{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,6,3]],"date-time":"2026-06-03T16:12:02Z","timestamp":1780503122077,"version":"3.54.1"},"reference-count":18,"publisher":"MDPI AG","issue":"19","license":[{"start":{"date-parts":[[2019,10,3]],"date-time":"2019-10-03T00:00:00Z","timestamp":1570060800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100001809","name":"NSFC","doi-asserted-by":"publisher","award":["51805154"],"award-info":[{"award-number":["51805154"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"name":"Open foundation of Project supported by State key laboratory of precision measuring technology and instruments","award":["pilab1805 and pilab1708"],"award-info":[{"award-number":["pilab1805 and pilab1708"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>A new type of array MEMS (Microelectro Mechanical Systems) vector hydrophone has been proposed to solve the left-right ambiguity problem that is commonly found in current ones. Meanwhile, the advantages of good sensitivity and low fabrication cost are maintained. The array MEMS vector hydrophone is integrated by four units oriented at different direction angles. By the aid of this kind of vector hydrophone, not only the exact direction of the sound source can be measured, but also the position obtained. The working principle of the array microstructure has been analyzed and simulated. The result shows that the position of the sound source can be well determined. The prototype of the hydrophone is fabricated based on standard MEMS technology, and its performance is tested in a standing wave tube and an anechoic tank. The testing results show that the array hydrophone exhibits a good consistency of all the four units and satisfactory performance. More importantly, this array hydrophone exhibits excellent ability of positioning with the relatively small angle error. Thus, a MEMS hydrophone with multiple functions and relatively high performance is realized, which has important theoretical and practical significance in relevant applications such as the small-size underwater vehicles.<\/jats:p>","DOI":"10.3390\/s19194282","type":"journal-article","created":{"date-parts":[[2019,10,3]],"date-time":"2019-10-03T03:41:27Z","timestamp":1570074087000},"page":"4282","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":8,"title":["Array MEMS Vector Hydrophone Oriented at Different Direction Angles"],"prefix":"10.3390","volume":"19","author":[{"given":"Mengran","family":"Liu","sequence":"first","affiliation":[{"name":"Hubei Key Laboratory of Modern Manufacturing Quantity Engineering, School of Mechanical Engineering, Hubei University of Technology, Wuhan, Hubei 430068, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Lei","family":"Nie","sequence":"additional","affiliation":[{"name":"Hubei Key Laboratory of Modern Manufacturing Quantity Engineering, School of Mechanical Engineering, Hubei University of Technology, Wuhan, Hubei 430068, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Shanqiang","family":"Li","sequence":"additional","affiliation":[{"name":"Hubei Key Laboratory of Modern Manufacturing Quantity Engineering, School of Mechanical Engineering, Hubei University of Technology, Wuhan, Hubei 430068, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Wen","family":"Jia","sequence":"additional","affiliation":[{"name":"Hubei Key Laboratory of Modern Manufacturing Quantity Engineering, School of Mechanical Engineering, Hubei University of Technology, Wuhan, Hubei 430068, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-2772-3797","authenticated-orcid":false,"given":"Lansheng","family":"Zhang","sequence":"additional","affiliation":[{"name":"Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Guojun","family":"Zhang","sequence":"additional","affiliation":[{"name":"Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-1762-9246","authenticated-orcid":false,"given":"Wendong","family":"Zhang","sequence":"additional","affiliation":[{"name":"Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"1968","published-online":{"date-parts":[[2019,10,3]]},"reference":[{"key":"ref_1","first-page":"650","article-title":"An overview of underwater acoustic communications","volume":"43","author":"Ning","year":"2014","journal-title":"Physics"},{"key":"ref_2","first-page":"233","article-title":"Direction Estimation by Single Vector Hydrophone","volume":"23","author":"Chen","year":"2004","journal-title":"Tech. Acous."