{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,3,5]],"date-time":"2026-03-05T19:33:56Z","timestamp":1772739236752,"version":"3.50.1"},"reference-count":18,"publisher":"MDPI AG","issue":"11","license":[{"start":{"date-parts":[[2019,5,31]],"date-time":"2019-05-31T00:00:00Z","timestamp":1559260800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100004956","name":"Bundesministerium f\u00fcr Verkehr, Innovation und Technologie","doi-asserted-by":"publisher","award":["-"],"award-info":[{"award-number":["-"]}],"id":[{"id":"10.13039\/501100004956","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100012416","name":"Bundesministerium f\u00fcr Digitalisierung und Wirtschaftsstandort","doi-asserted-by":"publisher","award":["-"],"award-info":[{"award-number":["-"]}],"id":[{"id":"10.13039\/501100012416","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>The detection of infrared radiation is of great interest for a wide range of applications, such as absorption sensing in the infrared spectral range. In this work, we present a CMOS compatible pyroelectric detector which was devised as a mid-infrared detector, comprising aluminium nitride (AlN) as the pyroelectric material and fabricated using semiconductor mass fabrication processes. To ensure thermal decoupling of the detector, the detectors are realized on a Si3N4\/SiO2 membrane. The detectors have been tested at a wavelength close to the CO2 absorption region in the mid-infrared. Devices with various detector and membrane sizes were fabricated and the influence of these dimensions on the performance was investigated. The noise equivalent power of the first demonstrator devices connected to a readout circuit was measured to be as low as     5.3 \u00d7  10  \u2212 9    W \/  Hz     .<\/jats:p>","DOI":"10.3390\/s19112513","type":"journal-article","created":{"date-parts":[[2019,5,31]],"date-time":"2019-05-31T11:59:56Z","timestamp":1559303996000},"page":"2513","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":27,"title":["A CMOS Compatible Pyroelectric Mid-Infrared Detector Based on Aluminium Nitride"],"prefix":"10.3390","volume":"19","author":[{"ORCID":"https:\/\/orcid.org\/0000-0001-5646-7230","authenticated-orcid":false,"given":"Christian","family":"Ranacher","sequence":"first","affiliation":[{"name":"Carinthian Tech Research AG, 9524 Villach, Austria"},{"name":"Infineon Technologies Austria AG, 9500 Villach, Austria"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-4244-7324","authenticated-orcid":false,"given":"Cristina","family":"Consani","sequence":"additional","affiliation":[{"name":"Carinthian Tech Research AG, 9524 Villach, Austria"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-9424-7228","authenticated-orcid":false,"given":"Andreas","family":"Tortschanoff","sequence":"additional","affiliation":[{"name":"Carinthian Tech Research AG, 9524 Villach, Austria"}]},{"given":"Lukas","family":"Rauter","sequence":"additional","affiliation":[{"name":"Carinthian Tech Research AG, 9524 Villach, Austria"}]},{"given":"Dominik","family":"Holzmann","sequence":"additional","affiliation":[{"name":"Carinthian Tech Research AG, 9524 Villach, Austria"}]},{"given":"Clement","family":"Fleury","sequence":"additional","affiliation":[{"name":"Carinthian Tech Research AG, 9524 Villach, Austria"}]},{"given":"Gerald","family":"Stocker","sequence":"additional","affiliation":[{"name":"Infineon Technologies Austria AG, 9500 Villach, Austria"}]},{"given":"Andrea","family":"Fant","sequence":"additional","affiliation":[{"name":"Infineon Technologies Austria AG, 9500 Villach, Austria"}]},{"given":"Herbert","family":"Schaunig","sequence":"additional","affiliation":[{"name":"Infineon Technologies Austria AG, 9500 Villach, Austria"}]},{"given":"Peter","family":"Irsigler","sequence":"additional","affiliation":[{"name":"Infineon Technologies Austria AG, 9500 Villach, Austria"}]},{"given":"Thomas","family":"Grille","sequence":"additional","affiliation":[{"name":"Infineon Technologies Austria AG, 9500 Villach, Austria"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-2918-7150","authenticated-orcid":false,"given":"Bernhard","family":"Jakoby","sequence":"additional","affiliation":[{"name":"Institute for Microelectronics and Microsensors, Johannes Kepler University Linz, 4040 Linz, Austria"}]}],"member":"1968","published-online":{"date-parts":[[2019,5,31]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"31","DOI":"10.1063\/1.2062916","article-title":"Pyroelectricity: From ancient curiosity to modern imaging tool","volume":"58","author":"Lang","year":"2005","journal-title":"Phys. Today"},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"440","DOI":"10.1038\/nphoton.2012.142","article-title":"Mid-infrared frequency combs","volume":"6","author":"Schliesser","year":"2012","journal-title":"Nat. Photonics"},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"187","DOI":"10.1016\/S1350-4495(02)00140-8","article-title":"Infrared detectors: An overview","volume":"43","author":"Rogalski","year":"2002","journal-title":"Infrared Phys. Technol."