{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,12,27]],"date-time":"2025-12-27T10:06:19Z","timestamp":1766829979398,"version":"build-2065373602"},"reference-count":20,"publisher":"MDPI AG","issue":"12","license":[{"start":{"date-parts":[[2019,6,21]],"date-time":"2019-06-21T00:00:00Z","timestamp":1561075200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["61571127","61871125"],"award-info":[{"award-number":["61571127","61871125"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"name":"Joint Foundation of the Ministry of Education","award":["6141A020223"],"award-info":[{"award-number":["6141A020223"]}]},{"name":"Pre-research Fund","award":["61405170103"],"award-info":[{"award-number":["61405170103"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>In this paper, we present a new design for a micro-opto-electro-mechanical (MOEMS) gyroscope based on a whispering-gallery mode (WGM) microdisk resonator and MEMS resonator. The mechanical characteristics, frequency split, and quality factor (Q) of the MEMS resonator; the optical characteristics, Q value, and coupling regimes of the WGM resonator; and the coupling between the two resonators were analyzed. Its operation principle\u2014the transformation process from angular velocity to the resonance wavelength of the WGM resonator\u2014is presented at same time. Next, the analysis conclusions were validated with the help of simulations in ANSYS and FDTD (Finite-Difference Time-Domain) Solutions. Afterwards, some key specifications were estimated based on the results of simulations. Lastly, the fabrication process is detailed.<\/jats:p>","DOI":"10.3390\/s19122798","type":"journal-article","created":{"date-parts":[[2019,6,21]],"date-time":"2019-06-21T11:54:31Z","timestamp":1561118071000},"page":"2798","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":25,"title":["A New Design of an MOEMS Gyroscope Based on a WGM Microdisk Resonator"],"prefix":"10.3390","volume":"19","author":[{"given":"Dunzhu","family":"Xia","sequence":"first","affiliation":[{"name":"Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Lingchao","family":"Huang","sequence":"additional","affiliation":[{"name":"Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Liye","family":"Zhao","sequence":"additional","affiliation":[{"name":"Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2019,6,21]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"283","DOI":"10.1016\/j.sna.2008.03.017","article-title":"In-plane MEMS-based nano-g accelerometer with sub-wavelength optical resonant sensor","volume":"145\u2013146","author":"Krishnamoorthy","year":"2008","journal-title":"Sens. Actuators A Phys."},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"768","DOI":"10.1038\/nphoton.2012.245","article-title":"A high-resolution microchip optomechanical accelerometer","volume":"6","author":"Krause","year":"2012","journal-title":"Nat. Photonics"},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"4694","DOI":"10.1364\/OE.15.004694","article-title":"Ultra-high Q planar silicon microdisk resonators for chip-scale silicon photonics","volume":"15","author":"Soltani","year":"2007","journal-title":"Opt. Express"},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"131108","DOI":"10.1063\/1.2356892","article-title":"Integration of fiber-coupled high-Q SiNx microdisks with atom chips","volume":"89","author":"Barclay","year":"2006","journal-title":"Appl. Phys. Lett."},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"2861","DOI":"10.1364\/OL.29.002861","article-title":"Ultrahigh-quality-factor silicon-on-insulator microring resonator","volume":"29","author":"Niehusmann","year":"2004","journal-title":"Opt. Lett."},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"223","DOI":"10.1016\/j.physrep.2012.11.003","article-title":"All-optical mass sensing with coupled mechanical resonator systems","volume":"525","author":"Li","year":"2013","journal-title":"Phys. Rep."},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"1759","DOI":"10.1109\/JSEN.2007.910070","article-title":"A Novel Optical Microring Resonator Accelerometer","volume":"7","author":"Bhola","year":"2007","journal-title":"IEEE Sens. J."},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"1395","DOI":"10.1109\/JLT.2005.863333","article-title":"Design and optimization of microring resonators in biochemical sensing applications","volume":"24","author":"Chao","year":"2006","journal-title":"J. Lightwave Technol."},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"2096","DOI":"10.1109\/LPT.2006.883210","article-title":"A Polymer Microdisk Photonic Sensor Integrated onto Silicon","volume":"18","author":"Cho","year":"2006","journal-title":"IEEE Photonic Technol. Lett."},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"12814","DOI":"10.1364\/OE.14.012814","article-title":"Ultra-compact microdisk resonator filters on SOI substrate","volume":"14","author":"Morand","year":"2006","journal-title":"Opt. Express"},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"374","DOI":"10.1088\/0960-1317\/14\/3\/009","article-title":"Integrated micro ring resonator displacement sensor for scanning probe microscopies","volume":"14","author":"Kiyat","year":"2004","journal-title":"J. Micromech. Microeng."},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"3666","DOI":"10.1063\/1.1807967","article-title":"Detection of chemical species using ultraviolet microdisk lasers","volume":"85","author":"Fang","year":"2004","journal-title":"Appl. Phys. Lett."},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"512","DOI":"10.1364\/OL.27.000512","article-title":"Sensor based on an integrated optical microcavity","volume":"27","author":"Krioukov","year":"2002","journal-title":"Opt. Lett."},{"key":"ref_14","doi-asserted-by":"crossref","unstructured":"Xia, D., Huang, L., Xu, L., and Gao, H. (2017). Structural Analysis of Disk Resonance Gyroscope. Micromachines, 8.","DOI":"10.3390\/mi8100296"},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"3793","DOI":"10.1109\/JSEN.2015.2399435","article-title":"Design of a Digitalized Microgyroscope System Using \u03a3\u0394 Modulation Technology","volume":"15","author":"Xia","year":"2015","journal-title":"IEEE Sens. J."},{"key":"ref_16","unstructured":"Le, T.M. (2012). Integration of Practical High Sensitivity Whispering Gallery Mode Resonator Sensors. [Bachelor\u2019s Thesis, USC]."},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"483","DOI":"10.1109\/68.992585","article-title":"Critical coupling and its control in optical waveguide-ring resonator systems","volume":"14","author":"Yariv","year":"2002","journal-title":"IEEE Photonic Technol. Lett."},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"239","DOI":"10.1093\/qjmam\/41.2.239","article-title":"The general solution to the distribution of stresses in a circular ring compressed by two forces acting along a diameter","volume":"41","author":"Chianese","year":"1988","journal-title":"Q. J. Mech. Appl. Math."},{"key":"ref_19","doi-asserted-by":"crossref","unstructured":"Muskhelishvili, N.I. (1977). Some Basic Problems of the Mathematical Theory of Elasticity, Springer.","DOI":"10.1007\/978-94-017-3034-1"},{"key":"ref_20","doi-asserted-by":"crossref","unstructured":"Painter, C.C., and Shkel, A.M. (2002, January 11). Identification of anisoelasticity for electrostatic trimming of rate-integrating gyroscopes. Proceedings of the Smart Structures and Materials 2002: Smart Electronics, MEMS, and Nanotechnology, San Diego, CA, USA.","DOI":"10.1117\/12.475027"}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/19\/12\/2798\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T13:00:30Z","timestamp":1760187630000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/19\/12\/2798"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2019,6,21]]},"references-count":20,"journal-issue":{"issue":"12","published-online":{"date-parts":[[2019,6]]}},"alternative-id":["s19122798"],"URL":"https:\/\/doi.org\/10.3390\/s19122798","relation":{},"ISSN":["1424-8220"],"issn-type":[{"type":"electronic","value":"1424-8220"}],"subject":[],"published":{"date-parts":[[2019,6,21]]}}}