{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,6,13]],"date-time":"2026-06-13T04:05:15Z","timestamp":1781323515612,"version":"3.54.1"},"reference-count":108,"publisher":"MDPI AG","issue":"13","license":[{"start":{"date-parts":[[2019,7,1]],"date-time":"2019-07-01T00:00:00Z","timestamp":1561939200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>The paper highlights some of the significant works done in the field of medical and biomedical sensing using silicon-based technology. The use of silicon sensors is one of the pivotal and prolonged techniques employed in a range of healthcare, industrial and environmental applications by virtue of its distinct advantages over other counterparts in Microelectromechanical systems (MEMS) technology. Among them, the sensors for biomedical applications are one of the most significant ones, which not only assist in improving the quality of human life but also help in the field of microfabrication by imparting knowledge about how to develop enhanced multifunctional sensing prototypes. The paper emphasises the use of silicon, in different forms, to fabricate electrodes and substrates for the sensors that are to be used for biomedical sensing. The electrical conductivity and the mechanical flexibility of silicon vary to a large extent depending on its use in developing prototypes. The article also explains some of the bottlenecks that need to be dealt with in the current scenario, along with some possible remedies. Finally, a brief market survey is given to estimate a probable increase in the usage of silicon in developing a variety of biomedical prototypes in the upcoming years.<\/jats:p>","DOI":"10.3390\/s19132908","type":"journal-article","created":{"date-parts":[[2019,7,1]],"date-time":"2019-07-01T03:23:59Z","timestamp":1561951439000},"page":"2908","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":132,"title":["Silicon-Based Sensors for Biomedical Applications: A Review"],"prefix":"10.3390","volume":"19","author":[{"given":"Yongzhao","family":"Xu","sequence":"first","affiliation":[{"name":"School of Electronic Engineering, Dongguan University of Technology, Dongguan 523808, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Xiduo","family":"Hu","sequence":"additional","affiliation":[{"name":"School of Electronic Engineering, Dongguan University of Technology, Dongguan 523808, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Sudip","family":"Kundu","sequence":"additional","affiliation":[{"name":"CSIR-Central Mechanical Engineering Research Institute, Durgapur, West Bengal 713209, India"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Anindya","family":"Nag","sequence":"additional","affiliation":[{"name":"DGUT-CNAM Institute, Dongguan University of Technology, Dongguan 523106, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Nasrin","family":"Afsarimanesh","sequence":"additional","affiliation":[{"name":"School of Engineering, Macquarie University, Sydney 2109, Australia"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Samta","family":"Sapra","sequence":"additional","affiliation":[{"name":"School of Engineering, Macquarie University, Sydney 2109, Australia"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Subhas Chandra","family":"Mukhopadhyay","sequence":"additional","affiliation":[{"name":"School of Engineering, Macquarie University, Sydney 2109, Australia"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-8422-9288","authenticated-orcid":false,"given":"Tao","family":"Han","sequence":"additional","affiliation":[{"name":"DGUT-CNAM Institute, Dongguan University of Technology, Dongguan 523106, China"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"1968","published-online":{"date-parts":[[2019,7,1]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","unstructured":"Bhansali, S., and Vasudev, A. (2012). MEMS for Biomedical Applications, Elsevier.","DOI":"10.1533\/9780857096272"},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"117001","DOI":"10.7567\/APEX.11.117001","article-title":"High-sensitivity radio frequency noncontact sensing and accurate quantification of uric acid in temperature-variant aqueous solutions","volume":"11","author":"Adhikari","year":"2018","journal-title":"Appl. Phys. Express"},{"key":"ref_3","unstructured":"Sze, S.M. (1994). Semiconductor Sensors, Wiley."