{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,2,20]],"date-time":"2026-02-20T04:46:58Z","timestamp":1771562818723,"version":"3.50.1"},"reference-count":24,"publisher":"MDPI AG","issue":"3","license":[{"start":{"date-parts":[[2020,1,27]],"date-time":"2020-01-27T00:00:00Z","timestamp":1580083200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>A digital closed-loop system design of a microelectromechanical systems (MEMS) disk resonator gyroscope (DRG) is proposed in this paper. Vibration models with non-ideal factors are provided based on the structure characteristics and operation mode of the sensing element. The DRG operates in force balance mode with four control loops. A closed self-excited loop realizes stable vibration amplitude on the basis of peak detection technology and phase control loop. Force-to-rebalance technology is employed for the closed sense loop. A high-frequency carrier loaded on an anchor weakens the effect of parasitic capacitances coupling. The signal detected by the charge amplifier is demodulated and converted into a digital output for subsequent processing. Considering compatibility with digital circuits and output precision demands, a low passband sigma-delta (\u03a3\u0394) analog-to-digital converter (ADC) is implemented with a 111.8dB signal-to-noise ratio (SNR). The analog front-end and digital closed self-excited loop is manufactured with a standard 0.35 \u00b5m complementary metal-oxide-semiconductor (CMOS) technology. The experimental results show a bias instability of 2.1 \u00b0\/h and a nonlinearity of 0.035% over the \u00b1 400\u00b0 full-scale range.<\/jats:p>","DOI":"10.3390\/s20030687","type":"journal-article","created":{"date-parts":[[2020,1,27]],"date-time":"2020-01-27T07:41:11Z","timestamp":1580110871000},"page":"687","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":21,"title":["A Digital Closed-Loop Sense MEMS Disk Resonator Gyroscope Circuit Design Based on Integrated Analog Front-end"],"prefix":"10.3390","volume":"20","author":[{"given":"Yihang","family":"Wang","sequence":"first","affiliation":[{"name":"MEMS center, Harbin Institute of Technology, Harbin 150001, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Qiang","family":"Fu","sequence":"additional","affiliation":[{"name":"MEMS center, Harbin Institute of Technology, Harbin 150001, China"},{"name":"Key Laboratory of Micro-structures Manufacturing (Harbin Institute of Technology), Ministry of Education, Harbin 150001, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yufeng","family":"Zhang","sequence":"additional","affiliation":[{"name":"MEMS center, Harbin Institute of Technology, Harbin 150001, China"},{"name":"Key Laboratory of Micro-structures Manufacturing (Harbin Institute of Technology), Ministry of Education, Harbin 150001, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Wenbo","family":"Zhang","sequence":"additional","affiliation":[{"name":"MEMS center, Harbin Institute of Technology, Harbin 150001, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Dongliang","family":"Chen","sequence":"additional","affiliation":[{"name":"MEMS center, Harbin Institute of Technology, Harbin 150001, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Liang","family":"Yin","sequence":"additional","affiliation":[{"name":"MEMS center, Harbin Institute of Technology, Harbin 150001, China"},{"name":"Key Laboratory of Micro-structures Manufacturing (Harbin Institute of Technology), Ministry of Education, Harbin 150001, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Xiaowei","family":"Liu","sequence":"additional","affiliation":[{"name":"MEMS center, Harbin Institute of Technology, Harbin 150001, China"},{"name":"Key Laboratory of Micro-structures Manufacturing (Harbin Institute of Technology), Ministry of Education, Harbin 150001, China"},{"name":"State Key Laboratory of Urban Water Resource &amp; Environment, Harbin Institute of Technology, Harbin 150001, China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2020,1,27]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","unstructured":"Prikhodko, I.P., Gregory, J.A., Clark, W.A., Geen, J.A., Judy, M.W., Ahn, C.H., and Kenny, T.W. 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Micromachines, 10.","DOI":"10.3390\/mi10040270"}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/20\/3\/687\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,13]],"date-time":"2025-10-13T13:30:31Z","timestamp":1760362231000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/20\/3\/687"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2020,1,27]]},"references-count":24,"journal-issue":{"issue":"3","published-online":{"date-parts":[[2020,2]]}},"alternative-id":["s20030687"],"URL":"https:\/\/doi.org\/10.3390\/s20030687","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2020,1,27]]}}}