},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"59","DOI":"10.1016\/S0079-6727(02)00024-1","article-title":"Infrared detectors: Status and trends","volume":"27","author":"Rogalski","year":"2003","journal-title":"Prog. Quantum Electron."},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"195","DOI":"10.2478\/v10048-010-0033-3","article-title":"Modelling and simulation of the pyroelectric detector using MATLAB\/Simulink","volume":"10","author":"Odon","year":"2010","journal-title":"Meas. Sci. Rev."},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"1339","DOI":"10.1088\/0034-4885\/64\/10\/203","article-title":"Micromachined infrared detectors based on pyroelectric thin films","volume":"64","author":"Muralt","year":"2001","journal-title":"Rep. Prog. Phys."},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"824","DOI":"10.1109\/28.90335","article-title":"Pyroelectric detectors and their applications","volume":"27","author":"Hossain","year":"1991","journal-title":"IEEE Trans. Ind. Appl."},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"3075","DOI":"10.1063\/1.1324726","article-title":"Pyroelectric properties of AlN","volume":"77","author":"Fuflyigin","year":"2000","journal-title":"Appl. Phys. Lett."},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"89730I","DOI":"10.1117\/12.2037386","article-title":"Optimal microelectromechanical systems (MEMS) device for achieving high pyroelectric response of AlN","volume":"Volume 8973","author":"Kebede","year":"2014","journal-title":"Proceedings of the Micromachining and Microfabrication Process Technology XIX"},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"117","DOI":"10.1016\/j.sna.2018.05.013","article-title":"Mid-infrared absorption gas sensing using a silicon strip waveguide","volume":"277","author":"Ranacher","year":"2018","journal-title":"Sens. Actuators A Phys."},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1109\/JPHOT.2018.2866628","article-title":"Characterization of Evanescent Field Gas Sensor Structures Based on Silicon Photonics","volume":"10","author":"Ranacher","year":"2018","journal-title":"IEEE Photonics J."},{"key":"ref_12","unstructured":"Mackowiak, V., Peupelmann, J., Ma, Y., and Gorges, A. (2015). Nep\u2013Noise Equivalent Power, Thorlabs, Inc."},{"key":"ref_13","unstructured":"Infratec (2019, January 17). Datasheet LME-351. Available online: https:\/\/www.infratec-infrared.com\/downloads\/en\/sensor-division\/detector_data_sheet\/infratec-datasheet-lme-351-_.pdf."},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"R59","DOI":"10.1088\/0957-0233\/18\/7\/R01","article-title":"Review of micromachined thermopiles for infrared detection","volume":"18","author":"Graf","year":"2007","journal-title":"Meas. Sci. Technol."},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"494","DOI":"10.1109\/TED.2002.807453","article-title":"A low-cost uncooled infrared microbolometer detector in standard CMOS technology","volume":"50","author":"Tezcan","year":"2003","journal-title":"IEEE Trans. Electron. Devices"},{"key":"ref_16","unstructured":"Infratec (2019, May 24). Pyroelectric and Multispectral Detectors. Available online: https:\/\/www.infratec.eu\/downloads\/en\/sensor-division\/flyer\/infratec-image-detector-b-en-mail.pdf."},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"1271","DOI":"10.1021\/acsphotonics.6b00249","article-title":"Hole array perfect absorbers for spectrally selective midwavelength infrared pyroelectric detectors","volume":"3","author":"Dao","year":"2016","journal-title":"ACS Photonics"},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"276","DOI":"10.1364\/OPTICA.4.000276","article-title":"Multifunctional metamaterial pyroelectric infrared detectors","volume":"4","author":"Suen","year":"2017","journal-title":"Optica"}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/19\/11\/2513\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T12:55:16Z","timestamp":1760187316000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/19\/11\/2513"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2019,5,31]]},"references-count":18,"journal-issue":{"issue":"11","published-online":{"date-parts":[[2019,6]]}},"alternative-id":["s19112513"],"URL":"https:\/\/doi.org\/10.3390\/s19112513","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2019,5,31]]}}}