},{"key":"ref_4","doi-asserted-by":"crossref","unstructured":"Serene, M., Babu, R., and Alex, Z.C. (2019). Sensitivity Analysis of Micro-Mass Optical MEMS Sensor for Biomedical IoT Devices. Internet of Things and Personalized Healthcare Systems, Springer.","DOI":"10.1007\/978-981-13-0866-6_1"},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"704","DOI":"10.1016\/j.snb.2017.11.060","article-title":"High-Performance porous MIM-type capacitive humidity sensor realized via inductive coupled plasma and reactive-Ion etching","volume":"258","author":"Qiang","year":"2018","journal-title":"Sens. Actuators B Chem."},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1007\/s10916-018-1115-2","article-title":"Blood Sugar Level Indication Through Chewing and Swallowing from Acoustic MEMS Sensor and Deep Learning Algorithm for Diabetic Management","volume":"43","author":"Kumari","year":"2019","journal-title":"J. Med. Syst."},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"13917","DOI":"10.3390\/s131013917","article-title":"An InN\/InGaN Quantum Dot Electrochemical Biosensor for Clinical Diagnosis","volume":"13","author":"Kumar","year":"2013","journal-title":"Sensors"},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"115201","DOI":"10.7567\/APEX.6.115201","article-title":"Highly sensitive and fast anion selective InN quantum dot electrochemical sensors","volume":"6","author":"Rodriguez","year":"2013","journal-title":"Appl. Phys. Express"},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"153110","DOI":"10.1063\/1.4758701","article-title":"Highly Efficient Potentiometric Glucose Biosensor Based on Functionalized InN Quantum Dots","volume":"101","author":"Alvi","year":"2012","journal-title":"Appl. Phys. Lett."},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"897","DOI":"10.1016\/j.snb.2014.06.048","article-title":"Porous silicon chemical sensors and biosensors: A review","volume":"202","author":"Harraz","year":"2014","journal-title":"Sens. Actuators B Chem."},{"key":"ref_11","unstructured":"Santos, H.A. (2014). Porous Silicon for Biomedical Applications, Elsevier."},{"key":"ref_12","unstructured":"(2019, June 27). Silicon Wafer Production Process. Available online: https:\/\/www.sas-globalwafers.co.jp\/eng\/products\/wafer\/process.html."},{"key":"ref_13","unstructured":"Saliterman, S.S. (2006). Fundamentals of BioMEMS and Medical Microdevices, Wiley-Interscience."},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"186","DOI":"10.1109\/TNB.2016.2528258","article-title":"Nanowire-based sensors for biological and medical applications","volume":"15","author":"Wang","year":"2016","journal-title":"IEEE Trans. Nanobiosci."},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"233","DOI":"10.1080\/10426910500464446","article-title":"Low pressure piezoresistive sensors for medical electronics applications","volume":"21","author":"Pramanik","year":"2006","journal-title":"Mater. Manuf. Process."},{"key":"ref_16","doi-asserted-by":"crossref","unstructured":"Nag, A., Zia, A.I., Mukhopadhyay, S., and Kosel, J. (2015, January 8\u201310). Performance enhancement of electronic sensor through mask-less lithography. Proceedings of the 9th International Conference on Sensing Technology (ICST), Auckland, New Zealand.","DOI":"10.1109\/ICSensT.2015.7438426"},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"5634","DOI":"10.1039\/c0cc00674b","article-title":"Fabrication of patterned silane based self-assembled monolayers by photolithography and surface reactions on silicon-oxide substrates","volume":"46","author":"Herzer","year":"2010","journal-title":"Chem. Commun."},{"key":"ref_18","doi-asserted-by":"crossref","unstructured":"Chen, H., Xue, M., Mei, Z., Bambang Oetomo, S., and Chen, W. (2016). A review of wearable sensor systems for monitoring body movements of neonates. Sensors, 16.","DOI":"10.3390\/s16122134"},{"key":"ref_19","unstructured":"Ng, J., Sahakian, A.V., and Swiryn, S. (2000). Sensing and Documentation of Body Position during Ambulatory ECG Monitoring, IEEE."