{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,6,16]],"date-time":"2026-06-16T14:56:19Z","timestamp":1781621779389,"version":"3.54.5"},"reference-count":18,"publisher":"MDPI AG","issue":"3","license":[{"start":{"date-parts":[[2020,1,28]],"date-time":"2020-01-28T00:00:00Z","timestamp":1580169600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>Tackling issues of implantation-caused defects and contamination, this paper presents a new complementary metal\u2013oxide\u2013semiconductor (CMOS) image sensor (CIS) pixel design concept based on a native epitaxial layer for photon detection, charge storage, and charge transfer to the sensing node. To prove this concept, a backside illumination (BSI), p-type, 2-\u00b5m-pitch pixel was designed. It integrates a vertical pinned photo gate (PPG), a buried vertical transfer gate (TG), sidewall capacitive deep trench isolation (CDTI), and backside oxide\u2013nitride\u2013oxide (ONO) stack. The designed pixel was fabricated with variations of key parameters for optimization. Testing results showed the following achievements: 13,000 h+ full-well capacity with no lag for charge transfer, 80% quantum efficiency (QE) at 550-nm wavelength, 5 h+\/s dark current at 60 \u00b0C, 2 h+ temporal noise floor, and 75 dB dynamic range. In comparison with conventional pixel design, the proposed concept could improve CIS performance.<\/jats:p>","DOI":"10.3390\/s20030727","type":"journal-article","created":{"date-parts":[[2020,1,28]],"date-time":"2020-01-28T09:37:09Z","timestamp":1580204229000},"page":"727","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":19,"title":["Fully Depleted, Trench-Pinned Photo Gate for CMOS Image Sensor Applications"],"prefix":"10.3390","volume":"20","author":[{"ORCID":"https:\/\/orcid.org\/0000-0003-1992-8477","authenticated-orcid":false,"given":"Francois","family":"Roy","sequence":"first","affiliation":[{"name":"STMicroelectronics, 850 Rue Jean Monnet, 38921 Colles, France"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Andrej","family":"Suler","sequence":"additional","affiliation":[{"name":"STMicroelectronics, 850 Rue Jean Monnet, 38921 Colles, France"},{"name":"IMEP-LaHC, Universit\u00e9 Grenoble Alpes, 38016 Grenoble, France"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Thomas","family":"Dalleau","sequence":"additional","affiliation":[{"name":"STMicroelectronics, 850 Rue Jean Monnet, 38921 Colles, France"},{"name":"INL, Universit\u00e9 Claude Bernard Lyon 1, 69622 Villeurbanne, France"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-1941-2772","authenticated-orcid":false,"given":"Romain","family":"Duru","sequence":"additional","affiliation":[{"name":"STMicroelectronics, 850 Rue Jean Monnet, 38921 Colles, France"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Daniel","family":"Benoit","sequence":"additional","affiliation":[{"name":"STMicroelectronics, 850 Rue Jean Monnet, 38921 Colles, France"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Jihane","family":"Arnaud","sequence":"additional","affiliation":[{"name":"STMicroelectronics, 850 Rue Jean Monnet, 38921 Colles, France"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Yvon","family":"Cazaux","sequence":"additional","affiliation":[{"name":"LETI-CEA Tech, 17 rue des Martyrs, 38054 Grenoble, France"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Catherine","family":"Chaton","sequence":"additional","affiliation":[{"name":"LETI-CEA Tech, 17 rue des Martyrs, 38054 Grenoble, France"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Laurent","family":"Montes","sequence":"additional","affiliation":[{"name":"IMEP-LaHC, Universit\u00e9 Grenoble Alpes, 38016 Grenoble, France"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Panagiota","family":"Morfouli","sequence":"additional","affiliation":[{"name":"IMEP-LaHC, Universit\u00e9 Grenoble Alpes, 38016 Grenoble, France"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Guo-Neng","family":"Lu","sequence":"additional","affiliation":[{"name":"INL, Universit\u00e9 Claude Bernard Lyon 1, 69622 Villeurbanne, France"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"1968","published-online":{"date-parts":[[2020,1,28]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","unstructured":"Teranishi, N., Kohono, A., Ishihara, Y., Oda, E., and Arai, K. 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