},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"9195","DOI":"10.1364\/AO.57.009195","article-title":"Three-component homovibrational vector hydrophone based on fiber Bragg grating F-P interferometry","volume":"50","author":"Jin","year":"2018","journal-title":"Appl. Opt."},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"1214","DOI":"10.3788\/CJL20083508.1214","article-title":"Pressure Optical Fiber Vector Hydrophone Made of Thin-Wailed Cylindrical Shell","volume":"35","author":"Chong","year":"2008","journal-title":"Chin. J. Lasers"},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"126846","DOI":"10.1016\/j.snb.2019.126846","article-title":"Ordered gold nanoparticle arrays on the tip of silver wrinkled structures for single molecule detection","volume":"300","author":"Guo","year":"2019","journal-title":"Sens. Actuators B"},{"key":"ref_6","first-page":"7326919","article-title":"Fabrication and Characterization of High-Sensitivity Underwater Acoustic Multimedia Communication Devices with Thick Composite PZT Films","volume":"300","author":"Liu","year":"2017","journal-title":"J. Sens."},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"459","DOI":"10.1007\/s00542-011-1272-4","article-title":"Advancements in technology and design of NEMS vector hydrophone","volume":"17","author":"Guan","year":"2011","journal-title":"Microsyst. Technol."},{"key":"ref_8","doi-asserted-by":"crossref","unstructured":"Wang, R., Liu, Y., Bai, B., Guo, N., Guo, J., Wang, X., Liu, M., Zhang, G., Zhang, B., and Xue, C. (2016). Wide-frequency-bandwidth whisker-inspired MEMS vector hydrophone encapsulated with parylene. J. Phys. D Appl. Phys., 49.","DOI":"10.1088\/0022-3727\/49\/7\/07LT02"},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"607","DOI":"10.1016\/j.ymssp.2017.11.027","article-title":"Design and optimization of stress centralized MEMS vector hydrophone with high sensitivity at low frequency","volume":"104","author":"Zhang","year":"2018","journal-title":"Mech. Syst. Sig. Process."},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"142","DOI":"10.1016\/j.sna.2018.05.005","article-title":"Design and implementation of two-component cilia cylinder MEMS vector hydrophone","volume":"277","author":"Xu","year":"2018","journal-title":"Sens. Actuators A"},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"231","DOI":"10.1016\/j.sna.2018.01.061","article-title":"Realization of a composite MEMS hydrophone without left-right ambiguity","volume":"272","author":"Liu","year":"2018","journal-title":"Sens. Actuators A"},{"key":"ref_12","unstructured":"Du, G.H., Zhu, Z.M., and Gong, X.F. (2001). Acoustic Foundation, Nanjing University Press."},{"key":"ref_13","unstructured":"Shen, H. (1990). Principies of Underwater Sound, Harbin Engineering University Press (Harbin Institute of Ship Engineering Press)."},{"key":"ref_14","unstructured":"Gad-el-Hak, M. (2010). MEMS Design and Fabrication, China Machine Press."},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"761","DOI":"10.1109\/JMEMS.2003.820936","article-title":"Etch rates for micromachining- processing-part II","volume":"12","author":"Williams","year":"2003","journal-title":"J. Microelectromech. Syst."},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"989","DOI":"10.1109\/JSEN.2015.2494617","article-title":"Design of the Monolithic Integrated Array MEMS Hydrophone","volume":"16","author":"Mengran","year":"2016","journal-title":"IEEE Sens. J."},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"303","DOI":"10.1108\/SR-11-2014-0744","article-title":"Design of MEMS Bionic Vector Hydrophone Based on NBR Sound-transparent Cap","volume":"35","author":"Liu","year":"2015","journal-title":"Sens. Rev."},{"key":"ref_18","unstructured":"Zhen, S.J., Yuan, W.J., and Liao, R.X. (1995). Acoustic Measurement and Testing Technology, Harbin Institute of Technology Press."}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/19\/19\/4282\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T13:27:13Z","timestamp":1760189233000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/19\/19\/4282"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2019,10,3]]},"references-count":18,"journal-issue":{"issue":"19","published-online":{"date-parts":[[2019,10]]}},"alternative-id":["s19194282"],"URL":"https:\/\/doi.org\/10.3390\/s19194282","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2019,10,3]]}}}