},{"key":"ref_20","doi-asserted-by":"crossref","first-page":"25507","DOI":"10.3390\/s151025507","article-title":"Detection of site-specific blood flow variation in humans during running by a wearable laser Doppler flowmeter","volume":"15","author":"Iwasaki","year":"2015","journal-title":"Sensors"},{"key":"ref_21","doi-asserted-by":"crossref","first-page":"476","DOI":"10.3923\/itj.2012.476.479","article-title":"Human pulse detection using multiple silicon microphones toward estimation of physical condition","volume":"11","author":"Nomura","year":"2012","journal-title":"Inf. Technol. J."},{"key":"ref_22","doi-asserted-by":"crossref","first-page":"2045","DOI":"10.1126\/science.1081298","article-title":"Polymer replicas of photonic porous silicon for sensing and drug delivery applications","volume":"299","author":"Li","year":"2003","journal-title":"Science"},{"key":"ref_23","doi-asserted-by":"crossref","first-page":"1471","DOI":"10.1021\/acssensors.6b00634","article-title":"10000-fold improvement in protein detection using nanostructured porous silicon interferometric aptasensors","volume":"1","author":"Mariani","year":"2016","journal-title":"ACS Sens."},{"key":"ref_24","doi-asserted-by":"crossref","first-page":"5358","DOI":"10.1039\/C6AN01076H","article-title":"Multiplexed cancer biomarker detection using chip-integrated silicon photonic sensor arrays","volume":"141","author":"Washburn","year":"2016","journal-title":"Analyst"},{"key":"ref_25","doi-asserted-by":"crossref","first-page":"14142","DOI":"10.1073\/pnas.232276699","article-title":"Electronic detection of DNA by its intrinsic molecular charge","volume":"99","author":"Fritz","year":"2002","journal-title":"Proc. Natl. Acad. Sci. USA"},{"key":"ref_26","doi-asserted-by":"crossref","first-page":"054002","DOI":"10.1088\/0960-1317\/21\/5\/054002","article-title":"MEMS sensors and microsystems for cell mechanobiology","volume":"21","author":"Rajagopalan","year":"2011","journal-title":"J. Micromech. Microeng."},{"key":"ref_27","doi-asserted-by":"crossref","first-page":"6441","DOI":"10.3390\/s150306441","article-title":"MEMS sensor technologies for human centred applications in healthcare, physical activities, safety and environmental sensing: A review on research activities in Italy","volume":"15","author":"Ciuti","year":"2015","journal-title":"Sensors"},{"key":"ref_28","first-page":"1","article-title":"Role of MEMS in biomedical application: A review","volume":"115","author":"Sharma","year":"2010","journal-title":"Sens. Transducers"},{"key":"ref_29","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1016\/j.jsps.2013.12.003","article-title":"Biomedical microelectromechanical systems (BioMEMS): Revolution in drug delivery and analytical techniques","volume":"24","author":"Jivani","year":"2016","journal-title":"Saudi Pharm. J."},{"key":"ref_30","doi-asserted-by":"crossref","first-page":"6","DOI":"10.1109\/JPROC.2003.820534","article-title":"A BioMEMS review: MEMS technology for physiologically integrated devices","volume":"92","author":"Grayson","year":"2004","journal-title":"Proc. IEEE"},{"key":"ref_31","unstructured":"Judy, J.W. (February, January 31). Biomedical applications of MEMS. Proceedings of the Measurement and Science Technology Conference, Anaheim, CA, USA."},{"key":"ref_32","doi-asserted-by":"crossref","first-page":"277","DOI":"10.1108\/02602280510700467","article-title":"Review of the potential of a wireless MEMS microsystem for biomedical applications","volume":"25","author":"Arshak","year":"2005","journal-title":"Sens. Rev."},{"key":"ref_33","doi-asserted-by":"crossref","unstructured":"Wang, W., and Soper, S.A. (2006). Bio-MEMS: Technologies and Applications, CRC Press.","DOI":"10.1201\/9781420018677"},{"key":"ref_34","first-page":"73","article-title":"Recent advances in mems sensor technology biomedical mechanical thermo-fluid & electromagnetic sensors","volume":"3","author":"Dheringe","year":"2013","journal-title":"Int. J. Electron. Commun. Instrum. Eng. Res. Dev."