{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,12]],"date-time":"2025-10-12T03:44:58Z","timestamp":1760240698699,"version":"build-2065373602"},"reference-count":16,"publisher":"MDPI AG","issue":"17","license":[{"start":{"date-parts":[[2019,8,26]],"date-time":"2019-08-26T00:00:00Z","timestamp":1566777600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>Sound sensing finds wide applications in various fields, such as underwater detection, structural health monitoring, and medical diagnosis, to name just a few. Based on our previously developed MEMS-on-fiber sensors, showing the advantages of low cost, small volume, and high performance, a three-dimensional ultrasonic localization system employing four such sensors was established in this work. A time difference of arrival (TDOA) algorithm was utilized to analyze the acquired data and then calculate the accurate position of the ultrasonic signal source. Plenty of practical measurements were performed, and the derived localization deviation in the region of 2 m \u00d7 2 m \u00d7 1 m was about 2\u20135 mm. Outside this region, the deviation tended to increase due to the directional sensitivity existing in these sensors. As a result, for a more accurate localization requirement, more sensing probes are needed in order to depict a completely suitable application situation for MEMS technology.<\/jats:p>","DOI":"10.3390\/s19173696","type":"journal-article","created":{"date-parts":[[2019,8,26]],"date-time":"2019-08-26T04:38:23Z","timestamp":1566794303000},"page":"3696","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":3,"title":["Locating Ultrasonic Signals Employing MEMS-On-Fiber Sensors"],"prefix":"10.3390","volume":"19","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-8473-1462","authenticated-orcid":false,"given":"Wenrong","family":"Si","sequence":"first","affiliation":[{"name":"State Grid Shanghai Electric Power Research Institute, Shanghai 200437, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Chenzhao","family":"Fu","sequence":"additional","affiliation":[{"name":"State Grid Shanghai Electric Power Research Institute, Shanghai 200437, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Haoyong","family":"Li","sequence":"additional","affiliation":[{"name":"Key Laboratory of Micro\/Nano Systems for Aerospace (Ministry of Education), Northwestern Polytechnical University, Xi\u2019an 710072, China"},{"name":"Key Laboratory of Micro- and Nano-Electro-Mechanical Systems of Shaanxi Province, Northwestern Polytechnical University, Xi\u2019an 710072, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jiaming","family":"Lv","sequence":"additional","affiliation":[{"name":"Key Laboratory of Micro\/Nano Systems for Aerospace (Ministry of Education), Northwestern Polytechnical University, Xi\u2019an 710072, China"},{"name":"Key Laboratory of Micro- and Nano-Electro-Mechanical Systems of Shaanxi Province, Northwestern Polytechnical University, Xi\u2019an 710072, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Chaoyu","family":"Xiong","sequence":"additional","affiliation":[{"name":"Key Laboratory of Micro\/Nano Systems for Aerospace (Ministry of Education), Northwestern Polytechnical University, Xi\u2019an 710072, China"},{"name":"Key Laboratory of Micro- and Nano-Electro-Mechanical Systems of Shaanxi Province, Northwestern Polytechnical University, Xi\u2019an 710072, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Peng","family":"Yuan","sequence":"additional","affiliation":[{"name":"Xi\u2019an Maorong Power Equipment Co., Ltd., Xi\u2019an 710048, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yiting","family":"Yu","sequence":"additional","affiliation":[{"name":"Key Laboratory of Micro\/Nano Systems for Aerospace (Ministry of Education), Northwestern Polytechnical University, Xi\u2019an 710072, China"},{"name":"Key Laboratory of Micro- and Nano-Electro-Mechanical Systems of Shaanxi Province, Northwestern Polytechnical University, Xi\u2019an 710072, China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2019,8,26]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"032902","DOI":"10.1063\/1.4959078","article-title":"AlN-on-SOI platform-based micro-machined hydrophone","volume":"109","author":"Xu","year":"2016","journal-title":"Appl. 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