{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,12]],"date-time":"2025-10-12T03:48:40Z","timestamp":1760240920941,"version":"build-2065373602"},"reference-count":22,"publisher":"MDPI AG","issue":"19","license":[{"start":{"date-parts":[[2019,10,8]],"date-time":"2019-10-08T00:00:00Z","timestamp":1570492800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>This paper reports on an improved optical waveguide microcantilever sensor with high sensitivity. To improve the sensitivity, a buffer was introduced into the connection of the input waveguide and optical waveguide cantilever by extending the input waveguide to reduce the coupling loss of the junction. The buffer-associated optical losses were examined for different cantilever thicknesses. The optimum length of the buffer was found to be 0.97 \u03bcm for a cantilever thickness of 300 nm. With this configuration, the optical loss was reduced to about 40%, and the maximum sensitivity was more than twice that of the conventional structure.<\/jats:p>","DOI":"10.3390\/s19194346","type":"journal-article","created":{"date-parts":[[2019,10,9]],"date-time":"2019-10-09T03:14:33Z","timestamp":1570590873000},"page":"4346","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":5,"title":["Improved Optical Waveguide Microcantilever for Integrated Nanomechanical Sensor"],"prefix":"10.3390","volume":"19","author":[{"given":"Yachao","family":"Jing","sequence":"first","affiliation":[{"name":"Key Laboratory of All Optical Network and Advanced Telecommunication Network, Ministry of Education, Institute of Lightwave Technology, Beijing Jiaotong University, Beijing 100044, China"}]},{"given":"Guofang","family":"Fan","sequence":"additional","affiliation":[{"name":"Key Laboratory of All Optical Network and Advanced Telecommunication Network, Ministry of Education, Institute of Lightwave Technology, Beijing Jiaotong University, Beijing 100044, China"}]},{"given":"Rongwei","family":"Wang","sequence":"additional","affiliation":[{"name":"Key Laboratory of All Optical Network and Advanced Telecommunication Network, Ministry of Education, Institute of Lightwave Technology, Beijing Jiaotong University, Beijing 100044, China"}]},{"given":"Zeping","family":"Zhang","sequence":"additional","affiliation":[{"name":"Key Laboratory of All Optical Network and Advanced Telecommunication Network, Ministry of Education, Institute of Lightwave Technology, Beijing Jiaotong University, Beijing 100044, China"}]},{"given":"Xiaoyu","family":"Cai","sequence":"additional","affiliation":[{"name":"Shanghai Institute of Measurement and Testing Technology, National Center of Measurement and Testing for East China, National Center of Testing Technology, Shanghai 201203, China"}]},{"given":"Jiasi","family":"Wei","sequence":"additional","affiliation":[{"name":"Shanghai Institute of Measurement and Testing Technology, National Center of Measurement and Testing for East China, National Center of Testing Technology, Shanghai 201203, China"}]},{"given":"Xin","family":"Chen","sequence":"additional","affiliation":[{"name":"Department of Instrument Science and Engineering, Shanghai Jiao Tong University, Shanghai 200240, China"}]},{"given":"Hongyu","family":"Li","sequence":"additional","affiliation":[{"name":"College of Mechanical and Electronic Engineering, Shandong University of Science and Technology, Qingdao 266590, China"}]},{"given":"Yuan","family":"Li","sequence":"additional","affiliation":[{"name":"Shanghai Institute of Measurement and Testing Technology, National Center of Measurement and Testing for East China, National Center of Testing Technology, Shanghai 201203, China"}]}],"member":"1968","published-online":{"date-parts":[[2019,10,8]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"923","DOI":"10.1016\/j.rinp.2018.08.010","article-title":"Simulation fabrication and characterization of micro-cantilever array based ozone sensor","volume":"10","author":"Amiri","year":"2018","journal-title":"Results Phys."},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"196","DOI":"10.1016\/j.trac.2005.09.006","article-title":"Nanomechanical biosensors: A new sensing tool","volume":"25","author":"Carrascosa","year":"2006","journal-title":"TrAC Trends Anal. 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[Ph.D. Thesis, MIC-Department of Micro and Nanotechnology, Technical University of Denmark]."}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/19\/19\/4346\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T13:28:18Z","timestamp":1760189298000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/19\/19\/4346"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2019,10,8]]},"references-count":22,"journal-issue":{"issue":"19","published-online":{"date-parts":[[2019,10]]}},"alternative-id":["s19194346"],"URL":"https:\/\/doi.org\/10.3390\/s19194346","relation":{},"ISSN":["1424-8220"],"issn-type":[{"type":"electronic","value":"1424-8220"}],"subject":[],"published":{"date-parts":[[2019,10,8]]}}}