},{"key":"ref_35","doi-asserted-by":"crossref","first-page":"522","DOI":"10.1016\/j.cbpa.2008.08.027","article-title":"Nanowire sensors for multiplexed detection of biomolecules","volume":"12","author":"He","year":"2008","journal-title":"Curr. Opin. Chem. Biol."},{"key":"ref_36","doi-asserted-by":"crossref","unstructured":"Schander, A., Stemmann, H., Kreiter, A., and Lang, W. (2018). Silicon-Based Microfabrication of Free-Floating Neural Probes and Insertion Tool for Chronic Applications. Micromachines, 9.","DOI":"10.3390\/mi9030131"},{"key":"ref_37","unstructured":"Boric-Lubecke, O., Droitcour, A.D., Lubecke, V.M., Lin, J., and Kovacs, G.T. (2003, January 1\u20133). Wireless IC Doppler radars for sensing of heart and respiration activity. Proceedings of the 6th International Conference on Telecommunications in Modern Satellite, Cable and Broadcasting Service, Ni\u0161, Yugoslavia."},{"key":"ref_38","doi-asserted-by":"crossref","unstructured":"Weisfield, R.L., Hartney, M.A., Street, R.A., and Apte, R.B. (1998, January 22\u201324). New amorphous-silicon image sensor for x-ray diagnostic medical imaging applications. Proceedings of the Medical Imaging: Physics of Medical Imaging, San Diego, CA, USA.","DOI":"10.1117\/12.317044"},{"key":"ref_39","doi-asserted-by":"crossref","first-page":"567","DOI":"10.1109\/10.293244","article-title":"Silicon-substrate microelectrode arrays for parallel recording of neural activity in peripheral and cranial nerves","volume":"41","author":"Kovacs","year":"1994","journal-title":"IEEE Trans. Biomed. Eng."},{"key":"ref_40","unstructured":"Borkholder, D. (1998). Cell based Biosensors Using Microelectrodes. [Ph.D. Thesis, Stanford University]."},{"key":"ref_41","doi-asserted-by":"crossref","first-page":"3344","DOI":"10.1364\/OL.30.003344","article-title":"Integrated optics ring-resonator sensors for protein detection","volume":"30","author":"Ksendzov","year":"2005","journal-title":"Opt. Lett."},{"key":"ref_42","unstructured":"Gary, P.A. (1967). Modeling and Optimization of a Silicon Photosensor for a Reading Aid, Stanford University CA Stanford Electronics Labs."},{"key":"ref_43","doi-asserted-by":"crossref","first-page":"697","DOI":"10.1088\/0022-3735\/1\/7\/201","article-title":"Progress in medical instrumentation over the past fifty years","volume":"1","author":"Hill","year":"1968","journal-title":"J. Phys. E Sci. Instrum."},{"key":"ref_44","doi-asserted-by":"crossref","first-page":"39","DOI":"10.1016\/j.sna.2007.02.013","article-title":"Integrated sensors, MEMS, and microsystems: Reflections on a fantastic voyage","volume":"136","author":"Wise","year":"2007","journal-title":"Sens. Actuators A Phys."},{"key":"ref_45","doi-asserted-by":"crossref","first-page":"2737","DOI":"10.1016\/S0142-9612(02)00007-8","article-title":"Evaluation of MEMS materials of construction for implantable medical devices","volume":"23","author":"Kotzar","year":"2002","journal-title":"Biomaterials"},{"key":"ref_46","unstructured":"Durini, D. (2014). High Performance Silicon Imaging: Fundamentals and Applications of CMOS and CCD Sensors, Elsevier."},{"key":"ref_47","doi-asserted-by":"crossref","first-page":"42","DOI":"10.1103\/PhysRev.94.42","article-title":"Piezoresistance effect in germanium and silicon","volume":"94","author":"Smith","year":"1954","journal-title":"Phys. Rev."},{"key":"ref_48","doi-asserted-by":"crossref","first-page":"3322","DOI":"10.1063\/1.1931164","article-title":"Silicon diffused-element piezoresistive diaphragms","volume":"33","author":"Tufte","year":"1962","journal-title":"J. Appl. Phys."},{"key":"ref_49","doi-asserted-by":"crossref","first-page":"1264","DOI":"10.1109\/TBME.2017.2744667","article-title":"Molecularly imprinted polymer-based electrochemical biosensor for bone loss detection","volume":"65","author":"Afsarimanesh","year":"2018","journal-title":"IEEE Trans. Biomed. Eng."},{"key":"ref_50","doi-asserted-by":"crossref","first-page":"996","DOI":"10.1109\/JSEN.2015.2496400","article-title":"Novel Sensing Approach for LPG Leakage Detection: Part I\u2014Operating Mechanism and Preliminary Results","volume":"16","author":"Nag","year":"2016","journal-title":"IEEE Sens. J."