{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,4,1]],"date-time":"2026-04-01T18:18:46Z","timestamp":1775067526298,"version":"3.50.1"},"reference-count":58,"publisher":"MDPI AG","issue":"3","license":[{"start":{"date-parts":[[2020,1,22]],"date-time":"2020-01-22T00:00:00Z","timestamp":1579651200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100002855","name":"Ministry of Science and Technology of the People's Republic of China","doi-asserted-by":"publisher","award":["2016YFC0201000"],"award-info":[{"award-number":["2016YFC0201000"]}],"id":[{"id":"10.13039\/501100002855","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["61673368"],"award-info":[{"award-number":["61673368"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["91544218"],"award-info":[{"award-number":["91544218"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>Micro-Cantilever (MCL) is a thin film structure that is applied for aerosol particle mass sensing. Several modifications to the rectangular MCL (length-to-width ratio, slots at the anchor, serrations at its side edges) are made to deduce the role and influence of the shape of rectangular MCL-based aerosol mass sensors and reduce gas damping. A finite element fluid-structure interaction model was used to investigate the performance of MCL. It is found that (I) the mass sensitivity and quality factor decline with the increasing of length-to-width ratio which alters the resonant frequency of the MCL. The optimum conditions, including the length-to-width ratio (\u03c3lw = 5) and resonant frequency (f0 = 540.7 kHz) of the MCL, are obtained with the constant surface area (S = 45,000 \u03bcm2) in the frequency domain ranging from 0 to 600 kHz. (II) The slots can enhance the read-out signal and bring a small Q factor drop. (III) The edge serrations on MCL significantly reduce the gas damping. The results provide a reference for the design of aerosol mass sensor, which makes it possible to develop aerosol mass sensor with high frequency, sensitivity, and quality.<\/jats:p>","DOI":"10.3390\/s20030626","type":"journal-article","created":{"date-parts":[[2020,1,22]],"date-time":"2020-01-22T11:17:57Z","timestamp":1579691877000},"page":"626","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":8,"title":["Simulation-Based Design and Optimization of Rectangular Micro-Cantilever-Based Aerosols Mass Sensor"],"prefix":"10.3390","volume":"20","author":[{"given":"Feng","family":"Xu","sequence":"first","affiliation":[{"name":"State Key Laboratory of Transducer Technology, Key Laboratory of Biomimetic Sensing and Advanced Robot Technology of Anhui Province, Institute of Intelligent Machines, Chinese Academy of Sciences, Hefei 230031, China"},{"name":"Science Island branch of Graduate School, University of Science and Technology of China, Hefei 230009, China"}]},{"given":"Yuliang","family":"Wei","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Transducer Technology, Key Laboratory of Biomimetic Sensing and Advanced Robot Technology of Anhui Province, Institute of Intelligent Machines, Chinese Academy of Sciences, Hefei 230031, China"},{"name":"Science Island branch of Graduate School, University of Science and Technology of China, Hefei 230009, China"}]},{"given":"Shiyuan","family":"Bian","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Transducer Technology, Key Laboratory of Biomimetic Sensing and Advanced Robot Technology of Anhui Province, Institute of Intelligent Machines, Chinese Academy of Sciences, Hefei 230031, China"},{"name":"Science Island branch of Graduate School, University of Science and Technology of China, Hefei 230009, China"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-8531-5279","authenticated-orcid":false,"given":"Huanqin","family":"Wang","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Transducer Technology, Key Laboratory of Biomimetic Sensing and Advanced Robot Technology of Anhui Province, Institute of Intelligent Machines, Chinese Academy of Sciences, Hefei 230031, China"}]},{"given":"Da-Ren","family":"Chen","sequence":"additional","affiliation":[{"name":"Particle Laboratory, Department of Mechanical and Nuclear Engineering, Virginia Commonwealth University, 401 West Main Street, Richmond, VA 23220, USA"}]},{"given":"Deyi","family":"Kong","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Transducer Technology, Key Laboratory of Biomimetic Sensing and Advanced Robot Technology of Anhui Province, Institute of Intelligent Machines, Chinese Academy of Sciences, Hefei 230031, China"}]}],"member":"1968","published-online":{"date-parts":[[2020,1,22]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"42","DOI":"10.1016\/j.jaerosci.2017.09.008","article-title":"Aerosol mass concentration measurements: Recent advancements of real-time nano\/micro systems","volume":"114","author":"Soysal","year":"2017","journal-title":"J. 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