{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,12]],"date-time":"2025-10-12T03:40:46Z","timestamp":1760240446011,"version":"build-2065373602"},"reference-count":39,"publisher":"MDPI AG","issue":"12","license":[{"start":{"date-parts":[[2019,6,13]],"date-time":"2019-06-13T00:00:00Z","timestamp":1560384000000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>This paper presents a microelectromechanical system (MEMS)-based oscillator based on a Lam\u00e9-mode capacitive micromachined resonator and a fully differential high-gain transimpedance amplifier (TIA). The proposed TIA is designed using TSMC 65 nm CMOS technology and consumes only 0.9 mA from a 1-V supply. The measured mid-band transimpedance gain is 98 dB \u03a9 and the TIA features an adjustable bandwidth with a maximum bandwidth of 142 MHz for a parasitic capacitance C P of 4 pF. The measured input-referred current noise of the TIA at mid-band is below 15 pA\/ Hz . The TIA is connected to a Lam\u00e9-mode resonator, and the oscillator performance in terms of phase noise and frequency stability is presented. The measured phase noise under vacuum is \u2212120 dBc\/Hz at a 1-kHz offset, while the phase noise floor reaches \u2212127 dBc\/Hz. The measured short-term stability of the MEMS-based oscillator is \u00b10.25 ppm.<\/jats:p>","DOI":"10.3390\/s19122680","type":"journal-article","created":{"date-parts":[[2019,6,13]],"date-time":"2019-06-13T11:15:58Z","timestamp":1560424558000},"page":"2680","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":7,"title":["A Sub-mW 18-MHz MEMS Oscillator Based on a 98-dB\u03a9 Adjustable Bandwidth Transimpedance Amplifier and a Lam\u00e9-Mode Resonator"],"prefix":"10.3390","volume":"19","author":[{"given":"Anoir","family":"Bouchami","sequence":"first","affiliation":[{"name":"Department of Electrical Engineering, \u00c9cole de technologie sup\u00e9rieure, Montr\u00e9al, QC H3C 1K3, Canada"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-7079-1181","authenticated-orcid":false,"given":"Mohannad Y.","family":"Elsayed","sequence":"additional","affiliation":[{"name":"Department of Electrical Engineering, \u00c9cole de technologie sup\u00e9rieure, Montr\u00e9al, QC H3C 1K3, Canada"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-2281-7172","authenticated-orcid":false,"given":"Frederic","family":"Nabki","sequence":"additional","affiliation":[{"name":"Department of Electrical Engineering, \u00c9cole de technologie sup\u00e9rieure, Montr\u00e9al, QC H3C 1K3, Canada"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2019,6,13]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"67","DOI":"10.1109\/JMEMS.2016.2607118","article-title":"18-MHz Silicon Lam\u00e9 Mode Resonators with Corner and Central Anchor Architectures in a Dual-Wafer SOI Technology","volume":"26","author":"Elsayed","year":"2017","journal-title":"J. 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Control"}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/19\/12\/2680\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T12:58:16Z","timestamp":1760187496000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/19\/12\/2680"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2019,6,13]]},"references-count":39,"journal-issue":{"issue":"12","published-online":{"date-parts":[[2019,6]]}},"alternative-id":["s19122680"],"URL":"https:\/\/doi.org\/10.3390\/s19122680","relation":{},"ISSN":["1424-8220"],"issn-type":[{"type":"electronic","value":"1424-8220"}],"subject":[],"published":{"date-parts":[[2019,6,13]]}}}