},{"key":"ref_51","doi-asserted-by":"crossref","first-page":"1088","DOI":"10.1109\/JSEN.2015.2496550","article-title":"Novel Sensing Approach for LPG Leakage Detection\u2014Part II: Effects of Particle Size, Composition, and Coating Layer Thickness","volume":"16","author":"Nag","year":"2016","journal-title":"IEEE Sens. J."},{"key":"ref_52","doi-asserted-by":"crossref","first-page":"205","DOI":"10.1109\/10.552250","article-title":"A silicon bidirectional flow sensor for measuring respiratory flow","volume":"44","author":"Pompe","year":"1997","journal-title":"IEEE Trans. Biomed. Eng."},{"key":"ref_53","doi-asserted-by":"crossref","first-page":"220","DOI":"10.1016\/S0009-2614(02)02008-0","article-title":"Silicon nanowires as chemical sensors","volume":"369","author":"Zhou","year":"2003","journal-title":"Chem. Phys. Lett."},{"key":"ref_54","unstructured":"Otte, N. (2006, January 3\u20136). The silicon photomultiplier-a new device for high energy physics, astroparticle physics, industrial and medical applications. Proceedings of the IX International Symposium on Detectors for Particle, Astroparticle and Synchrotron Radiation Experiments, Stanford, CA, USA."},{"key":"ref_55","doi-asserted-by":"crossref","first-page":"934","DOI":"10.1016\/j.medengphy.2006.05.006","article-title":"Planar electrochemical sensors for biomedical applications","volume":"28","author":"Laschi","year":"2006","journal-title":"Med. Eng. Phys."},{"key":"ref_56","doi-asserted-by":"crossref","first-page":"808","DOI":"10.1109\/JPROC.2004.826603","article-title":"Interdigital sensors and transducers","volume":"92","author":"Mamishev","year":"2004","journal-title":"Proc. IEEE"},{"key":"ref_57","unstructured":"Diamond, G.G., and Hutchins, D.A. (2006, January 25\u201329). A new capacitive imaging technique for NDT. Proceedings of the European Conference NDT, Berlin, Germany."},{"key":"ref_58","unstructured":"Osoinach, B. (2019, June 27). Proximity Capacitive Sensor Technology for Touch Sensing Applications. Available online: cache.freescale.com\/files\/sensors\/doc\/white_paper\/PROXIMITYWP.pdf."},{"key":"ref_59","doi-asserted-by":"crossref","first-page":"5728","DOI":"10.1109\/TIE.2017.2677308","article-title":"A wide-range capacitive sensor for linear and angular displacement measurement","volume":"64","author":"Anandan","year":"2017","journal-title":"IEEE Trans. Ind. Electron."},{"key":"ref_60","doi-asserted-by":"crossref","unstructured":"Afsarimanesh, N., Mukhopadhyay, S.C., and Kruger, M. (2019). Planar Interdigital Sensors and Electrochemical Impedance Spectroscopy. Electrochemical Biosensor: Point-of-Care for Early Detection of Bone Loss, Springer.","DOI":"10.1007\/978-3-030-03706-2"},{"key":"ref_61","unstructured":"Cheng, B. (2008). Security Imaging Devices with Planar Capacitance Sensor Arrays. [Ph.D. Thesis, University of Manchester]."},{"key":"ref_62","unstructured":"Frounchi, J., and Dehkhoda, F. (2003, January 2\u20135). High-speed capacitance scanner. Proceedings of the 3rd World Congress on Industrial Process Tomography, Banff, AB, Canada."},{"key":"ref_63","doi-asserted-by":"crossref","first-page":"24","DOI":"10.1108\/02602281011010772","article-title":"Planar capacitive sensors\u2013Designs and applications","volume":"30","author":"Hu","year":"2010","journal-title":"Sens. Rev."},{"key":"ref_64","doi-asserted-by":"crossref","first-page":"1608","DOI":"10.1109\/JSEN.2014.2301693","article-title":"Label-free DNA detection using a charge sensitive CMOS microarray sensor chip","volume":"14","author":"Musayev","year":"2014","journal-title":"IEEE Sens. J."},{"key":"ref_65","doi-asserted-by":"crossref","first-page":"3924","DOI":"10.1109\/JSEN.2018.2818718","article-title":"Performance Assessment of Interdigital Sensor for Varied Coating Thicknesses to Detect CTX-I","volume":"18","author":"Afsarimanesh","year":"2018","journal-title":"IEEE Sens. J."},{"key":"ref_66","doi-asserted-by":"crossref","first-page":"211","DOI":"10.1109\/JETCAS.2018.2819204","article-title":"Development of IoT-Based Impedometric Biosensor for Point-of-Care Monitoring of Bone Loss","volume":"8","author":"Afsarimanesh","year":"2018","journal-title":"IEEE J. Emerg. Sel. Top. Circuits Syst."