{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,6,20]],"date-time":"2026-06-20T22:34:05Z","timestamp":1781994845810,"version":"3.54.5"},"reference-count":17,"publisher":"MDPI AG","issue":"2","license":[{"start":{"date-parts":[[2020,1,14]],"date-time":"2020-01-14T00:00:00Z","timestamp":1578960000000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>We propose the use of aluminum nitride (AlN) membranes acting as sensitive elements for the surface acoustic wave (SAW)-based acceleration measurement. The proposed solution is compared against existing prototypes based on the use of quartz (SiO2)\/lithium niobate (LiNbO3) membranes that are characterized by extensive anisotropic properties. Using COMSOL Multiphysics 5.4 computer simulations we show explicitly that sensitive elements based on less anisotropic AlN membranes overcome both the low sensitivity limitations of SiO2 and low temperature stability of LiNbO3. Moreover, AlN membranes exhibit nearly double the robustness against irreversible mechanical deformations when compared against SiO2, which in turn allows for further 1.5-fold sensitivity enhancement over LiNbO3 based sensors. Taking into account their acceptable frequency characteristics, we thus believe that the AlN membranes are a good candidate forsensitive elements especially for high acceleration measurements.<\/jats:p>","DOI":"10.3390\/s20020464","type":"journal-article","created":{"date-parts":[[2020,1,15]],"date-time":"2020-01-15T03:20:22Z","timestamp":1579058422000},"page":"464","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":10,"title":["Comparison of AlN vs. SIO2\/LiNbO3 Membranes as Sensitive Elements for the SAW-Based Acceleration Measurement: Overcoming the Anisotropy Effects"],"prefix":"10.3390","volume":"20","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-4047-7757","authenticated-orcid":false,"given":"Sergey","family":"Yu. Shevchenko","sequence":"first","affiliation":[{"name":"Department of Laser Measuring and Navigation Systems, Saint Petersburg Electrotechnical University, 5 Prof. Popov Str., 197376 Saint Petersburg, Russia"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-8274-1475","authenticated-orcid":false,"given":"Denis","family":"A. Mikhailenko","sequence":"additional","affiliation":[{"name":"Department of Laser Measuring and Navigation Systems, Saint Petersburg Electrotechnical University, 5 Prof. Popov Str., 197376 Saint Petersburg, Russia"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-6099-8867","authenticated-orcid":false,"given":"Oleg A.","family":"Markelov","sequence":"additional","affiliation":[{"name":"Department of Laser Measuring and Navigation Systems, Saint Petersburg Electrotechnical University, 5 Prof. Popov Str., 197376 Saint Petersburg, Russia"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"1968","published-online":{"date-parts":[[2020,1,14]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","unstructured":"Morgan, D., and Paige, E.G.S. (2007). Propagation effects and materials. Surface Acoustic Wave Filters, Academic Press. [2nd ed.].","DOI":"10.1016\/B978-012372537-0\/50006-6"},{"key":"ref_2","doi-asserted-by":"crossref","unstructured":"Mujahid, A., and Dickert, F.L. (2017). Surface Acoustic Wave (SAW) for Chemical Sensing Applications of Recognition Layers. Sensors, 17.","DOI":"10.3390\/s17122716"},{"key":"ref_3","doi-asserted-by":"crossref","unstructured":"Devkota, J., Ohodnicki, P.R., and Greve, D.W. (2017). SAW Sensors for Chemical Vapors and Gases. Sensors, 17.","DOI":"10.3390\/s17040801"},{"key":"ref_4","unstructured":"Nikolaou, I., Hallil, H., Deligeorgis, G., Conedera, V., Garcia, H., Dejous, C., and Rebiere, D. (September, January 31). Novel SAW gas sensor based on graphene. Proceedings of the 30th Symposium on Microelectronics Technology and Devices (SBMicro), Salvador, Brazil."