{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,6,9]],"date-time":"2026-06-09T01:41:31Z","timestamp":1780969291789,"version":"3.54.1"},"reference-count":24,"publisher":"MDPI AG","issue":"18","license":[{"start":{"date-parts":[[2019,9,5]],"date-time":"2019-09-05T00:00:00Z","timestamp":1567641600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100012166","name":"National Key Research and Development Program of China","doi-asserted-by":"publisher","award":["2017YFF0204800"],"award-info":[{"award-number":["2017YFF0204800"]}],"id":[{"id":"10.13039\/501100012166","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100012166","name":"National Key Research and Development Program of China","doi-asserted-by":"publisher","award":["2018YFB2001402"],"award-info":[{"award-number":["2018YFB2001402"]}],"id":[{"id":"10.13039\/501100012166","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100012226","name":"Fundamental Research Funds for the Central Universities","doi-asserted-by":"publisher","award":["DUT19RC(4)007"],"award-info":[{"award-number":["DUT19RC(4)007"]}],"id":[{"id":"10.13039\/501100012226","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100012226","name":"Fundamental Research Funds for the Central Universities","doi-asserted-by":"publisher","award":["DUT16TD20"],"award-info":[{"award-number":["DUT16TD20"]}],"id":[{"id":"10.13039\/501100012226","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["U1508211"],"award-info":[{"award-number":["U1508211"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>A robust laser measurement system (LMS), consisting of a sensor head and a detecting part, for simultaneously measuring five-degree-of-freedom (five-DOF) error motions of linear stages, is proposed and characterized. For the purpose of long-travel measurement, all possible error sources that would affect the measurement accuracy are considered. This LMS not only integrates the merits of error compensations for the laser beam drift, beam spot variation, detector sensitivity variation, and non-parallelism of dual-beam that have been resolved by the author\u2019s group before, but also eliminates the crosstalk errors among five-DOF error motions in this study. The feasibility and effectiveness of the designed LMS and modified measurement model are experimentally verified using a laboratory-built prototype. The experimental results show that the designed LSM has the capability of simultaneously measuring the five-DOF error motions of a linear stage up to one-meter travel with a linear error accuracy in sub-micrometer and an angular error accuracy in sub-arcsecond after compensation.<\/jats:p>","DOI":"10.3390\/s19183833","type":"journal-article","created":{"date-parts":[[2019,9,6]],"date-time":"2019-09-06T02:59:22Z","timestamp":1567738762000},"page":"3833","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":30,"title":["Error Analysis and Compensation of a Laser Measurement System for Simultaneously Measuring Five-Degree-of-Freedom Error Motions of Linear Stages"],"prefix":"10.3390","volume":"19","author":[{"given":"Yindi","family":"Cai","sequence":"first","affiliation":[{"name":"Key Laboratory for Micro\/Nano Technology and System of Liaoning Province, Dalian University of Technology, Dalian 116024, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Qi","family":"Sang","sequence":"additional","affiliation":[{"name":"Key Laboratory for Micro\/Nano Technology and System of Liaoning Province, Dalian University of Technology, Dalian 116024, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Zhi-Feng","family":"Lou","sequence":"additional","affiliation":[{"name":"Key Laboratory for Micro\/Nano Technology and System of Liaoning Province, Dalian University of Technology, Dalian 116024, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-1320-9412","authenticated-orcid":false,"given":"Kuang-Chao","family":"Fan","sequence":"additional","affiliation":[{"name":"Key Laboratory for Micro\/Nano Technology and System of Liaoning Province, Dalian University of Technology, Dalian 116024, China"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"1968","published-online":{"date-parts":[[2019,9,5]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"85","DOI":"10.1115\/1.2901643","article-title":"An On-Line Measurement Technique for Machine Volumetric Error Compensation","volume":"115","author":"Ni","year":"1993","journal-title":"J. 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Express"}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/19\/18\/3833\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T13:17:02Z","timestamp":1760188622000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/19\/18\/3833"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2019,9,5]]},"references-count":24,"journal-issue":{"issue":"18","published-online":{"date-parts":[[2019,9]]}},"alternative-id":["s19183833"],"URL":"https:\/\/doi.org\/10.3390\/s19183833","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2019,9,5]]}}}