},{"key":"ref_67","doi-asserted-by":"crossref","first-page":"1660","DOI":"10.1109\/JSEN.2009.2030643","article-title":"MEMS composite porous silicon\/polysilicon cantilever sensor for enhanced triglycerides biosensing","volume":"9","author":"Fernandez","year":"2009","journal-title":"IEEE Sens. J."},{"key":"ref_68","doi-asserted-by":"crossref","unstructured":"Abdelghani, L., Nasr-Eddine, M., Azouza, M., Abdellah, B., and Moadh, K. (2014, January 16\u201318). Modeling of silicon MEMS capacitive pressure sensor for biom\u00e9dical applications. Proceedings of the 9th International Design and Test Symposium (IDT), Algiers, Algeria.","DOI":"10.1109\/IDT.2014.7038625"},{"key":"ref_69","doi-asserted-by":"crossref","first-page":"201","DOI":"10.1016\/j.snb.2018.10.006","article-title":"Wireless pressure sensor integrated with a 3D printed polymer stent for smart health monitoring","volume":"280","author":"Park","year":"2019","journal-title":"Sens. Actuators B Chem."},{"key":"ref_70","doi-asserted-by":"crossref","first-page":"150","DOI":"10.1016\/S0924-4247(97)01764-0","article-title":"A fiber-optic pressure microsensor for biomedical applications","volume":"66","author":"Tohyama","year":"1998","journal-title":"Sens. Actuators A Phys."},{"key":"ref_71","doi-asserted-by":"crossref","first-page":"197","DOI":"10.1016\/0925-4005(95)85042-2","article-title":"Durable chemical sensors based on field-effect transistors","volume":"24","author":"Reinhoudt","year":"1995","journal-title":"Sens. Actuators B Chem."},{"key":"ref_72","doi-asserted-by":"crossref","first-page":"320","DOI":"10.1016\/S0925-4005(01)00833-4","article-title":"Multi-ion analysis based on versatile sensor head","volume":"78","author":"Chudy","year":"2001","journal-title":"Sens. Actuators B Chem."},{"key":"ref_73","doi-asserted-by":"crossref","first-page":"73","DOI":"10.1016\/S0003-2670(99)00177-4","article-title":"\u03b2-Lactamase label-based potentiometric biosensor for \u03b1-2 interferon detection","volume":"390","author":"Sergeyeva","year":"1999","journal-title":"Anal. Chim. Acta"},{"key":"ref_74","doi-asserted-by":"crossref","first-page":"821","DOI":"10.1016\/S0956-5663(02)00075-1","article-title":"An ISFET-based immunosensor for the detection of \u03b2-Bungarotoxin","volume":"17","author":"Selvanayagam","year":"2002","journal-title":"Biosens. Bioelectron."},{"key":"ref_75","doi-asserted-by":"crossref","first-page":"279","DOI":"10.1016\/S0925-4005(01)00826-7","article-title":"New technology for multi-sensor silicon needles for biomedical applications","volume":"78","author":"Errachid","year":"2001","journal-title":"Sens. Actuators B Chem."},{"key":"ref_76","doi-asserted-by":"crossref","first-page":"81","DOI":"10.1016\/j.sna.2019.04.039","article-title":"Wireless Implantable Sensors: From Lab to Technology Breakthrough Ambitions","volume":"294","author":"Young","year":"2019","journal-title":"Sens. Actuators A Phys."},{"key":"ref_77","doi-asserted-by":"crossref","unstructured":"Kobayashi, T., Makimoto, N., Oikawa, T., Wada, A., Funakubo, H., and Maeda, R. (2013, January 20\u201324). Linear actuation piezoelectric microcantilever using tetragonal composition PZT thin films. Proceedings of the IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS), Taipei, Taiwan.","DOI":"10.1109\/MEMSYS.2013.6474266"},{"key":"ref_78","unstructured":"Kobayashi, T., Oyama, S., Okada, H., Makimoto, N., Tanaka, K., Itoh, T., and Maeda, R. (February, January 29). An electrostatic field sensor driven by self-excited vibration of sensor\/actuator integrated piezoelectric micro cantilever. Proceedings of the IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS), Paris, France."