{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,6,5]],"date-time":"2026-06-05T13:32:10Z","timestamp":1780666330135,"version":"3.54.1"},"reference-count":40,"publisher":"MDPI AG","issue":"19","license":[{"start":{"date-parts":[[2019,10,3]],"date-time":"2019-10-03T00:00:00Z","timestamp":1570060800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>In this paper, a three-dimensional finite element analysis (3D-FEA) model for shear horizontal surface acoustic wave (SH-SAW) torque sensors is presented. Torque sensors play a significant role in various fields to ensure a reliable torque transmission in drivelines. Featured with the advantages of high propagation velocity, large Q-value, and good power capacity, SH-SAW based torque sensors are promising but very few studies have been carried out. In order to develop a successful sensor, understanding the characteristics of SH-SAWs produced on piezoelectric substrates and torque sensing modes is indispensable. Therefore, in this study, we first investigated the effect on the generation of waves when different Y-cut quartz substrates are engaged. Thereafter, analyses and comparisons, regarding the effect on the polarized displacement, wave guidance, and wave mode, were conducted for different configurations of wave-guide layer thickness to wavelength ratios (hlayer\/\u03bb) and materials. Results show that Y-cut quartz at an angle close to 36\u00b0 with a gold (Au) layer varying from hAu\/\u03bb = 0.02 to 0.03 thickness could be the most effective configuration for the excitation of SH-SAWs, compared to other combinations using platinum (Pt), titanium (Ti) and silicon dioxide (SiO2). Finally, based on the FEA SH-SAW torque sensor model configuring with a Y + 36\u00b0 quartz substrate and 0.025 \u03bb-thick gold layer, the relationship between the applied torque and sensed voltage was examined, which shows a perfect linearity demonstrating the performance of the sensors.<\/jats:p>","DOI":"10.3390\/s19194290","type":"journal-article","created":{"date-parts":[[2019,10,4]],"date-time":"2019-10-04T04:12:52Z","timestamp":1570162372000},"page":"4290","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":14,"title":["A Three-Dimensional Finite Element Analysis Model for SH-SAW Torque Sensors"],"prefix":"10.3390","volume":"19","author":[{"ORCID":"https:\/\/orcid.org\/0000-0001-7957-2009","authenticated-orcid":false,"given":"Chao","family":"Jiang","sequence":"first","affiliation":[{"name":"Department of Mechanical Engineering, Inha University, Incheon 22212, Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Yanqin","family":"Chen","sequence":"additional","affiliation":[{"name":"Department of Mechanical Engineering, Inha University, Incheon 22212, Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Chongdu","family":"Cho","sequence":"additional","affiliation":[{"name":"Department of Mechanical Engineering, Inha University, Incheon 22212, Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"1968","published-online":{"date-parts":[[2019,10,3]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"314","DOI":"10.1063\/1.1754276","article-title":"Direct piezoelectric coupling to surface elastic waves","volume":"7","author":"White","year":"1965","journal-title":"Appl. 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