},{"key":"ref_5","doi-asserted-by":"crossref","unstructured":"Muller, A., Konstantinidis, G., Stefanescu, A., Giangu, I., Stavrinidis, A., Pasteanu, M., Stavrinidis, G., and Dinescu, A. (2017, January 18\u201322). Pressure and temperature determination with micromachined GAN\/SI SAW based resonators operating in the GHZ frequency range. Proceedings of the 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Kaohsiung, Taiwan.","DOI":"10.1109\/TRANSDUCERS.2017.7994238"},{"key":"ref_6","doi-asserted-by":"crossref","unstructured":"Silva, D., Mendes, C.J., Pereira, A.B., Gegot, F., and Alves, L.N. (2017). Measuring Torque and Temperature in a Rotating Shaft Using Commercial SAW Sensors. Sensors, 17.","DOI":"10.3390\/s17071547"},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"337","DOI":"10.1049\/el.2009.3129","article-title":"Pressure and temperature microsensor based on surface acoustic wave","volume":"Volume 45","author":"Li","year":"2009","journal-title":"Electronics Letters"},{"key":"ref_8","doi-asserted-by":"crossref","unstructured":"Yu, F., Chen, F., Hou, S., Wang, H., Wang, Y., Tian, S., Jiang, C., Li, Y., Cheng, X., and Zhao, O. (2016, January 21\u201324). High temperature piezoelectric single crystals: Recent developments. Proceedings of the Symposium on Piezoelectricity, Acoustic Waves and Device Applications (SPAWDA), Xi\u2019an, China.","DOI":"10.1109\/SPAWDA.2016.7829944"},{"key":"ref_9","doi-asserted-by":"crossref","unstructured":"Hayashi, J., Suzuki, M., Yonai, T., Yamaya, K., Kakio, S., Kishida, K., Asakawa, S., Kuwae, H., and Mizuno, J. (2018, January 22\u201325). Longitudinal Leaky Surface Acoustic Wave with Low Attenuation on LiTaO3 Thin Plate Bonded to Quartz Substrate. Proceedings of the IEEE International Ultrasonics Symposium (IUS), Kobe, Japan.","DOI":"10.1109\/ULTSYM.2018.8579715"},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"1375","DOI":"10.1109\/TUFFC.2017.2734282","article-title":"Rayleigh SAW-Assisted SH-SAW Immunosensor on X-Cut 148-Y LiTaO3","volume":"64","author":"Kogai","year":"2017","journal-title":"IEEE Trans. Ultrason. Ferroelectr. Freq. Control"},{"key":"ref_11","doi-asserted-by":"crossref","unstructured":"Cai, F., Li, H., Ke, Y., Tian, Y., Luo, W., He, S., and Hu, B. (2017, January 27\u201330). Sensitivity analysis of langasite surface acoustic wave pressure sensors. Proceedings of the 2017 Symposium on Piezoelectricity, Acoustic Waves and Device Applications (SPAWDA), Chengdu, China.","DOI":"10.1109\/SPAWDA.2017.8340291"},{"key":"ref_12","doi-asserted-by":"crossref","unstructured":"Shevchenko, S.Y., Khivrich, M.A., and Markelov, M.A. (2019). Ring-Shaped Sensitive Element Design for Acceleration Measurements: Overcoming the Limitations of Angular-Shaped Sensors. Electronics, 8.","DOI":"10.3390\/electronics8020141"},{"key":"ref_13","doi-asserted-by":"crossref","unstructured":"Lukyanov, D., Shevchenko, S., Kukaev, A., Filippova, E., and Safronov, D. (2014, January 7\u201328). Micromechanical accelerometers based on surface acoustic waves. Proceedings of the NORCHIP 2014\u201432nd NORCHIP Conference: The Nordic Microelectronics Event, Tampere, Finland.","DOI":"10.1109\/NORCHIP.2014.7004701"},{"key":"ref_14","doi-asserted-by":"crossref","unstructured":"Lukyanov, D., Shevchenko, S., Kukaev, A., Filippova, E., and Safronov, D. (November, January 30). Microaccelerometer based on surface acoustic waves. Proceedings of the 2014 Symposium on Piezoelectricity, Acoustic Waves and Device Applications, Beijing, China.","DOI":"10.1109\/SPAWDA.2014.6998515"},{"key":"ref_15","doi-asserted-by":"crossref","unstructured":"Shevchenko, S., Kukaev, A., Khivrich, M., and Lukyanov, D. (2018). Surface-acoustic-wave sensor design for acceleration measurement. Sensors, 18.","DOI":"10.3390\/s18072301"},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"126103","DOI":"10.1063\/1.3272027","article-title":"Ring waveguid resonator on surface acoustic waves: First experiments","volume":"106","author":"Biryukov","year":"2009","journal-title":"J. Appl. Phys."},{"key":"ref_17","doi-asserted-by":"crossref","unstructured":"Biryukov, S.V., Schmidt, H., and Weihnacht, M. (2010, January 11\u201314). Single-mode ring waveguide resonator on SAW. Proceedings of the Single-Mode Ring Waveguide Resonator on SAW, San Diego, CA, USA.","DOI":"10.1109\/ULTSYM.2010.5935471"}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/20\/2\/464\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,13]],"date-time":"2025-10-13T13:42:58Z","timestamp":1760362978000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/20\/2\/464"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2020,1,14]]},"references-count":17,"journal-issue":{"issue":"2","published-online":{"date-parts":[[2020,1]]}},"alternative-id":["s20020464"],"URL":"https:\/\/doi.org\/10.3390\/s20020464","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2020,1,14]]}}}