},{"key":"ref_79","doi-asserted-by":"crossref","unstructured":"Feng, W., Hettiarachchi, R., Sato, S., Kakushima, K., Niwa, M., Iwai, H., Yamada, K., and Ohmori, K. (2011, January 2\u20135). Advantages of Silicon Nanowire MOSFETs over Planar Ones Investigated from the Viewpoints of Static and Noise Properties. Proceedings of the International Conference on Solid State Devices and Materials, Nagoya, Japan.","DOI":"10.7567\/SSDM.2011.D-7-3"},{"key":"ref_80","doi-asserted-by":"crossref","unstructured":"Zhu, H. (2017). Semiconductor Nanowire MOSFETs and Applications. Nanowires New Insights, 101.","DOI":"10.5772\/67446"},{"key":"ref_81","doi-asserted-by":"crossref","first-page":"131","DOI":"10.1016\/j.nantod.2011.02.001","article-title":"Silicon nanowire field-effect transistor-based biosensors for biomedical diagnosis and cellular recording investigation","volume":"6","author":"Chen","year":"2011","journal-title":"Nano Today"},{"key":"ref_82","doi-asserted-by":"crossref","first-page":"7425","DOI":"10.1039\/c3ra46272b","article-title":"Cell membrane electrical charge investigations by silicon nanowires incorporated field effect transistor (SiNWFET) suitable in cancer research","volume":"4","author":"Abdolahad","year":"2014","journal-title":"RSC Adv."},{"key":"ref_83","doi-asserted-by":"crossref","first-page":"1066","DOI":"10.1021\/nl072991l","article-title":"DNA sensing by silicon nanowire: Charge layer distance dependence","volume":"8","author":"Zhang","year":"2008","journal-title":"Nano Lett."},{"key":"ref_84","unstructured":"Jamaa, M.H.B., Carrara, S., Georgiou, J., Archontas, N., and De Micheli, G. (2009, January 26\u201330). Fabrication of memristors with poly-crystalline silicon nanowires. Proceedings of the 9th IEEE Conference on Nanotechnology (IEEE-NANO), Genoa, Italy."},{"key":"ref_85","doi-asserted-by":"crossref","first-page":"189","DOI":"10.1007\/s12668-015-0179-4","article-title":"Memristive biosensors for PSA-IgM detection","volume":"5","author":"Tzouvadaki","year":"2015","journal-title":"BioNanoScience"},{"key":"ref_86","doi-asserted-by":"crossref","first-page":"6208","DOI":"10.1109\/JSEN.2015.2456336","article-title":"Computational study on the electrical behavior of silicon nanowire memristive biosensors","volume":"15","author":"Tzouvadaki","year":"2015","journal-title":"IEEE Sens. J."},{"key":"ref_87","doi-asserted-by":"crossref","first-page":"370","DOI":"10.1016\/j.sna.2005.01.007","article-title":"Design and fabrication of a hybrid silicon three-axial force sensor for biomechanical applications","volume":"120","author":"Beccai","year":"2005","journal-title":"Sens. Actuators A Phys."},{"key":"ref_88","doi-asserted-by":"crossref","first-page":"204","DOI":"10.1016\/j.vacuum.2019.02.018","article-title":"Design and fabrication of MEMS based intracranial pressure sensor for neurons study","volume":"163","author":"Manikandan","year":"2019","journal-title":"Vacuum"},{"key":"ref_89","doi-asserted-by":"crossref","first-page":"2060","DOI":"10.1088\/0960-1317\/16\/10\/019","article-title":"Design optimization of a high performance silicon MEMS piezoresistive pressure sensor for biomedical applications","volume":"16","author":"Pramanik","year":"2006","journal-title":"J. Micromech. Microeng."},{"key":"ref_90","doi-asserted-by":"crossref","first-page":"172","DOI":"10.1016\/j.snb.2013.02.002","article-title":"A miniature fiber optic blood pressure sensor and its application in in vivo blood pressure measurements of a swine model","volume":"181","author":"Wu","year":"2013","journal-title":"Sens. Actuators B Chem."},{"key":"ref_91","doi-asserted-by":"crossref","first-page":"77","DOI":"10.1016\/S0925-4005(01)01045-0","article-title":"A sensor for blood cell counter using MEMS technology","volume":"83","author":"Satake","year":"2002","journal-title":"Sens. Actuators B Chem."},{"key":"ref_92","doi-asserted-by":"crossref","first-page":"71","DOI":"10.1038\/nature16492","article-title":"Bioresorbable silicon electronic sensors for the brain","volume":"530","author":"Kang","year":"2016","journal-title":"Nature"},{"key":"ref_93","doi-asserted-by":"crossref","first-page":"11682","DOI":"10.1073\/pnas.1605269113","article-title":"Ultrathin, transferred layers of thermally grown silicon dioxide as biofluid barriers for biointegrated flexible electronic systems","volume":"113","author":"Fang","year":"2016","journal-title":"Proc. Natl. Acad. Sci. USA"},{"key":"ref_94","doi-asserted-by":"crossref","first-page":"406","DOI":"10.1016\/j.mejo.2006.11.008","article-title":"Manufacturing and full characterization of silicon carbide-based multi-sensor micro-probes for biomedical applications","volume":"38","author":"Gabriel","year":"2007","journal-title":"Microelectron. J."