{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,5,13]],"date-time":"2026-05-13T21:41:05Z","timestamp":1778708465248,"version":"3.51.4"},"reference-count":42,"publisher":"MDPI AG","issue":"3","license":[{"start":{"date-parts":[[2020,1,22]],"date-time":"2020-01-22T00:00:00Z","timestamp":1579651200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/100014132","name":"European Metrology Programme for Innovation and Research","doi-asserted-by":"publisher","award":["17IND05 MicroProbes"],"award-info":[{"award-number":["17IND05 MicroProbes"]}],"id":[{"id":"10.13039\/100014132","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>In this study, we investigate the performance of two piezoresistive micro-electro-mechanical system (MEMS)-based silicon cantilever sensors for measuring target analytes (i.e., ultrafine particulate matters). We use two different types of cantilevers with geometric dimensions of 1000 \u00d7 170 \u00d7 19.5 \u00b5m3 and 300 \u00d7 100 \u00d7 4 \u00b5m3, which refer to the 1st and 2nd types of cantilevers, respectively. For the first case, the cantilever is configured to detect the fundamental in-plane bending mode and is actuated using a resistive heater. Similarly, the second type of cantilever sensor is actuated using a meandering resistive heater (bimorph) and is designed for out-of-plane operation. We have successfully employed these two cantilevers to measure and monitor the changes of mass concentration of carbon nanoparticles in air, provided by atomizing suspensions of these nanoparticles into a sealed chamber, ranging from 0 to several tens of \u00b5g\/m3 and oversize distributions from ~10 nm to ~350 nm. Here, we deploy both types of cantilever sensors and operate them simultaneously with a standard laboratory system (Fast Mobility Particle Sizer, FMPS, TSI 3091) as a reference.<\/jats:p>","DOI":"10.3390\/s20030618","type":"journal-article","created":{"date-parts":[[2020,1,22]],"date-time":"2020-01-22T11:17:57Z","timestamp":1579691877000},"page":"618","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":22,"title":["In-Plane and Out-of-Plane MEMS Piezoresistive Cantilever Sensors for Nanoparticle Mass Detection"],"prefix":"10.3390","volume":"20","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-2271-2792","authenticated-orcid":false,"given":"Andi","family":"Setiono","sequence":"first","affiliation":[{"name":"Institute of Semiconductor Technology (IHT) and Laboratory of Emerging Nanometrology (LENA), Technische Universit\u00e4t Braunschweig, 38106 Braunschweig, Germany"},{"name":"Research Center for Physics, Indonesian Institute of Sciences (LIPI), Tangerang Selatan 15314, Indonesia"}]},{"given":"Maik","family":"Bertke","sequence":"additional","affiliation":[{"name":"Institute of Semiconductor Technology (IHT) and Laboratory of Emerging Nanometrology (LENA), Technische Universit\u00e4t Braunschweig, 38106 Braunschweig, Germany"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-3927-2439","authenticated-orcid":false,"given":"Wilson Ombati","family":"Nyang\u2019au","sequence":"additional","affiliation":[{"name":"Institute of Semiconductor Technology (IHT) and Laboratory of Emerging Nanometrology (LENA), Technische Universit\u00e4t Braunschweig, 38106 Braunschweig, Germany"},{"name":"Department of Metrology, Kenya Bureau of Standards (KEBS), Nairobi 00200, Kenya"}]},{"given":"Jiushuai","family":"Xu","sequence":"additional","affiliation":[{"name":"Institute of Semiconductor Technology (IHT) and Laboratory of Emerging Nanometrology (LENA), Technische Universit\u00e4t Braunschweig, 38106 Braunschweig, Germany"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-1027-9968","authenticated-orcid":false,"given":"Michael","family":"Fahrbach","sequence":"additional","affiliation":[{"name":"Institute of Semiconductor Technology (IHT) and Laboratory of Emerging Nanometrology (LENA), Technische Universit\u00e4t Braunschweig, 38106 Braunschweig, Germany"}]},{"given":"Ina","family":"Kirsch","sequence":"additional","affiliation":[{"name":"Fraunhofer Wilhelm-Klauditz-Institut (WKI), 38108 Braunschweig, Germany"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-8704-3702","authenticated-orcid":false,"given":"Erik","family":"Uhde","sequence":"additional","affiliation":[{"name":"Fraunhofer Wilhelm-Klauditz-Institut (WKI), 38108 Braunschweig, Germany"}]},{"given":"Alexander","family":"Deutschinger","sequence":"additional","affiliation":[{"name":"SCL-Sensor.Tech. Fabrication GmbH, 1220 Vienna, Austria"}]},{"given":"Ernest J.","family":"Fantner","sequence":"additional","affiliation":[{"name":"SCL-Sensor.Tech. Fabrication GmbH, 1220 Vienna, Austria"}]},{"given":"Christian H.","family":"Schwalb","sequence":"additional","affiliation":[{"name":"GETec Microscopy GmbH, 1220 Vienna, Austria"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-4522-3625","authenticated-orcid":false,"given":"Hutomo Suryo","family":"Wasisto","sequence":"additional","affiliation":[{"name":"Institute of Semiconductor Technology (IHT) and Laboratory of Emerging Nanometrology (LENA), Technische Universit\u00e4t Braunschweig, 38106 Braunschweig, Germany"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-5801-813X","authenticated-orcid":false,"given":"Erwin","family":"Peiner","sequence":"additional","affiliation":[{"name":"Institute of Semiconductor Technology (IHT) and Laboratory of Emerging Nanometrology (LENA), Technische Universit\u00e4t Braunschweig, 38106 Braunschweig, Germany"}]}],"member":"1968","published-online":{"date-parts":[[2020,1,22]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"11545","DOI":"10.5194\/acp-19-11545-2019","article-title":"Fossil fuel combustion and biomass burning sources of global black carbon from GEOS-Chem simulation and carbon isotope measurements","volume":"19","author":"Qi","year":"2019","journal-title":"Atmos. 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