{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,5,13]],"date-time":"2026-05-13T10:14:53Z","timestamp":1778667293250,"version":"3.51.4"},"reference-count":28,"publisher":"MDPI AG","issue":"10","license":[{"start":{"date-parts":[[2019,5,17]],"date-time":"2019-05-17T00:00:00Z","timestamp":1558051200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>Selective UV sensitivity was observed in Metal-Oxide-Semiconductor structures with Si nanoclusters. Si nanocrystals and amorphous Si nanoparticles (a-Si NPs) were obtained by furnace annealing of SiOx films with x = 1.15 for 60 min in N2 at 1000 and 700 \u00b0C, respectively. XPS and TEM analysis prove phase separation and formation of Si nanocrystals in SiO2, while the a-Si NPs are formed in SiO1.7 matrix. Both types of structures show selective sensitivity to UV light; the effect is more pronounced in the structure with nanocrystals. The responsivity of the nanocrystal structure to 365 nm UV light is ~ 4 times higher than that to green light at 4 V applied to the top contact. The observed effect is explained by assuming that only short wavelength radiation generates photocarriers in the amorphous and crystalline nanoclusters.<\/jats:p>","DOI":"10.3390\/s19102277","type":"journal-article","created":{"date-parts":[[2019,5,17]],"date-time":"2019-05-17T11:06:46Z","timestamp":1558091206000},"page":"2277","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":7,"title":["UV Sensitivity of MOS Structures with Silicon Nanoclusters"],"prefix":"10.3390","volume":"19","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-4141-1020","authenticated-orcid":false,"given":"Mario","family":"Curiel","sequence":"first","affiliation":[{"name":"Universidad Aut\u00f3noma de Baja California, Instituto de Ingenier\u00eda, Benito Ju\u00e1rez Blvd., s\/n, 21280 Mexicali, Baja California, M\u00e9xico"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-3391-010X","authenticated-orcid":false,"given":"Nicola","family":"Nedev","sequence":"additional","affiliation":[{"name":"Universidad Aut\u00f3noma de Baja California, Instituto de Ingenier\u00eda, Benito Ju\u00e1rez Blvd., s\/n, 21280 Mexicali, Baja California, M\u00e9xico"}]},{"given":"Judith","family":"Paz","sequence":"additional","affiliation":[{"name":"Universidad Aut\u00f3noma de Baja California, Instituto de Ingenier\u00eda, Benito Ju\u00e1rez Blvd., s\/n, 21280 Mexicali, Baja California, M\u00e9xico"}]},{"given":"Oscar","family":"Perez","sequence":"additional","affiliation":[{"name":"Universidad Aut\u00f3noma de Baja California, Instituto de Ingenier\u00eda, Benito Ju\u00e1rez Blvd., s\/n, 21280 Mexicali, Baja California, M\u00e9xico"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-6788-7545","authenticated-orcid":false,"given":"Benjamin","family":"Valdez","sequence":"additional","affiliation":[{"name":"Universidad Aut\u00f3noma de Baja California, Instituto de Ingenier\u00eda, Benito Ju\u00e1rez Blvd., s\/n, 21280 Mexicali, Baja California, M\u00e9xico"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-4078-2521","authenticated-orcid":false,"given":"David","family":"Mateos","sequence":"additional","affiliation":[{"name":"Universidad Aut\u00f3noma de Baja California, Instituto de Ingenier\u00eda, Benito Ju\u00e1rez Blvd., s\/n, 21280 Mexicali, Baja California, M\u00e9xico"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-9385-4432","authenticated-orcid":false,"given":"Abraham","family":"Arias","sequence":"additional","affiliation":[{"name":"Universidad Aut\u00f3noma de Baja California, Facultad de Ingenier\u00eda, Benito Ju\u00e1rez Blvd., s\/n, 21280 Mexicali, Baja California, M\u00e9xico"}]},{"given":"Diana","family":"Nesheva","sequence":"additional","affiliation":[{"name":"Institute of Solid State Physics, Bulgarian Academy of Sciences,72 Tzarigradsko Chaussee Blvd,1784 Sofia, Bulgaria"}]},{"given":"Emil","family":"Manolov","sequence":"additional","affiliation":[{"name":"Institute of Solid State Physics, Bulgarian Academy of Sciences,72 Tzarigradsko Chaussee Blvd,1784 Sofia, Bulgaria"}]},{"given":"Roumen","family":"Nedev","sequence":"additional","affiliation":[{"name":"Universidad Polit\u00e9cnica de Baja California, Calle de la Claridad s\/n, 21376 Mexicali, Baja California, M\u00e9xico"}]},{"given":"Valeri","family":"Dzhurkov","sequence":"additional","affiliation":[{"name":"Institute of Solid State Physics, Bulgarian Academy of Sciences,72 Tzarigradsko Chaussee Blvd,1784 Sofia, Bulgaria"}]}],"member":"1968","published-online":{"date-parts":[[2019,5,17]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"433","DOI":"10.1063\/1.1385190","article-title":"Synthesis and characterization of aerosol silicon nanocrystal nonvolatile floating-gate memory devices","volume":"79","author":"Ostraat","year":"2001","journal-title":"Appl. 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