},{"key":"ref_95","doi-asserted-by":"crossref","first-page":"37","DOI":"10.1038\/s41551-018-0300-4","article-title":"Bioresorbable pressure sensors protected with thermally grown silicon dioxide for the monitoring of chronic diseases and healing processes","volume":"3","author":"Shin","year":"2019","journal-title":"Nat. Biomed. Eng."},{"key":"ref_96","unstructured":"(2019, June 27). Disadvantages of Silicon Sensors. Available online: https:\/\/www.printedelectronicsworld.com\/articles\/52\/problems-with-silicon-chips."},{"key":"ref_97","unstructured":"(2019, June 27). Advantages and Disadvantages of Silicon. Available online: http:\/\/www.rfwireless-world.com\/Terminology\/Advantages-and-Disadvantages-of-Silicon.html."},{"key":"ref_98","doi-asserted-by":"crossref","unstructured":"Han, T., Kundu, S., Nag, A., and Xu, Y. (2019). 3D Printed Sensors for Biomedical Applications: A Review. Sensors, 19.","DOI":"10.3390\/s19071706"},{"key":"ref_99","doi-asserted-by":"crossref","first-page":"8","DOI":"10.1038\/s41528-018-0021-5","article-title":"Ultra-thin chips for high-performance flexible electronics","volume":"2","author":"Gupta","year":"2018","journal-title":"NPJ Flex. Electron."},{"key":"ref_100","doi-asserted-by":"crossref","unstructured":"Herbert, R., Kim, J.-H., Kim, Y., Lee, H., and Yeo, W.-H. (2018). Soft material-enabled, flexible hybrid electronics for medicine, healthcare, and human-machine interfaces. Materials, 11.","DOI":"10.3390\/ma11020187"},{"key":"ref_101","doi-asserted-by":"crossref","first-page":"1705759","DOI":"10.1002\/adma.201705759","article-title":"CMOS enabled microfluidic systems for healthcare based applications","volume":"30","author":"Khan","year":"2018","journal-title":"Adv. Mater."},{"key":"ref_102","doi-asserted-by":"crossref","unstructured":"Kang, S.-W. (2010). Application of Soft Lithography for Nano Functional Devices. Lithography, 403.","DOI":"10.5772\/8186"},{"key":"ref_103","doi-asserted-by":"crossref","first-page":"2231","DOI":"10.1002\/adfm.201000360","article-title":"Biodegradable porous silicon barcode nanowires with defined geometry","volume":"20","author":"Chiappini","year":"2010","journal-title":"Adv. Funct. Mater."},{"key":"ref_104","doi-asserted-by":"crossref","first-page":"264107","DOI":"10.1063\/1.3608155","article-title":"Optimal signal-to-noise ratio for silicon nanowire biochemical sensors","volume":"98","author":"Rajan","year":"2011","journal-title":"Appl. Phys. Lett."},{"key":"ref_105","unstructured":"(2019, June 27). Changing Wafer Size and the Move to 300 mm. Available online: http:\/\/smithsonianchips.si.edu\/ice\/cd\/CEICM\/SECTION7.pdf."},{"key":"ref_106","unstructured":"(2019, June 27). Medical Flexible Packaging Market Analysis by Material. Available online: https:\/\/www.grandviewresearch.com\/industry-analysis\/medical-flexible-packaging-market."},{"key":"ref_107","unstructured":"(2019, June 27). Global Silicon Carbide Market. Available online: https:\/\/flairinsights.com\/report-details\/global-silicon-carbide-market\/14663."},{"key":"ref_108","unstructured":"(2019, June 27). Silicon Carbide Power Semiconductors Market Worth. Available online: https:\/\/www.prnewswire.com\/news-releases\/silicon-carbide-power-semiconductors-market-worth-1-109-mn-by-2025-cagr-18-1-allied-market-research-881380442.html."}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/19\/13\/2908\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T13:02:47Z","timestamp":1760187767000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/19\/13\/2908"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2019,7,1]]},"references-count":108,"journal-issue":{"issue":"13","published-online":{"date-parts":[[2019,7]]}},"alternative-id":["s19132908"],"URL":"https:\/\/doi.org\/10.3390\/s19132908","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2019,7,1]]}}}