.2017.03.047","article-title":"Multiplexed nanoplasmonic biosensor for one-step simultaneous detection of Chlamydia trachomatis and Neisseria gonorrhoeae in urine","volume":"94","author":"Soler","year":"2017","journal-title":"Biosens. Bioelectr."}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/19\/9\/2182\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T12:51:03Z","timestamp":1760187063000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/19\/9\/2182"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2019,5,11]]},"references-count":47,"journal-issue":{"issue":"9","published-online":{"date-parts":[[2019,5]]}},"alternative-id":["s19092182"],"URL":"https:\/\/doi.org\/10.3390\/s19092182","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2019,5,11]]}}}